公开(公告)号：US20120212724A1

公开(公告)日：2012-08-23

申请号：US13371637

申请日：2012-02-13

申请人： Noboru OSAKA

发明人： Noboru OSAKA

IPC分类号： G03F7/20 ,  G03B27/54 ,  F21V8/00

CPC分类号： G03F7/7005 ,  G03F7/70075 ,  G03F7/70208

摘要： An illumination optical system comprises plural rod integrators, a combining optical system and a light transmission unit. The rod integrators uniformize light intensity distributions of the light beams. The combining optical system combines the light beams emitted from the rod integrators, so that the light beams are adjacent to each other in cross-sections thereof. The light transmission unit has an entrance plane and an exit plane, divides the light beam combined by the combining optical system into plural light beams on the entrance plane, joins the divided light beams so that a cross-sectional shape of a joined pattern of the light beams on the exit plane is different from a cross-sectional shape of a joined pattern of the light beams on the entrance plane, and transfers each of the light beams from the entrance plane to the exit plane using plural optically coupled light pipes.

摘要翻译： 照明光学系统包括多个杆状积分器，组合光学系统和光传输单元。 杆状积分器使光束的光强分布均匀化。 组合光学系统组合从杆状积分器发射的光束，使得光束的横截面彼此相邻。 光传输单元具有入射面和出射面，将由组合光学系统组合的光束分成入射面上的多个光束，将分割的光束接合，使得接合图案的横截面形状 出射面上的光束与入射面上的光束的接合图案的截面形状不同，并且使用多个光耦合光管将每个光束从入射面传送到出射面。

公开(公告)号：US20090097134A1

公开(公告)日：2009-04-16

申请号：US12233071

申请日：2008-09-18

申请人： Noboru Osaka

发明人： Noboru Osaka

IPC分类号： G02B13/18

CPC分类号： G02B27/28 ,  G03F7/70341 ,  G03F7/70966

摘要： This invention is a projection optical system which includes a plurality of lens groups and projects an image of a first object onto a second object. A bottom lens group of the plurality of lens groups which is positioned nearest to the second object is made of an isotropic crystal material having a refractive index of 1.6 or more and has a positive focal length. A curvature radius R (mm) of a surface of the bottom lens group which is located on the first object side and a center thickness d (mm) of the bottom lens group satisfy 3.0>R/d>1.6 and d

摘要翻译： 本发明是一种投影光学系统，其包括多个透镜组并将第一物体的图像投射到第二物体上。 位于最靠近第二物体的多个透镜组的底部透镜组由折射率为1.6以上且具有正焦距的各向同性晶体材料制成。 位于第一物体侧的底部透镜组的表面和底部透镜组的中心厚度d（mm）的曲率半径R（mm）满足3.0> R / d> 1.6且d <60。

公开(公告)号：US09280054B2

公开(公告)日：2016-03-08

申请号：US13371637

申请日：2012-02-13

申请人： Noboru Osaka

发明人： Noboru Osaka

IPC分类号： G03B27/54 ,  G03F7/20

CPC分类号： G03F7/7005 ,  G03F7/70075 ,  G03F7/70208

摘要： An illumination optical system comprises plural rod integrators, a combining optical system and a light transmission unit. The rod integrators uniformize light intensity distributions of the light beams. The combining optical system combines the light beams emitted from the rod integrators, so that the light beams are adjacent to each other in cross-sections thereof. The light transmission unit has an entrance plane and an exit plane, divides the light beam combined by the combining optical system into plural light beams on the entrance plane, joins the divided light beams so that a cross-sectional shape of a joined pattern of the light beams on the exit plane is different from a cross-sectional shape of a joined pattern of the light beams on the entrance plane, and transfers each of the light beams from the entrance plane to the exit plane using plural optically coupled light pipes.

