Alignment method, transfer method and transfer apparatus
    1.
    发明授权
    Alignment method, transfer method and transfer apparatus 有权
    对准方法,转印方法和转印装置

    公开(公告)号:US09327488B2

    公开(公告)日:2016-05-03

    申请号:US13599534

    申请日:2012-08-30

    CPC classification number: B41F1/16 B41F33/0081 B41P2233/13

    Abstract: A carrier and a substrate are aligned even if an imager cannot be simultaneously focused on alignment marks formed on both the carrier and the substrate. Center of gravity positions G1m of an alignment pattern element AP1 on a substrate and G2m of an alignment pattern element AP2 on a transparent blanket are calculated by image processing from an image IM imaged via the blanket by a CCD camera. The position of the center of gravity Gm2 is specified by a process associated with edge extraction from the image imaged with the alignment pattern element AP2 on the blanket being in focus. High spatial frequency components are removed and low frequency components are extracted for the alignment pattern element AP1 on the substrate imaged out of focus to have a blurred outline, and the position of the center of gravity G1m is specified from an extraction result.

    Abstract translation: 即使成像器不能同时聚焦在形成在载体和衬底上的对准标记上,载体和衬底也被对准。 通过CCD照相机从通过毯子成像的图像IM的图像处理来计算基板上的对准图案元件AP1的重心位置G1m和透明毯子上的对准图案元件AP2的G2m。 重心Gm2的位置由与被对准的毯子上的对准图案元件AP2成像的图像的边缘提取相关联的处理来指定。 去除高空间频率分量,并且提取低频分量,使得对准图案元件AP1在被对焦成像的基板上具有模糊轮廓,并且从提取结果确定重心G1m的位置。

    ALIGNMENT METHOD, TRANSFER METHOD AND TRANSFER APPARATUS
    2.
    发明申请
    ALIGNMENT METHOD, TRANSFER METHOD AND TRANSFER APPARATUS 有权
    对准方法,传送方法和传送装置

    公开(公告)号:US20130135458A1

    公开(公告)日:2013-05-30

    申请号:US13599534

    申请日:2012-08-30

    CPC classification number: B41F1/16 B41F33/0081 B41P2233/13

    Abstract: A carrier and a substrate are aligned even if an imager cannot be simultaneously focused on alignment marks formed on both the carrier and the substrate. Center of gravity positions G1m of an alignment pattern element AP1 on a substrate and G2m of an alignment pattern element AP2 on a transparent blanket are calculated by image processing from an image IM imaged via the blanket by a CCD camera. The position of the center of gravity Gm2 is specified by a process associated with edge extraction from the image imaged with the alignment pattern element AP2 on the blanket being in focus. High spatial frequency components are removed and low frequency components are extracted for the alignment pattern element AP1 on the substrate imaged out of focus to have a blurred outline, and the position of the center of gravity G1m is specified from an extraction result.

    Abstract translation: 即使成像器不能同时聚焦在形成在载体和衬底上的对准标记上,载体和衬底也被对准。 通过CCD照相机从通过毯子成像的图像IM的图像处理来计算基板上的对准图案元件AP1的重心位置G1m和透明毯子上的对准图案元件AP2的G2m。 重心Gm2的位置由与被对准的毯子上的对准图案元件AP2成像的图像的边缘提取相关联的处理来指定。 去除高空间频率分量,并且提取低频分量,使得对准图案元件AP1在被对焦成像的基板上具有模糊轮廓,并且从提取结果确定重心G1m的位置。

    PRINTING APPARATUS AND PRINTING METHOD
    3.
    发明申请
    PRINTING APPARATUS AND PRINTING METHOD 有权
    印刷装置和印刷方法

    公开(公告)号:US20130133541A1

    公开(公告)日:2013-05-30

    申请号:US13654767

    申请日:2012-10-18

    CPC classification number: B41F1/06 B41F1/16 B41F1/54 B41M1/00

    Abstract: A print section patterns a coating layer to form a pattern layer on a carrier and then transfers the pattern layer to a substrate. A controller obtains a first carrier thickness by measuring the thickness of the carrier carrying the coating layer and adjusts a gap between the carrier carrying the coating layer and the printing plate based on the first carrier thickness immediately before the coating layer is patterned. The controller also obtains a second carrier thickness by measuring the thickness of the carrier carrying the pattern layer and adjusts a gap between the carrier carrying the pattern layer and the substrate based on the second carrier thickness immediately before the pattern layer is transferred.

