Resonant radiofrequency wave plasma generating apparatus with improved
stage
    1.
    发明授权
    Resonant radiofrequency wave plasma generating apparatus with improved stage 失效
    共振射频波等离子体发生装置,具有改进的阶段

    公开(公告)号:US5736818A

    公开(公告)日:1998-04-07

    申请号:US616349

    申请日:1996-03-15

    IPC分类号: H01J37/32 H05H1/46

    摘要: A plasma (56, 333) generating apparatus (10, 320, 450) wherein a stage (250, 300, 300A, 350, 400, 425) is constructed to keep the plasma on the substrate (S). A pair of electrically, non-conductive tubes (252, 252A, 303, 305, 303A, 305A 403, 405) are mounted on a conductive base plate (253,306,406) having holes (255, 306B) for gas flow and one of the tubes supports a conductive support plate (251, 301, 351, 401) for a substrate (S). An electrically conductive disk (304, 404) between the tubes is provided. An outer conductive tube (307, 418) is preferably used with larger diameter chambers. The stage is designed to prevent the plasma from falling below conductive support plate which preferably mounts a graphite insert (302, 352, 402) which supports the substrate.

    摘要翻译: 一种等离子体(56,333)发生装置(10,320,450),其中构造了用于将等离子体保持在衬底(S)上的级(250,3300,300,400,450)。 一对电不导电管(252,252A,303,305,303A,305A,403,405)安装在具有用于气流的孔(255,306B)的导电基板(253,306,406)上,并且其中一个管 支撑用于衬底(S)的导电支撑板(251,301,351,401)。 提供了管之间的导电盘(304,404)。 外导电管(307,418)优选用于较大直径的腔室。 该台被设计成防止等离子体落在导电支撑板之下,其优选地安装支撑衬底的石墨插入件(302,352,402)。

    Automated electronically controlled microsprayer

    公开(公告)号:US06409093B1

    公开(公告)日:2002-06-25

    申请号:US09761071

    申请日:2001-01-15

    IPC分类号: B05B1700

    摘要: An electronically controlled micro-dispensing apparatus (10) is described. The apparatus includes a container (12), an adaptor (18), a nozzle (28) and a control circuit (34 or 42). The container is filled with the chemical (104) and propellant (102). The adaptor, nozzle and control circuit are removable from the container and are reusable. The control circuits controls the length of pulse and the time duration between each pulse. By controlling these factors, the apparatus dispenses a precise amount of liquid over a set time period. The ejector allows for controlled dispensing and allows the liquid to be sprayed a greater distance. In the preferred embodiment, the apparatus are used to dispense a pheromone in an outdoor setting, such as an orchard (100), to control insects.

    Automated electronically controlled microsprayer
    3.
    发明授权
    Automated electronically controlled microsprayer 失效
    自动电子控制小花瓶

    公开(公告)号:US06182904B2

    公开(公告)日:2001-02-06

    申请号:US09415509

    申请日:1999-10-08

    IPC分类号: B05B1700

    摘要: An electronically controlled micro-dispensing apparatus (10) is described. The apparatus includes a container (12), an adaptor (18), a nozzle (28) and a control circuit (34 or 42). The container is filled with the chemical (104) and propellant (102). The adaptor, nozzle and control circuit are removable from the container and are reusable. The control circuits controls the length of pulse and the time duration between each pulse. By controlling these factors, the apparatus dispenses a precise amount of liquid over a set time period. The ejector allows for controlled dispensing and allows the liquid to be sprayed a greater distance. In the preferred embodiment, the apparatus are used to dispense a pheromone in an outdoor setting, such as an orchard (100), to control insects.

    摘要翻译: 描述了一种电子控制微量分配装置(10)。 该装置包括容器(12),适配器(18),喷嘴(28)和控制电路(34或42)。 容器中填充有化学物质(104)和推进剂(102)。 适配器,喷嘴和控制电路可从容器中取出并可重复使用。 控制电路控制脉冲的长度和每个脉冲之间的持续时间。 通过控制这些因素,该装置在设定的时间段内分配精确量的液体。 喷射器允许受控的分配,并允许液体喷射更大的距离。 在优选实施例中,该装置用于在户外环境(例如果园(100))中分配信息素以控制昆虫。