公开(公告)号：US5172401A

公开(公告)日：1992-12-15

申请号：US692849

申请日：1991-04-29

申请人： Masatoshi Asari ,  Shiro Oikawa

发明人： Masatoshi Asari ,  Shiro Oikawa

IPC分类号： H01J35/14 ,  H01J35/30 ,  H05G1/70

CPC分类号： H05G1/70 ,  H01J35/14 ,  H01J35/30

摘要： A high-speed scan type X-ray generating apparatus for scanning X-ray generating positions along a circumference of an examinee, in which an electron beam is emitted from an electron gun into a ring-shaped vacuum tube. The electron beam is deflected by electromagnets or the like to run on a circular orbit through the vacuum tube. The electron beam is further deflected by different, small electromagnets to deviate from the circular orbit and impinge on a ring-shaped target, thereby generating an X-ray toward the center of the vacuum tube. By controlling the small electromagnets, the X-ray generating position is caused to scan at high speed along a circumferential wall of the ring-shaped target.

公开(公告)号：US4891601A

公开(公告)日：1990-01-02

申请号：US277192

申请日：1988-11-29

申请人： Masatoshi Asari ,  Ikuo Konishi ,  Hiroyuki Fujita ,  Akira Hirakimoto ,  Hiroaki Nakanishi

发明人： Masatoshi Asari ,  Ikuo Konishi ,  Hiroyuki Fujita ,  Akira Hirakimoto ,  Hiroaki Nakanishi

IPC分类号： H05H7/18

CPC分类号： H05H7/18

摘要： In a multipole linear accelerator such as of a quadrupole type, fine positional adjustment of the tip portions of the electrodes constituting the multipole structure can be made with electric contact kept substantially unaffected between the electrodes and the cavity drum in which the electrodes are mounted. Each of the electrodes are provided with a series of contact plates on both sides of the root portion of the electrode over the whole length thereof. Each of the contact plates, which are held to the root portion of the electrode by means of an adjusting screw bolt, slantwise bridges the root portion of the electrode and the inner surface of the cavity drum with elastic contact pieces interposed. Tightening or loosing the adjusting screw bolts on both sides of the electrode displaces the electrode with electric contact kept unchanged between the electrode and the cavity drum by the elastic effect of the above contact pieces made to interpose between the contact plates and both the electrodes and the cavity drum.

摘要翻译： 在诸如四极型的多极直线加速器中，构成多极结构的电极的尖端部分的精细位置调节可以在电极和安装有电极的空腔鼓之间基本上不受影响的情况下进行。 每个电极在其整个长度上在电极的根部的两侧设置有一系列接触板。 通过调节螺栓固定在电极的根部的每个接触板通过插入的弹性接触片将电极的根部部分和腔体鼓的内表面倾斜地桥接。 电极两侧的调节螺栓拧紧或松动会使电极与电极之间的电气接触保持不变，并通过上述接触片与接触板和两个电极之间的接触片的弹性效应， 腔鼓。

公开(公告)号：US5796219A

公开(公告)日：1998-08-18

申请号：US532116

申请日：1995-09-22

申请人： Akira Hirakimoto ,  Masatoshi Asari

发明人： Akira Hirakimoto ,  Masatoshi Asari

IPC分类号： H05H7/12

CPC分类号： H05H7/12

摘要： A method for controlling a particle acceleration energy in a radio-frequency quadrupole accelerator, the method being particularly adapted for ion implantation in the process of manufacturing semiconductor devices, wherein the particle acceleration energy is varied without the necessity of changing the resonant frequency of the RFQ accelerator so that the final energy of the particles has a plurality of distinct energy having a lower value than the designed voltage.

摘要翻译： 一种用于控制射频四极加速器中的粒子加速能量的方法，该方法特别适用于制造半导体器件的过程中的离子注入，其中粒子加速能量是变化的，而不需要改变RFQ的谐振频率 使得颗粒的最终能量具有多于具有比设计电压低的值的不同能量。