    Abstract translation: 打印部分形成涂层以在载体上形成图案层,然后将图案层转移到基底。 控制器通过测量承载涂层的载体的厚度来获得第一载体厚度,并且在涂覆涂层被图案化之前基于第一载体厚度调节承载涂层和印刷版的载体之间的间隙。 控制器还通过测量携带图案层的载体的厚度来获得第二载体厚度,并且在紧靠图案层转移之前基于第二载体厚度调节承载图案层的载体与基板之间的间隙。

    PATTERN FORMING APPARATUS AND PATTERN FORMING METHOD
    4.
    发明申请
    PATTERN FORMING APPARATUS AND PATTERN FORMING METHOD 有权
    图案形成装置和图案形成方法

    公开(公告)号:US20130133535A1

    公开(公告)日:2013-05-30

    申请号:US13568329

    申请日:2012-08-07

    CPC classification number: B41F16/00 H05K3/1275 H05K2203/082

    Abstract: The supply of a negative pressure to an opening P(+1) adjacent to an opening P(0) is stopped by switching a suction valve connected to the opening P(+1) from an open state to a closed state while keeping a positive pressure valve connected thereto closed. Then, near the opening P(+1), a force for holding a blanket becomes gradually weaker against a pressure force in a pressurized space. Associated with that, an air component in the pressurized space flows into a space between a portion of the blanket vertically above the opening P(+1) and an upper surface, whereby the blanket portion is lifted from the upper surface and brought into contact with the lower surface of a printing plate. In this way, a contact area is slowly and stably widened while a sudden change of a pressure in the pressurized space SP5 is suppressed.

    Abstract translation: 通过将连接到开口P(+1)的吸入阀从打开状态切换到关闭状态,同时保持正的状态来停止向开口P(0)附近的开口P(+1)供给负压 与其连接的压力阀关闭。 然后,在开口P(+1)附近,用于保持橡皮布的力相对于加压空间中的压力逐渐变弱。 与此相关联,加压空间中的空气部件流入在开口P(+1)上方垂直上方的橡皮布的一部分之间的空间和上表面,由此橡皮布部分从上表面提升并与 印版的下表面。 以这种方式,在抑制加压空间SP5中的压力的​​突然变化的同时,接触面积缓慢且稳定地变宽。

    Substrate processing apparatus and thermal type flowmeter suitable to the same
    5.
    发明授权
    Substrate processing apparatus and thermal type flowmeter suitable to the same 有权
    基板加工设备和热式流量计适用于相同的

    公开(公告)号:US07216534B2

    公开(公告)日:2007-05-15

    申请号:US10844753

    申请日:2004-05-12

    CPC classification number: G01F1/6847

    Abstract: In a thermal type flowmeter 60, a heating/heat-sensitive coil 64 which is shaped as a coil is fit close into an approximately central portion of a duct pipe 63. A flow rate computing circuit 65 supplies electric power to the heating/heat-sensitive coil 64 in accordance with an instruction received from a control portion, the heating/heat-sensitive coil 64 develops heat, and the heat developing at the heating/heat-sensitive coil 64 heats up a hole transporting material 8 which flows through the duct pipe 63. Further, the flow rate computing circuit 65 which is electrically connected with the heating/heat-sensitive coil 64 detects a difference between an upstream-side temperature and a downstream-side temperature, and calculates the flow rate (mass flow rate) of the hole transporting material 8 based on this temperature difference, the amount of heating, physical properties data such as the specific heat and the heat capacity regarding the hole transporting material 8.

