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公开(公告)号：US6414857B2
公开(公告)日：2002-07-02
申请号：US75827101
申请日：2001-01-12
申请人： NIPPON KOGAKU KK
发明人： MOTOORI RYUZO
CPC分类号： G03F7/70358 , G03F7/70725 , G03F7/70758 , H02M3/1588 , Y02B70/1466
摘要： The present invention provides a PWM control apparatus which makes it possible to obtain a high-precision, high-S/N-ratio, low-cost, small-volume, light-weight motor driving apparatus. In particular, to provide a motor driving apparatus using this PWM control apparatus, a stage apparatus using this motor driving apparatus, an exposure apparatus using this stage apparatus, a device manufactured by means of the exposure apparatus, and a device manufacturing method.
摘要翻译： 本发明提供一种PWM控制装置，其能够获得高精度，高S / N比，低成本，小容量的轻量级的电动机驱动装置。 具体地说，提供使用该PWM控制装置的电动机驱动装置，使用该电动机驱动装置的平台装置，使用该级装置的曝光装置，利用曝光装置制造的装置以及装置的制造方法。
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公开(公告)号：US3927947A
公开(公告)日：1975-12-23
申请号：US52192374
申请日：1974-11-07
申请人： NIPPON KOGAKU KK
发明人： KASAI TOSHIYUKI
CPC分类号： G01N21/211
摘要： Polarization analyser device comprises a light source, a condenser lens for forming the light from said source into a parallel light beam, a monochrome filter for forming the light from said lens into a predetermined wavelength of light, a polarizer disposed with azimuth at 0*, a half mirror disposed between said polarizer and said filter, a condenser lens and a light receiving element both disposed in the light reflecting direction of the half mirror, two light modulators disposed in the light transmitting direction of said half mirror with azimuth at 45*, two 1/4 wavelength plate disposed with azimuth at 0* and 45*, respectively, a 1/2 wavelength plate disposed rotatably about the optical axis and a reflecting mirror disposed perpendicularly to the optical axis. The device further comprises a synchronous rectifying circuit for dividing the light modulated by said two modulator into the signal of phase difference of and the signal of azimuth of a sample. A servo motor of which input is signal of the phase difference of outputs from the synchronous rectifying circuit, is associated with said 1/2 wavelength plate. A display circuit is provided for displaying an amount of rotation of the servo motor. A further display circuit is provided for displaying the phase difference of the sample.
摘要翻译： 极化分析装置包括光源，将来自所述源的光形成为平行光束的聚光透镜，用于将来自所述透镜的光形成为预定波长的光的单色滤光器，以0°方位角设置的偏振片， 设置在所述偏振器和所述滤光器之间的半透镜，聚光透镜和光接收元件，两者均设置在半反射镜的光反射方向上，两个光调制器以所述半反射镜的透光方向设置，方位角为45°， 分别设置在0°和45°方位角的两个1/4波长板，围绕光轴可旋转设置的1/2波长板和垂直于光轴设置的反射镜。
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公开(公告)号：US3914036A
公开(公告)日：1975-10-21
申请号：US47911074
申请日：1974-06-13
申请人： NIPPON KOGAKU KK
发明人： WAKAHARA SHIGEO
CPC分类号： G03B19/18
摘要： In a compact motion picture projector, a film frame feed device includes a film feed pawl, drive means for the feed pawl, changeover means having an operating member and operable by the operating member to change over the film feed speed of the drive means between a first, a second and a third condition, and means for restraining the change-over means in each of the three conditions. The change-over means is further capable of changing over the film feed pawl drive means to a fourth condition which is discrete from but functionally identical with the second condition. The feed device is further provided with means to bias the change-over means from the fourth condition to the third condition.
摘要翻译： 在紧凑型电影投影仪中，胶片框架进给装置包括胶片供给爪，用于进给爪的驱动装置，具有操作构件的转换装置，并且可由操作构件操作以改变驱动装置的胶片进给速度 在第一，第二和第三条件之间，以及用于在三个条件中的每一个中限制转换装置的装置。 转换装置还能够将胶片进给棘爪驱动装置转换到与第二状态不同但在功能上相同的第四状态。 馈送装置还设有用于将转换装置从第四状态偏置到第三状态的装置。
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公开(公告)号：US3912372A
公开(公告)日：1975-10-14
申请号：US46557274
申请日：1974-04-30
申请人： NIPPON KOGAKU KK
发明人： SASAYAMA SHINYA
CPC分类号： G01B11/00 , G01D5/26 , G02B21/241 , G02B27/40
摘要： A photoelectric detector device for determining whether or not a body formed with a linear mark lies within a given range comprises an image-forming optical system for forming the image of the linear mark, two slit plates disposed adjacent the focal plane of the optical system and a corresponding number of photoelectric converter means for converting into electrical signals light beams passed through the slits in the plates. The slits each formed in the plates are parallel to the linear mark and correspond in position to the opposite ends of the range. Oscillating means are provided for causing the image-forming light beam passing through the optical system and the plates to be oscillated relative to each other at a predetermined frequency so as to scan the image of the linear mark within a range containing at least the slits. A processing circuit for taking the difference between the output signals from the two photoelectric converters derives from such difference signal a frequency component equal to the oscillation frequency of the oscillating means, thus providing either a positive or a negative signal indicating the position of the linear mark.
