公开(公告)号：US20100158071A1

公开(公告)日：2010-06-24

申请号：US12353069

申请日：2009-01-13

申请人： Cornel Cobianu ,  Ioan Pavelescu ,  Mihal Gologanu

发明人： Cornel Cobianu ,  Ioan Pavelescu ,  Mihal Gologanu

IPC分类号： G01H13/00 ,  G01K5/58 ,  G01P15/09

CPC分类号： H03H9/02535

摘要： A SAW-based micro-sensor apparatus for simultaneously monitoring acceleration/vibration and temperature utilizing a sensing element configured as a SAW device (e.g., SAW resonator or SAW delay line). The SAW device can be located in different locations on a substrate with respect to a thin piezoelectric diaphragm comprising an inertial mass. The temperature-compensated acceleration/vibration can be measured utilizing a frequency difference between an acceleration sensitive SAW resonator (e.g., SAW-g) and a temperature sensitive SAW resonator (e.g., SAW-T). The temperature can be measured utilizing a frequency shift provided by the SAW-T and a temperature reference SAW resonator (e.g., SAW-R). Similarly, the phase response of different reflectors of the SAW delay line can be utilized to differentially measure the acceleration/vibration and temperature.

摘要翻译： 一种基于SAW的微传感器装置，用于利用构造为SAW器件（例如，SAW谐振器或SAW延迟线）的感测元件同时监视加速/振动和温度。 相对于包括惯性质量的薄压电振动膜，SAW器件可位于基板上的不同位置。 可以利用加速度敏感的SAW谐振器（例如SAW-g）和温度敏感的SAW谐振器（例如，SAW-T）之间的频率差来测量温度补偿的加速度/振动。 可以使用由SAW-T和温度参考SAW谐振器（例如，SAW-R）提供的频移来测量温度。 类似地，SAW延迟线的不同反射器的相位响应可以用于差分地测量加速度/振动和温度。

公开(公告)号：US08317392B2

公开(公告)日：2012-11-27

申请号：US12353069

申请日：2009-01-13

申请人： Cornel Cobianu ,  Ioan Pavelescu ,  Mihal Gologanu

发明人： Cornel Cobianu ,  Ioan Pavelescu ,  Mihal Gologanu

IPC分类号： G01K11/26 ,  G01P15/09 ,  H03H9/02

CPC分类号： H03H9/02535

摘要： A SAW-based micro-sensor apparatus for simultaneously monitoring acceleration/vibration and temperature utilizing a sensing element configured as a SAW device (e.g., SAW resonator or SAW delay line). The SAW device can be located in different locations on a substrate with respect to a thin piezoelectric diaphragm comprising an inertial mass. The temperature-compensated acceleration/vibration can be measured utilizing a frequency difference between an acceleration sensitive SAW resonator (e.g., SAW-g) and a temperature sensitive SAW resonator (e.g., SAW-T). The temperature can be measured utilizing a frequency shift provided by the SAW-T and a temperature reference SAW resonator (e.g., SAW-R). Similarly, the phase response of different reflectors of the SAW delay line can be utilized to differentially measure the acceleration/vibration and temperature.

摘要翻译： 一种基于SAW的微传感器装置，用于利用构造为SAW器件（例如SAW谐振器或SAW延迟线）的感测元件同时监视加速/振动和温度。 相对于包括惯性质量的薄压电振动膜，SAW器件可位于基板上的不同位置。 可以利用加速度敏感的SAW谐振器（例如SAW-g）和温度敏感的SAW谐振器（例如，SAW-T）之间的频率差来测量温度补偿的加速度/振动。 可以使用由SAW-T和温度参考SAW谐振器（例如，SAW-R）提供的频移来测量温度。 类似地，SAW延迟线的不同反射器的相位响应可以用于差分地测量加速度/振动和温度。