    Abstract translation: 在热式流量计60中,形成为线圈的加热/感热线圈64配合在管道管63的大致中央部附近。 流量计算电路65根据从控制部接收到的指示向加热/感热线圈64供给电力,加热/感热线圈64产生热量,并且在加热/ 敏感线圈64加热流过导管63的空穴传输材料8。 此外,与加热/感热线圈64电连接的流量计算电路65检测上游侧温度和下游侧温度之间的差异,并计算出孔的流量(质量流量) 基于该温度差,加热量,关于空穴传输材料8的比热和热容的物理性质数据,输送材料8。

    Substrate for organic EL and method for manufacturing the same

    公开(公告)号:US20060170338A1

    公开(公告)日:2006-08-03

    申请号:US11340964

    申请日:2006-01-26

    CPC classification number: H01L27/3283 H01L51/0005 H01L51/56 Y10T428/3154

    Abstract: A non-oil repellent photosensitive material layer 2 and an oil repellent photosensitive material layer 3 formed by coating on a substrate 1 are exposed at the same time with light having a single wavelength (I-line) in accordance with bank regions and thereafter developed. In consequence, banks 300 are formed having a double-layer structure which is comprised of bottom layer portions 31 of a non-oil repellent material and top layer portions 32 of an oil repellent material. This blocks organic EL materials supplied between the banks 300 from moving beyond tops of the banks 300 and prevents color mixing of the organic EL materials. Further, since the bottom layer portions 31 between which organic layers are formed are made of the non-oil repellent material, the profiles of the organic layers will not change due to surface tension.

    Coating composition and method of manufacturing organic EL element
    7.
    发明申请
    Coating composition and method of manufacturing organic EL element 审中-公开
    涂料组合物和制造有机EL元件的方法

    公开(公告)号:US20050082515A1

    公开(公告)日:2005-04-21

    申请号:US10927988

    申请日:2004-08-26

    Abstract: Using a mixture of (BAYTRON P) of PEDT (polyethylene dioxythiophene) and PSS (polystyrene sulfonic acid) as a hole transportation material and using water and ethanol as polar solvents, a coating composition having a contact angle of 35 degrees or smaller with respect to an ITO layer is obtained. The coating composition is then poured for coating upon exposed surfaces of first electrodes (ITO) 4R, 4G and 4B enclosed by barrier walls 6. Thus applied coating composition uniformly spreads all over the first electrodes 4R, 4G and 4B. As the coating composition naturally dries at a room temperature for about fifteen seconds, the solvents are removed from the coating composition.

    Abstract translation: 使用PEDT(聚乙烯二氧噻吩)的(BAYTRON P)和PSS(聚苯乙烯磺酸)作为空穴传输材料并使用水和乙醇作为极性溶剂的混合物,将接触角为35度以下的涂料组合物相对于 得到ITO层。 然后将涂料组合物倒入用于涂覆在由阻挡壁6包围的第一电极(ITO)4 R,4 G和4 B的暴露表面上。因此涂覆的涂料组合物均匀地铺展在第一电极4 R,4 G和4 B 当涂料组合物在室温下自然干燥约15秒时,从涂料组合物中除去溶剂。

    Pattern forming apparatus and pattern forming method
    8.
    发明授权
    Pattern forming apparatus and pattern forming method 有权
    图案形成装置和图案形成方法

    公开(公告)号:US08955432B2

    公开(公告)日:2015-02-17

    申请号:US13568329

    申请日:2012-08-07

    CPC classification number: B41F16/00 H05K3/1275 H05K2203/082

    Abstract: The supply of a negative pressure to an opening P(+1) adjacent to an opening P(0) is stopped by switching a suction valve connected to the opening P(+1) from an open state to a closed state while keeping a positive pressure valve connected thereto closed. Then, near the opening P(+1), a force for holding a blanket becomes gradually weaker against a pressure force in a pressurized space. Associated with that, an air component in the pressurized space flows into a space between a portion of the blanket vertically above the opening P(+1) and an upper surface, whereby the blanket portion is lifted from the upper surface and brought into contact with the lower surface of a printing plate. In this way, a contact area is slowly and stably widened while a sudden change of a pressure in the pressurized space SP5 is suppressed.

