公开(公告)号：US06411746B1

公开(公告)日：2002-06-25

申请号：US09484491

申请日：2000-01-18

申请人： Darol Chamberlain ,  Gang Chen ,  Steven B. Dawes ,  Peter J. McNeilly ,  Mike X. Ouyang ,  Laura A. Weller-Brophy

发明人： Darol Chamberlain ,  Gang Chen ,  Steven B. Dawes ,  Peter J. McNeilly ,  Mike X. Ouyang ,  Laura A. Weller-Brophy

IPC分类号： G02F1035

CPC分类号： G02F1/0147 ,  G02F1/0115 ,  G02F2201/307 ,  G05D23/24

摘要： The present invention relates to a tunable optical device 10 that includes an optical fiber device 12 having optical properties that vary with temperature and a heater 14. The heater 14 is thermally coupled to the optical fiber device 12. The heater 14 includes a metal layer 18 and two electrical contacts 20, 22 that are electrically connected to the metal layer 18. The electrical contacts 20, 22 are spaced apart from one another along the metal layer 18. The electrical resistance of the portion of the metal layer 18 between the contacts 20, 22 varies with temperature and serves as a resistive heater. The invention also includes a controller 16 that is electrically connected to the heater 14. The controller 16 provides electrical power to the heater 14 and measures the electrical voltage across the heater 14. The controller 16 compares the measured electrical voltage to a pre-selected reference value. The controller then regulates the amount of electrical current supplied to the heater 14. By regulating the amount of electrical current supplied to the heater 14 the temperature of the heater 14 is controlled.

摘要翻译： 本发明涉及一种可调谐光学器件10，其包括具有随温度变化的光学特性的光纤器件12和加热器14.加热器14热耦合到光纤器件12.加热器14包括金属层18 以及电连接到金属层18的两个电触点20,22.电触点20,22沿着金属层18彼此间隔开。金属层18在触点20之间的电阻 ，22随温度变化，用作电阻加热器。 本发明还包括电连接到加热器14的控制器16.控制器16向加热器14提供电力并测量加热器14两端的电压。控制器16将测得的电压与预选参考值进行比较 值。 然后，控制器调节供应给加热器14的电流量。通过调节供应给加热器14的电流量，控制加热器14的温度。

公开(公告)号：US06618409B1

公开(公告)日：2003-09-09

申请号：US09564015

申请日：2000-05-03

申请人： Martin (Hai) Hu ,  Lyle D. Kinney ,  Emmannuel C. Onyiriuka ,  Mike X. Ouyang ,  Chung-en Zah

发明人： Martin (Hai) Hu ,  Lyle D. Kinney ,  Emmannuel C. Onyiriuka ,  Mike X. Ouyang ,  Chung-en Zah

IPC分类号： H01S500

CPC分类号： H01L33/44 ,  H01S5/028 ,  H01S5/0282

摘要： A method of passivating an edge-emitting semiconductor diode laser and the resultant product. Laser bars are cleaved in air from a wafer containing multiple laser bars. The bars are placed into a vacuum processing chamber in which two steps are performed without breaking vacuum. The first step includes cleaning the facets including removing the native oxide by, for example, a low-energy ion beam or by an electron cyclotron resonance (EAR) plasma containing hydrogen and possibly argon or xenon with the bars being negatively biased. The second step includes coating the cleaned facets with a thin passivation layer of hydrogenated amorphous silicon (a-Si:H), whereby the facets are coating by the passivation layer without an intervening oxide. A low oxygen partial pressure of no more than 10−8 Torr is maintained between the cleaning and deposition, both of which preferably are done in the same chamber. Also preferably, anti-reflective or highly reflective coatings are deposited on the facets without returning the laser bars to air.

摘要翻译： 钝化边缘发射半导体二极管激光器和所得产物的方法。 激光棒在含有多个激光棒的晶片的空气中被切割。 将条放置在真空处理室中，其中执行两个步骤而不破坏真空。 第一步包括清洁小平面，包括通过例如低能离子束或通过电子回旋共振（EAR）等离子体除去天然氧化物，所述等离子体包含氢气和可能的氩或氙气，其中所述条被负偏压。 第二步包括使用氢化非晶硅（a-Si：H）的薄钝化层涂覆清洁的小平面，由此该面被钝化层涂覆而没有中间氧化物。 在清洁和沉积之间保持不超过10-8托的低氧分压，这两者优选在相同的室中进行。 还优选地，防反射或高反射涂层沉积在刻面上，而不将激光条返回到空气中。