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公开(公告)号：US20050219554A1
公开(公告)日：2005-10-06
申请号：US10815893
申请日：2004-03-31
CPC分类号： G01D5/262 , G01B11/002 , G01D5/26 , G01D5/347
摘要： A position sensor using a novel structured light generating scale or target member is provided. An imaging array is capable of measuring the relative translation and orientation of the structured light generating scale or target member in X, Y, Z, yaw, pitch, and roll (“6D”) simultaneously, and with high precision. The target member includes an array of lenses that provide an array of structured light patterns that diverge, converge, or both, to change the size of the corresponding structured light image as a function of the “Z” coordinate of the relative position, in various embodiments. The X-Y position of each individual structured light image on the imaging array varies with the relative X-Y position of the structured light generating target member, and the shape of structured light image changes as a function of the relative angular orientation. Accordingly, three or more structured light images analyzed in the same image are usable to determine a 6D measurement between the structured light generating target member and the array detector. X and Y displacement of the target member can be accumulated by known methods and the other 6D measurement components are absolute measurements at any position.
摘要翻译： 提供了一种使用新型结构光产生标尺或目标构件的位置传感器。 成像阵列能够以高精度同时测量X，Y，Z，偏转，俯仰和滚动（“6D”）中的结构光产生标尺或目标构件的相对平移和取向。 目标构件包括透镜阵列，其提供发散，会聚或两者的结构光图案阵列，以根据相对位置的“Z”坐标改变相应结构光图像的大小，以各种方式 实施例。 成像阵列上的每个单独的结构光图像的X-Y位置随着结构化光产生目标构件的相对X-Y位置而变化，并且结构化光图像的形状作为相对角度取向的函数而变化。 因此，在相同图像中分析的三个或更多个结构光图像可用于确定结构化光产生目标构件和阵列检测器之间的6D测量。 目标构件的X和Y位移可以通过已知方法积累，其他6D测量分量是任何位置的绝对测量。
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公开(公告)号：US20070008550A1
公开(公告)日：2007-01-11
申请号：US11175271
申请日：2005-07-07
IPC分类号： G01B11/02
CPC分类号： G01B9/02032 , G01B9/02019 , G01B9/02097 , G01B11/26
摘要： A method of determining an amount of tilt may include projecting at least two coherent wavefronts toward a target surface, the wavefronts reflecting from the target surface to create an interference fringe pattern on a detector, and transmitting a beam toward the target surface, the transmitted beam reflecting from the target surface to form a beam spot on the detector. A fringe pitch indicative of a distance to the target surface may be determined based on the interference fringe pattern. A displacement on the detector of the beam spot, relative to a nominal location of the beam spot when the target surface is at a nominal angle of incidence relative to the beam, may be determined. The amount of tilt of the target surface relative to the nominal angle of incidence, may be determined based on the displacement of the beam spot and the determined fringe pitch.
摘要翻译： 确定倾斜量的方法可以包括将至少两个相干波前投射到目标表面，波前从目标表面反射以在检测器上产生干涉条纹图案，并将光束传送到目标表面，透射光束 从目标表面反射以在检测器上形成束斑。 可以基于干涉条纹图案来确定表示到目标表面的距离的条纹间距。 可以确定当目标表面相对于光束的入射角相对于光束点的标称位置时，光斑的检测器上的位移。 目标表面相对于标称入射角的倾斜量可以基于束斑的位移和所确定的边缘间距来确定。
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3.发明申请Optical path array and angular filter for translation and orientation sensing 有权用于平移和定向感测的光路阵列和角度滤波器公开(公告)号：US20050211885A1
公开(公告)日：2005-09-29
申请号：US10808849
申请日：2004-03-25
CPC分类号： G01D5/34723 , G01D5/268
摘要： A position sensor using a novel optical path array (OPA) element, an angle-selective spatial filter, and an imaging array is capable of measuring the translation and orientation relative to a target member in X, Y, Z, yaw, pitch, and roll (“6D”) simultaneously, and with high precision. A target member includes an array of target points surrounded by a contrasting surface. The position sensor uses the OPA element in combination with the angle-selective spatial filter in a target point imaging arrangement such that the imaging array of the position sensor only receives light rays that enter the OPA element according to an operable cone angle α. Accordingly, each target point generally produces a ring-shaped image having a size on the imaging array that varies with the Z position of each target point. The X-Y position of each target point image on the imaging array varies with the X-Y position of each target point. Accordingly, three or more target point images analyzed in the same image are usable to determine a 6D measurement relative to the target member. X and Y displacement of the target member can be accumulated by known methods and the other 6D measurement components are absolute measurements at any position.
摘要翻译： 使用新型光路阵列（OPA）元件，角度选择性空间滤波器和成像阵列的位置传感器能够测量相对于目标构件在X，Y，Z，偏航，俯仰和 滚动（“6D”），并具有高精度。 目标成员包括由对比表面包围的目标点阵列。 位置传感器将OPA元件与目标点成像布置中的角度选择性空间滤波器组合使用，使得位置传感器的成像阵列仅接收根据可操作锥角α进入OPA元件的光线。 因此，每个目标点通常产生具有随着每个目标点的Z位置而变化的成像阵列上的尺寸的环形图像。 成像阵列上的每个目标点图像的X-Y位置随着每个目标点的X-Y位置而变化。 因此，在相同图像中分析的三个或更多个目标点图像可用于确定相对于目标成员的6D测量。 目标构件的X和Y位移可以通过已知方法积累，其他6D测量分量是任何位置的绝对测量。
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