    Abstract translation: 通过将连接到开口P(+1)的吸入阀从打开状态切换到关闭状态,同时保持正的状态来停止向开口P(0)附近的开口P(+1)供给负压 与其连接的压力阀关闭。 然后,在开口P(+1)附近,用于保持橡皮布的力相对于加压空间中的压力逐渐变弱。 与此相关联,加压空间中的空气部件流入在开口P(+1)上方垂直上方的橡皮布的一部分之间的空间和上表面,由此橡皮布部分从上表面提升并与 印版的下表面。 以这种方式,在抑制加压空间SP5中的压力的​​突然变化的同时,接触面积缓慢且稳定地变宽。

    Printing apparatus and printing method with measurement of a carrier thickness
    9.
    发明授权
    Printing apparatus and printing method with measurement of a carrier thickness 有权
    印刷设备和载体厚度测量的印刷方法

    公开(公告)号:US08893620B2

    公开(公告)日:2014-11-25

    申请号:US13654767

    申请日:2012-10-18

    CPC classification number: B41F1/06 B41F1/16 B41F1/54 B41M1/00

    Abstract: A print section patterns a coating layer to form a pattern layer on a carrier and then transfers the pattern layer to a substrate. A controller obtains a first carrier thickness by measuring the thickness of the carrier carrying the coating layer and adjusts a gap between the carrier carrying the coating layer and the printing plate based on the first carrier thickness immediately before the coating layer is patterned. The controller also obtains a second carrier thickness by measuring the thickness of the carrier carrying the pattern layer and adjusts a gap between the carrier carrying the pattern layer and the substrate based on the second carrier thickness immediately before the pattern layer is transferred.

    Abstract translation: 打印部分形成涂层以在载体上形成图案层,然后将图案层转移到基底。 控制器通过测量承载涂层的载体的厚度来获得第一载体厚度,并且在涂覆涂层被图案化之前基于第一载体厚度调节承载涂层和印刷版的载体之间的间隙。 控制器还通过测量携带图案层的载体的厚度来获得第二载体厚度,并且在紧靠图案层转移之前基于第二载体厚度调节承载图案层的载体与基板之间的间隙。

    Substrate for organic EL and method for manufacturing the same
    10.
    发明授权
    Substrate for organic EL and method for manufacturing the same 失效
    有机EL用基板及其制造方法

    公开(公告)号:US07604864B2

    公开(公告)日:2009-10-20

    申请号:US11340964

    申请日:2006-01-26

    CPC classification number: H01L27/3283 H01L51/0005 H01L51/56 Y10T428/3154

    Abstract: A non-oil repellent photosensitive material layer 2 and an oil repellent photosensitive material layer 3 formed by coating on a substrate 1 are exposed at the same time with light having a single wavelength (I-line) in accordance with bank regions and thereafter developed. In consequence, banks 300 are formed having a double-layer structure which is comprised of bottom layer portions 31 of a non-oil repellent material and top layer portions 32 of an oil repellent material. This blocks organic EL materials supplied between the banks 300 from moving beyond tops of the banks 300 and prevents color mixing of the organic EL materials. Further, since the bottom layer portions 31 between which organic layers are formed are made of the non-oil repellent material, the profiles of the organic layers will not change due to surface tension.

    Abstract translation: 通过涂布在基板1上形成的防油性感光材料层2和防油性感光材料层3同时用与银行区域的单一波长(I线)的光同时曝光,然后显影。 因此,堤300形成为具有由拒油材料的底层部分31和防油材料的顶层部分32组成的双层结构。 这阻挡了在堤岸300之间提供的有机EL材料移动超过堤岸300的顶部并且防止了有机EL材料的混色。 此外,由于形成有机层的底层部31由防油性材料构成,所以有机层的轮廓由于表面张力而不会变化。

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