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公开(公告)号：US3909635A
公开(公告)日：1975-09-30
申请号：US42765673
申请日：1973-12-26
申请人： NIPPON KOGAKU KK
发明人： MAIDA OSAMU
IPC分类号： G03B17/42 , G03B19/18 , H03K3/03 , H03K3/282 , H03K3/64 , H03K17/28 , H03K5/13 , H03K3/281 , H03K5/04
CPC分类号： H03K17/28 , G03B17/425 , G03B19/18 , H03K3/03 , H03K3/2823 , H03K3/64
摘要： Timers for controlling load circuits, such as motors in motordriven cameras, have ON and OFF intervals which can either be continuously repeated or automatically interrupted after various selected sequences of ON-OFF operations for thereafter holding the load circuit in an energized or de-energized state. The timers comprise a bi-stable circuit having complementary output signals and a pair of CR time-delay circuits for generating timedelayed signals in response to the output signals, the timedelayed signals being coupled to respective inputs of the bistable circuit for causing the bi-stable circuit to be alternately set in first and second states. A load responsive to one of the output signals is energized or de-energized in accordance with the state of the bi-stable circuit. An interrupter circuit responsive to one of the time-delayed signals causes the load to be continuously energized or de-energized after a selected ON-OFF sequence.
摘要翻译： 用于控制负载电路的定时器，例如电动照相机中的电动机，具有ON和OFF间隔，其可以在各种所选择的ON-OFF操作序列之后连续重复或自动中断，此后将负载电路保持在通电或去激活状态， 通电状态。 定时器包括具有互补输出信号的双稳态电路和用于响应于输出信号产生时间延迟的信号的一对CR时间延迟电路，时间延迟的信号耦合到双稳态电路的相应输入 用于使双稳态电路交替地设置在第一和第二状态。 响应于其中一个输出信号的负载根据双稳电路的状态被激励或断电。 响应于其中一个时间延迟信号的断续器电路使得在所选择的开 - 关序列之后，负载被连续地通电或断电。
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公开(公告)号：US3882362A
公开(公告)日：1975-05-06
申请号：US41904473
申请日：1973-11-26
申请人： NIPPON KOGAKU KK
发明人： WATANABE SAKUJI
CPC分类号： G03B9/70
摘要： A device for preventing the oscillation of an LRC circuit of an electronic shutter control circuit includes a control circuit and a converter. A low-pass filter is interconnected between a terminal of the control circuit, from which is derived a voltage for setting an exposure, and a terminal of the LRC circuit, thereby effecting the positive feedback of the oscillation signal of the LRC circuit. The low-pass filter includes resistors and a diode connected in series and a capacitor, one terminal of which is connected to the juncture of the resistors.
摘要翻译： 一种用于防止电子快门控制电路的LRC电路的振荡的装置包括控制电路和转换器。 低通滤波器在控制电路的端子之间互连，从中导出用于设置曝光的电压和LRC电路的端子，从而实现LRC电路的振荡信号的正反馈。 低通滤波器包括电阻器和串联的二极管和一个电容器，一个端子连接到电阻器的接合端。
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公开(公告)号：US3874797A
公开(公告)日：1975-04-01
申请号：US45842674
申请日：1974-04-05
申请人： NIPPON KOGAKU KK
发明人： KASAI TOSHIYUKI
CPC分类号： G01B11/0641 , G01N21/211
摘要： An ellipsometer includes a polarizing optical system, a first and a second optical path changing total reflecting prism, and an analyzer. Light from a light source passes through the polarizing optical system to leave it in the form of elliptical polarized light, which in turn passes through the first total reflection prism in which the elliptical polarized light is given a phase skip difference and deflected so as to impinge on the surface of a sample obliquely with respect thereto. The light so reflected by the first total reflection prism further passes through the second total reflection prism in which the light is given a phase skip difference and deflected in a direction substantially parallel to the optical axis of the polarizing optical system. The light passed through the second total reflection prism is finally extinguished by the analyzer.