摘要翻译： 照明光学系统包括多个杆状积分器，组合光学系统和光传输单元。 杆状积分器使光束的光强分布均匀化。 组合光学系统组合从杆状积分器发射的光束，使得光束的横截面彼此相邻。 光传输单元具有入射面和出射面，将由组合光学系统组合的光束分成入射面上的多个光束，将分割的光束接合，使得接合图案的横截面形状 出射面上的光束与入射面上的光束的接合图案的截面形状不同，并且使用多个光耦合光管将每个光束从入射面传送到出射面。

公开(公告)号：US07843645B2

公开(公告)日：2010-11-30

申请号：US12233071

申请日：2008-09-18

申请人： Noboru Osaka

发明人： Noboru Osaka

IPC分类号： G02B3/00 ,  G02B9/00 ,  G03B27/54

CPC分类号： G02B27/28 ,  G03F7/70341 ,  G03F7/70966

摘要： This invention is a projection optical system which includes a plurality of lens groups and projects an image of a first object onto a second object. A bottom lens group of the plurality of lens groups which is positioned nearest to the second object is made of an isotropic crystal material having a refractive index of 1.6 or more and has a positive focal length. A curvature radius R (mm) of a surface of the bottom lens group which is located on the first object side and a center thickness d (mm) of the bottom lens group satisfy 3.0>R/d>1.6 and d

摘要翻译： 本发明是一种投影光学系统，其包括多个透镜组并将第一物体的图像投射到第二物体上。 位于最靠近第二物体的多个透镜组的底部透镜组由折射率为1.6以上且具有正焦距的各向同性晶体材料制成。 位于第一物体侧的底部透镜组的表面和底部透镜组的中心厚度d（mm）的曲率半径R（mm）满足3.0> R / d> 1.6且d <60。

公开(公告)号：US07602474B2

公开(公告)日：2009-10-13

申请号：US11772437

申请日：2007-07-02

申请人： Kenichiro Mori ,  Akihiro Yamada ,  Noboru Osaka

发明人： Kenichiro Mori ,  Akihiro Yamada ,  Noboru Osaka

IPC分类号： G03B27/72 ,  G03B27/54

CPC分类号： G03F7/70566 ,  G03B27/72

摘要： An exposure apparatus which exposes a substrate to light. An illumination optical system illuminates a mask with illumination light, and a projection optical system projects a pattern of the mask onto the substrate. The illumination light contains a primary component of polarized light and a secondary component of the polarized light, which are perpendicular to each other, and the illumination optical system includes a phase difference adjusting unit configured to adjust a phase difference between the primary component of the polarized light and the secondary component of the polarized light, without changing a direction of the primary component of the polarized light.

摘要翻译： 一种使基板曝光的曝光装置。 照明光学系统用照明光照射面罩，并且投影光学系统将掩模的图案投射到基板上。 照明光包含彼此垂直的偏振光的主要分量和偏振光的次要成分，照明光学系统包括相位差调整单元，被配置为调节偏振光的主要分量之间的相位差 光和偏振光的次要分量，而不改变偏振光的主要分量的方向。

公开(公告)号：US20080123055A1

公开(公告)日：2008-05-29

申请号：US11772437

申请日：2007-07-02

申请人： Kenichiro Mori ,  Akihiro Yamada ,  Noboru Osaka

发明人： Kenichiro Mori ,  Akihiro Yamada ,  Noboru Osaka

IPC分类号： G03B27/72 ,  G03F7/00

CPC分类号： G03F7/70566 ,  G03B27/72

摘要： An exposure apparatus which exposes a substrate to light includes an illumination optical system which illuminates a mask with illumination light, and a projection optical system which projects the pattern of the mask onto the substrate. The illumination light contains the primary component of polarized light and the secondary component of the polarized light, which are perpendicular to each other. The illumination optical system includes a phase difference adjusting unit including a function of continuously adjusting the phase difference between the primary component of the polarized light and the secondary component of the polarized light without changing the direction of the primary component of the polarized light.

摘要翻译： 将基板曝光的曝光装置包括利用照明光照射掩模的照明光学系统和将掩模的图案投影到基板上的投影光学系统。 照明光包含彼此垂直的偏振光的主要分量和偏振光的次要分量。 照明光学系统包括相位差调整单元，其具有连续调整偏振光的主要成分与偏振光的次要成分之间的相位差而不改变偏振光的主要成分的方向的功能。