公开(公告)号：US5909323A

公开(公告)日：1999-06-01

申请号：US687928

申请日：1996-07-29

申请人： Laurence S. Blake ,  David B. Larsen ,  Norman Rolfe ,  Henry A. Kelley ,  Frank Scholten

发明人： Laurence S. Blake ,  David B. Larsen ,  Norman Rolfe ,  Henry A. Kelley ,  Frank Scholten

IPC分类号： B41J2/44 ,  G02B7/02 ,  G02B26/08 ,  G02B26/10 ,  G02B27/00 ,  G02B27/64

CPC分类号： G02B27/0031 ,  G02B26/0875 ,  G02B26/108 ,  G02B27/646 ,  G02B7/023

摘要： A correction element assembly for correcting misalignment of a beam of radiation with respect to a location on a target, includes a housing having a correction element fixedly mounted therein. A flexure is attached to the housing and at least two drive devices are disposed radially around the housing. Each of the drive devices is operable to apply a force to the housing to thereby deflect the flexure causing the housing to move such that said correction element moves in a cyclic fashion about its beam axis.

摘要翻译： 用于校正辐射束相对于目标上的位置的未对准的校正元件组件包括具有固定地安装在其中的校正元件的壳体。 挠曲件附接到壳体，并且至少两个驱动装置径向设置在壳体周围。 每个驱动装置可操作以向壳体施加力，从而使挠曲件偏转，使得壳体移动，使得所述校正元件绕其梁轴线以循环方式移动。

公开(公告)号：US06191897B1

公开(公告)日：2001-02-20

申请号：US09260566

申请日：1999-02-02

申请人： Laurence S. Blake ,  David B. Larsen ,  Norman Rolfe ,  Henry A. Kelley ,  Frank Scholten

发明人： Laurence S. Blake ,  David B. Larsen ,  Norman Rolfe ,  Henry A. Kelley ,  Frank Scholten

IPC分类号： G02B702

CPC分类号： G02B27/0031 ,  G02B7/023 ,  G02B26/0875 ,  G02B26/108 ,  G02B27/646

摘要： A correction element assembly for correcting misalignment of a beam of radiation with respect to a location on a target includes a correction element housing, and first and second piezo elements. The correction element is fixedly mounted in the housing and moveable therewith. The piezo elements are supported by a member having a first portion and a second portion. The first piezo element is mounted to the first portion of the member and to said housing, and moves the housing in a first direction. The second piezo element is mounted to the second portion of the member and to a base, and moves the housing in a second direction substantially perpendicular to the first direction.

摘要翻译： 用于校正辐射束相对于目标上的位置的未对准的校正元件组件包括校正元件外壳以及第一和第二压电元件。 校正元件固定地安装在壳体中并随其移动。 压电元件由具有第一部分和第二部分的构件支撑。 第一压电元件安装到构件的第一部分和所述壳体上，并沿着第一方向移动壳体。 第二压电元件安装到构件的第二部分和基座上，并且沿着基本上垂直于第一方向的第二方向移动壳体。

公开(公告)号：US5877494A

公开(公告)日：1999-03-02

申请号：US687931

申请日：1996-07-29

申请人： David B. Larsen ,  Laurence S. Blake ,  Norman Rolfe ,  Henry A. Kelley ,  Frank Scholten

发明人： David B. Larsen ,  Laurence S. Blake ,  Norman Rolfe ,  Henry A. Kelley ,  Frank Scholten

IPC分类号： G02B26/10 ,  G02B27/64 ,  H04N1/047 ,  H04N1/06 ,  H04N1/113 ,  H04N1/191 ,  H01J3/14

CPC分类号： H04N1/0635 ,  G02B27/642 ,  H04N1/047 ,  H04N1/0607 ,  H04N1/1911 ,  H04N2201/04712 ,  H04N2201/0476

摘要： A scanning system for scanning an imaging surface includes a radiation emitter configured to emit a beam of radiation directed towards a deflector for scanning the beam onto the imaging surface. A detector detects any misalignment of the beam with respect to the deflector. A driver moves a correction element substantially perpendicular to the beam axis of the correction element to correct for the detected misalignment during scanning of the imaging surface.

摘要翻译： 用于扫描成像表面的扫描系统包括被配置为发射朝向偏转器的辐射束的辐射发射器，用于将光束扫描到成像表面上。 检测器检测光束相对于偏转器的任何未对准。 驾驶员移动基本上垂直于校正元件的束轴的校正元件，以校正在扫描成像表面期间检测到的未对准。