Method for the production of multi-crystalline semiconductor material
    1.
    发明授权
    Method for the production of multi-crystalline semiconductor material 失效
    生产多晶半导体材料的方法

    公开(公告)号:US06506250B1

    公开(公告)日:2003-01-14

    申请号:US09856140

    申请日:2001-05-30

    IPC分类号: C30B1520

    CPC分类号: C30B29/06 C30B11/007

    摘要: A method for producing a multi-crystalline semiconductor material by crystallization from a melt of a base material in which vibration energy in the sonic or ultrasonic range is acoustically coupled by a gaseous transmission medium into the solidifying or cooling material during solidification of the melt and/or during subsequent further cooling. The parameters of this vibration energy are harmonized with the parameters of the melt and the cooling time in such a manner that the dislocation energy in the cooled multi-crystalline material is considerably lower than where there is no vibration energy coupling during the cooling time.

    摘要翻译: 一种通过从基材熔体中的结晶生产多晶半导体材料的方法,其中声波或超声波范围内的振动能量通过气体传播介质在熔体固化期间与凝固或冷却材料声耦合,和/ 或在随后的进一步冷却期间。 这种振动能量的参数与熔体和冷却时间的参数协调,使得冷却的多晶材料中的位错能明显低于在冷却时间内没有振动能量耦合的位错能。