公开(公告)号：US20050158473A1

公开(公告)日：2005-07-21

申请号：US10882716

申请日：2004-06-30

Applicant: Michael Raykin ,  John de Larios ,  Mikhail Korolik ,  Michael Smith ,  Carl Woods

Inventor： Michael Raykin ,  John de Larios ,  Mikhail Korolik ,  Michael Smith ,  Carl Woods

IPC: A47L15/00 ,  A47L25/00 ,  B08B1/02 ,  B08B1/04 ,  B08B3/00 ,  B08B3/04 ,  B08B7/00 ,  B08B7/04 ,  H01L21/00 ,  B05D3/00

CPC classification number: H01L21/67046 ,  B08B1/04 ,  B08B3/04 ,  H01L21/67028 ,  H01L21/67034 ,  H01L21/67051

Abstract: A method for preparing a surface of a substrate is provided. The method includes scanning the surface of the substrate by a meniscus, preparing the surface of the substrate using the meniscus, and performing a next preparation operation on the surface of the substrate that was prepared without performing a rinsing operation.

Abstract translation: 提供了制备基板表面的方法。 该方法包括通过弯液面扫描基板的表面，使用弯月面准备基板的表面，并且在不执行漂洗操作的情况下对基板的表面进行下一个准备操作。