摘要翻译： 椭偏仪包括偏振光学系统，改变全反射棱镜的第一和第二光学路径以及分析器。 来自光源的光通过偏振光学系统以使其以椭圆偏振光的形式离开，椭圆偏振光又穿过第一全反射棱镜，其中椭圆偏振光被给予相跳差，并偏转以撞击 在样品的表面上相对于其倾斜。 由第一全反射棱镜反射的光进一步通过第二全反射棱镜，其中光被给予相位跳跃差并在基本上平行于偏振光学系统的光轴的方向上偏转。 通过第二全反射棱镜的光最终被分析仪熄灭。
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8.发明授权Magnification varying device in optical instrument capable of changing the spacing between two optical axes 失效光学仪器中的放大变化装置能够改变两个光轴之间的间距
公开(公告)号：US3873182A
公开(公告)日：1975-03-25
申请号：US38564373
申请日：1973-08-06
申请人： NIPPON KOGAKU KK
发明人： FURUHASHI HIDEHIKO
CPC分类号： G02B15/00 , G02B21/241
摘要： For use in an optical instrument having two objective optical axes the spacing between which is variable, a magnification varying device includes a pair of members for changing the spacing between the two objective optical axes. A pair of magnification varying members are rotatably mounted on the spacing changing members by means of rotary shafts for successively moving lenses of any desired magnifications into alignment with the two optical axes. A pair of supporting members, each having at least one articulation, are provided so that one end of each of the supporting members are pivotally connected to the rotary shaft of each of the magnification varying members and that the other ends of the supporting members are pivotally connected to an operating member which is rotatably mounted to the body of the device. A pair of rotation transmitting members are supported by the supporting members to transmit rotation of the operating member to the respective magnification varying members.
摘要翻译： 为了用于具有两个物镜光学轴的光学仪器，其间的间距是可变的，倍率改变装置包括一对用于改变两个物镜光轴之间的间距的构件。 一对可变倍数的构件通过旋转轴可旋转地安装在间隔改变构件上，用于将任何期望倍率的透镜连续移动到与两个光轴对准。 设置有一对支撑构件，每个支撑构件具有至少一个铰接部，使得每个支撑构件的一端枢转地连接到每个可变倍数构件的旋转轴，并且支撑构件的另一端枢转 连接到可旋转地安装到装置的主体的操作构件。 一对旋转传递构件由支撑构件支撑以将操作构件的旋转传递到各个变倍构件。
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公开(公告)号：US3829867A
公开(公告)日：1974-08-13
申请号：US15794371
申请日：1971-06-29
申请人： NIPPON KOGAKU KK
发明人： ONO S
摘要： A CAMERA HAVING A TAKING LENS WITH AN ADJUSTABLE APERTURE, SHUTTER MEANS MOUNTED FOR MOVEMENT FROM AN INITIAL POSITION TO A TERMINAL POSITION, AND CONSTRUCTED AND ARRANGED THAT THE TIME PERIOD BETWEEN INITIATION AND TERMINATION OF MOVEMENT IS DETERMINATIVE OF THE EXPOSURE TIME OF SAID CAMERA, AND AN AUTOMATIC EXPOSURE SYSTEM INCLUDING PHOTOSENSITIVE MEANS RESPONSIVE TO THE LIGHT WHICH IS PASSED THROUGH THE TAKING LENS FOR PROVIDING A FIRST ELECTRIC SIGNAL RELATING TO THE BRIGHTNESS OF THE LIGHT, MEMORY MEANS COUPLED TO THE PHOTOSENSITIVE MEANS FOR MEMORIZING THE VALUE OF THE BRIGHTNESS OF THE LIGHT PASSED THROUGH THE TAKING LENS AFTER ADJUSTMENT OF THE APERTURE, SELECTIVELY ACTUABLE CONTROL MEANS FOR ADJUSTING THE SIZE OF SAID APERTURE IN RESPONSE TO THE FIRST ELECTRIC SIGNAL AND A PREDETERMINED EXPOSURE TIME OF THE CAMERA, SELECTIVELY ACTUABLE EXPOSURE MEANS FOR ADJUSTING THE EXPOSURE TIME OF SAID SHUTTER MEANS IN RESPONSE TO THE VALUE OF LIGHT MEMORIZED BY THE MEMORY MEANS, AND SWITCH MEANS FOR SELECTIVELY ACTUATING EITHER SAID CONTROL MEANS FOR ADJUSTING THE SIZE OF SAID APERATURE OR SAID CONTROL MEANS FOR ADJUSTING THE EXPOSURE TIME OF SAID SHUTTER MEANS.
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公开(公告)号：US3794430A
公开(公告)日：1974-02-26
申请号：US3794430D
申请日：1972-08-21
申请人： NIPPON KOGAKU KK
发明人： MAIDA O
摘要： An exposure meter comprises exposure detecting means connected with an electric power source and including a photoelectric element, means connected with the photoelectric element to introduce exposure influencing factors thereinto, and means connected with the photoelectric element and with the introducing means to produce a proper exposure signal. Indicating means is connected with the exposure detecting means and operable to indicate a proper exposure in response to the proper exposure signal. Means is connected between the exposure detecting means and the indicating means to render the indicating means inoperable for any voltage drop of the source voltage below the minimum usable voltage.
摘要翻译： 曝光计包括与电源连接并包括光电元件的曝光检测装置，与光电元件连接以将曝光影响因素引入其中的装置，以及与光电元件连接的装置和引入装置以产生适当的曝光信号 。 指示装置与曝光检测装置连接并且可操作以响应于适当的曝光信号来指示适当的曝光。 装置连接在曝光检测装置和指示装置之间，以使得指示装置不能用于低于最小可用电压的源电压的任何压降。
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