公开(公告)号：US20080290264A1

公开(公告)日：2008-11-27

申请号：US11591175

申请日：2006-11-01

Applicant: Alexander Henstra ,  Michael Ross Scheinfein

Inventor： Alexander Henstra ,  Michael Ross Scheinfein

IPC: G01D18/00 ,  G01N23/225

CPC classification number: H01J37/153 ,  H01J37/26 ,  H01J2237/1534

Abstract: The invention describes a corrector for the correction of chromatic aberrations in a particle lens, such as used in a SEM or a TEM. So as to reduce the stability demands on the power supplies of such a corrector, the energy with which the particle beam passes through the corrector is lower than the energy with which the beam passes through the lens to be corrected.

Abstract translation: 本发明描述了用于校正像在用于SEM或TEM的粒子透镜中的色像差的校正器。 为了降低对这种校正器的电源的稳定性要求，粒子束通过校正器的能量低于光束通过透镜的能量，以被校正。

公开(公告)号：US08884245B2

公开(公告)日：2014-11-11

申请号：US11591175

申请日：2006-11-01

Applicant: Alexander Henstra ,  Michael Ross Scheinfein

Inventor： Alexander Henstra ,  Michael Ross Scheinfein

IPC: G21K5/00 ,  H01J37/26 ,  H01J37/153

CPC classification number: H01J37/153 ,  H01J37/26 ,  H01J2237/1534

Abstract: The invention describes a corrector for the correction of chromatic aberrations in a particle lens, such as used in a SEM or a TEM. So as to reduce the stability demands on the power supplies of such a corrector, the energy with which the particle beam passes through the corrector is lower than the energy with which the beam passes through the lens to be corrected.

Abstract translation: 本发明描述了用于校正像在用于SEM或TEM的粒子透镜中的色像差的校正器。 为了降低对这种校正器的电源的稳定性要求，粒子束通过校正器的能量低于光束通过透镜的能量，以被校正。