公开(公告)号：US06875992B2

公开(公告)日：2005-04-05

申请号：US10845231

申请日：2004-05-14

申请人： Thomas J. M. Castenmiller ,  Andreas B. G. Ariens ,  Martinus H. H. Hoeks ,  Patrick D. Vogelsang ,  Erik R. Loopstra ,  YimBun P. Kwan

发明人： Thomas J. M. Castenmiller ,  Andreas B. G. Ariens ,  Martinus H. H. Hoeks ,  Patrick D. Vogelsang ,  Erik R. Loopstra ,  YimBun P. Kwan

IPC分类号： G01B11/00 ,  G01B11/03 ,  G01B15/00 ,  G03F7/20 ,  G03F7/22 ,  G03F9/00 ,  H01L21/027

CPC分类号： G03F9/7015 ,  G03F7/70716 ,  G03F9/7049

摘要： A position measuring device includes a radiation source mounted on an isolated reference frame and a two-dimensional radiation detector mounted adjacent the radiation source. The object whose position is to be detected has a mirroring device, e.g. a retro-reflector, mounted on it so as to reflect light emitted from the radiation source along a return path that is parallel to but displaced from the incident light path. The amount of displacement is dependent on the position of the object and is measured by the two-dimensional detector. Three such devices can be combined in a system to measure the position of the object in all six degrees of freedom.

摘要翻译： 位置测量装置包括安装在隔离参考框架上的辐射源和邻近辐射源安装的二维辐射探测器。 要检测其位置的物体具有镜像装置，例如， 后反射器，安装在其上以便沿着平行于入射光路移动的返回路径反射从辐射源发出的光。 位移量取决于物体的位置，并由二维检测器测量。 三个这样的装置可以组合在系统中以在所有六个自由度中测量物体的位置。

公开(公告)号：US06894261B2

公开(公告)日：2005-05-17

申请号：US09739622

申请日：2000-12-20

申请人： Thomas J. M. Castenmiller ,  Andreas B G. Ariens ,  Martinus H. H. Hoeks ,  Patrick D. Vogelsang ,  Erik R. Loopstra ,  YimBun P. Kwan

发明人： Thomas J. M. Castenmiller ,  Andreas B G. Ariens ,  Martinus H. H. Hoeks ,  Patrick D. Vogelsang ,  Erik R. Loopstra ,  YimBun P. Kwan

IPC分类号： G01B11/00 ,  G01B11/03 ,  G01B15/00 ,  G03F7/20 ,  G03F7/22 ,  G03F9/00 ,  H01L21/027

CPC分类号： G03F9/7015 ,  G03F7/70716 ,  G03F9/7049

摘要： A position measuring apparatus includes a radiation source mounted on an isolated reference frame and a two-dimensional radiation detector mounted adjacent the radiation source. The object whose position is to be detected has a retro-reflector mounted on it so as to reflect light emitted from the radiation source along a return path that is parallel to but displaced from the incident light path. The amount of displacement is dependent on the position of the object and is measured by the two-dimensional detector. Three such apparatus can be combined in a system to measure the position of the object in all six degrees of freedom.

摘要翻译： 位置测量装置包括安装在隔离参考框架上的辐射源和邻近辐射源安装的二维辐射探测器。 要检测其位置的物体具有安装在其上的反光镜，以便沿着与入射光路平行但偏离的返回路径反射从辐射源发射的光。 位移量取决于物体的位置，并由二维检测器测量。 三个这样的装置可以组合在一个系统中以在所有六个自由度中测量物体的位置。