Thermally tunable optical devices
    1.
    发明授权
    Thermally tunable optical devices 有权
    热可调光学器件

    公开(公告)号:US06411746B1

    公开(公告)日:2002-06-25

    申请号:US09484491

    申请日:2000-01-18

    IPC分类号: G02F1035

    摘要: The present invention relates to a tunable optical device 10 that includes an optical fiber device 12 having optical properties that vary with temperature and a heater 14. The heater 14 is thermally coupled to the optical fiber device 12. The heater 14 includes a metal layer 18 and two electrical contacts 20, 22 that are electrically connected to the metal layer 18. The electrical contacts 20, 22 are spaced apart from one another along the metal layer 18. The electrical resistance of the portion of the metal layer 18 between the contacts 20, 22 varies with temperature and serves as a resistive heater. The invention also includes a controller 16 that is electrically connected to the heater 14. The controller 16 provides electrical power to the heater 14 and measures the electrical voltage across the heater 14. The controller 16 compares the measured electrical voltage to a pre-selected reference value. The controller then regulates the amount of electrical current supplied to the heater 14. By regulating the amount of electrical current supplied to the heater 14 the temperature of the heater 14 is controlled.

    摘要翻译: 本发明涉及一种可调谐光学器件10,其包括具有随温度变化的光学特性的光纤器件12和加热器14.加热器14热耦合到光纤器件12.加热器14包括金属层18 以及电连接到金属层18的两个电触点20,22.电触点20,22沿着金属层18彼此间隔开。金属层18在触点20之间的电阻 ,22随温度变化,用作电阻加热器。 本发明还包括电连接到加热器14的控制器16.控制器16向加热器14提供电力并测量加热器14两端的电压。控制器16将测得的电压与预选参考值进行比较 值。 然后,控制器调节供应给加热器14的电流量。通过调节供应给加热器14的电流量,控制加热器14的温度。

    Fluid-encapsulated MEMS optical switch
    2.
    发明授权
    Fluid-encapsulated MEMS optical switch 失效
    流体封装MEMS光开关

    公开(公告)号:US06404942B1

    公开(公告)日:2002-06-11

    申请号:US09421765

    申请日:1999-10-19

    IPC分类号: G02B635

    摘要: A fluid encapsulated MEMS optical switch includes an optical waveguide matrix with MEMS mirrors situated in trenches located at waveguide cross-points. The trenches are filled with collimation-maintaining fluid and the mirrors are immersed therein. The collimation maintaining fluid prevents the light beam from spreading when it enters the switch cross-points. This feature enables the use of much smaller MEMS mirrors and prevents some of the typical MEMS mirror problems found in the related art. In particular, the MEMS mirror disclosed in the present invention is reduced to approximately 15 &mgr;m wide and 2 &mgr;m thick, resulting in shorter actuation distances of approximately 15 &mgr;m. This feature results in an optical switch having faster switching times.

    摘要翻译: 流体封装的MEMS光开关包括具有位于波导交叉点的沟槽中的MEMS镜的光波导矩阵。 沟槽填充准直维持流体,反射镜浸入其中。 准直维持流体防止光束进入开关交叉点时扩散。 该特征使得能够使用更小的MEMS反射镜并且防止在现有技术中发现的一些典型的MEMS镜像问题。 特别地,本发明中公开的MEMS镜减小到大约15μm宽和2μm厚,导致较短的致动距离约为15μm。 该特征导致具有更快切换时间的光开关。