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1.发明申请SURFACE ACOUSTIC WAVE BASED MICRO-SENSOR APPARATUS AND METHOD FOR SIMULTANEOUSLY MONITORING MULTIPLE CONDITIONS 失效基于表面声波的微型传感器装置和同时监测多种条件的方法公开(公告)号：US20100158071A1
公开(公告)日：2010-06-24
申请号：US12353069
申请日：2009-01-13
申请人： Cornel Cobianu , Ioan Pavelescu , Mihal Gologanu
发明人： Cornel Cobianu , Ioan Pavelescu , Mihal Gologanu
CPC分类号： H03H9/02535
摘要： A SAW-based micro-sensor apparatus for simultaneously monitoring acceleration/vibration and temperature utilizing a sensing element configured as a SAW device (e.g., SAW resonator or SAW delay line). The SAW device can be located in different locations on a substrate with respect to a thin piezoelectric diaphragm comprising an inertial mass. The temperature-compensated acceleration/vibration can be measured utilizing a frequency difference between an acceleration sensitive SAW resonator (e.g., SAW-g) and a temperature sensitive SAW resonator (e.g., SAW-T). The temperature can be measured utilizing a frequency shift provided by the SAW-T and a temperature reference SAW resonator (e.g., SAW-R). Similarly, the phase response of different reflectors of the SAW delay line can be utilized to differentially measure the acceleration/vibration and temperature.
摘要翻译： 一种基于SAW的微传感器装置，用于利用构造为SAW器件（例如，SAW谐振器或SAW延迟线）的感测元件同时监视加速/振动和温度。 相对于包括惯性质量的薄压电振动膜，SAW器件可位于基板上的不同位置。 可以利用加速度敏感的SAW谐振器（例如SAW-g）和温度敏感的SAW谐振器（例如，SAW-T）之间的频率差来测量温度补偿的加速度/振动。 可以使用由SAW-T和温度参考SAW谐振器（例如，SAW-R）提供的频移来测量温度。 类似地，SAW延迟线的不同反射器的相位响应可以用于差分地测量加速度/振动和温度。
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2.发明授权Surface acoustic wave based micro-sensor apparatus and method for simultaneously monitoring multiple conditions 失效基于声表面波的微传感器装置和方法同时监测多种条件公开(公告)号：US08317392B2
公开(公告)日：2012-11-27
申请号：US12353069
申请日：2009-01-13
申请人： Cornel Cobianu , Ioan Pavelescu , Mihal Gologanu
发明人： Cornel Cobianu , Ioan Pavelescu , Mihal Gologanu
CPC分类号： H03H9/02535
摘要： A SAW-based micro-sensor apparatus for simultaneously monitoring acceleration/vibration and temperature utilizing a sensing element configured as a SAW device (e.g., SAW resonator or SAW delay line). The SAW device can be located in different locations on a substrate with respect to a thin piezoelectric diaphragm comprising an inertial mass. The temperature-compensated acceleration/vibration can be measured utilizing a frequency difference between an acceleration sensitive SAW resonator (e.g., SAW-g) and a temperature sensitive SAW resonator (e.g., SAW-T). The temperature can be measured utilizing a frequency shift provided by the SAW-T and a temperature reference SAW resonator (e.g., SAW-R). Similarly, the phase response of different reflectors of the SAW delay line can be utilized to differentially measure the acceleration/vibration and temperature.
摘要翻译： 一种基于SAW的微传感器装置，用于利用构造为SAW器件（例如SAW谐振器或SAW延迟线）的感测元件同时监视加速/振动和温度。 相对于包括惯性质量的薄压电振动膜，SAW器件可位于基板上的不同位置。 可以利用加速度敏感的SAW谐振器（例如SAW-g）和温度敏感的SAW谐振器（例如，SAW-T）之间的频率差来测量温度补偿的加速度/振动。 可以使用由SAW-T和温度参考SAW谐振器（例如，SAW-R）提供的频移来测量温度。 类似地，SAW延迟线的不同反射器的相位响应可以用于差分地测量加速度/振动和温度。
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