公开(公告)号：US5345170A

公开(公告)日：1994-09-06

申请号：US896853

申请日：1992-06-11

申请人： Randy J. Schwindt ,  Warren K. Harwood ,  Paul A. Tervo ,  Kenneth R. Smith ,  Richard H. Warner ,  Peter D. Andrews

发明人： Randy J. Schwindt ,  Warren K. Harwood ,  Paul A. Tervo ,  Kenneth R. Smith ,  Richard H. Warner ,  Peter D. Andrews

IPC分类号： H01L21/66 ,  A46D1/00 ,  G01R1/067 ,  G01R1/073 ,  G01R31/02 ,  G01R31/28 ,  H01L21/687

CPC分类号： G01R31/2886 ,  A46D1/00 ,  G01R1/0416 ,  G01R1/06705 ,  G01R1/06794 ,  G01R1/07392 ,  G01R1/18 ,  G01R31/2887 ,  H01L21/68785

摘要： A probe station is equipped with an integrated guarding system which facilitates the use of the station for low-current measurements, as well as integrated Kelvin connections to eliminate voltage losses caused by line resistances. The station has a chuck assembly which consists of at least three chuck assembly elements. A first element supports the test device, while an underlying second element acts as a guard to reduce leakage currents. These elements are electrically insulated from each other and from their underlying supporting structure, which is the third element. Ready-to-use, selectively detachable electrical connector assemblies provide for signal and guard connections to the first and second chuck assembly elements, respectively, as well as providing Kelvin connections thereto. The capacitance between the respective chuck assembly elements is extremely low due to the provision of air space as the primary electrical insulator. Unique electrical connectors for individually-positionable probes provide both guarding and Kelvin connection capability together with separate EMI shielding movable in unison with each probe individually.

摘要翻译： 探测台配备有集成的防护系统，便于使用站进行低电流测量，以及集成开尔文连接，以消除线路电阻引起的电压损耗。 该站具有由至少三个卡盘组件元件组成的卡盘组件。 第一个元件支持测试设备，而底层的第二个元件用作防护装置，以减少漏电流。 这些元件彼此电绝缘，并且与其下面的支撑结构电绝缘，其是第三元件。 准备使用的，可选择性地拆卸的电连接器组件分别提供到第一和第二卡盘组件元件的信号和保护连接以及提供与开尔文的连接。 由于提供空气作为主电绝缘体，相应的卡盘组件元件之间的电容极低。 用于单独定位探头的独特电气连接器提供保护和开尔文连接能力，以及单独的EMI屏蔽，可以单独与每个探头一致移动。

公开(公告)号：US5434512A

公开(公告)日：1995-07-18

申请号：US245581

申请日：1994-05-18

申请人： Randy J. Schwindt ,  Warren K. Harwood ,  Paul A. Tervo ,  Kenneth R. Smith ,  Richard H. Warner ,  Peter D. Andrews

发明人： Randy J. Schwindt ,  Warren K. Harwood ,  Paul A. Tervo ,  Kenneth R. Smith ,  Richard H. Warner ,  Peter D. Andrews

IPC分类号： H01L21/66 ,  A46D1/00 ,  G01R1/067 ,  G01R1/073 ,  G01R31/02 ,  G01R31/28 ,  H01L21/687

CPC分类号： G01R31/2886 ,  A46D1/00 ,  G01R1/0416 ,  G01R1/06705 ,  G01R1/06794 ,  G01R1/07392 ,  G01R1/18 ,  G01R31/2887 ,  H01L21/68785

摘要： A probe station is equipped with an integrated guarding system which facilitates the use of the station for low-current measurements, as well as integrated Kelvin connections to eliminate voltage losses caused by line resistances. The station has a chuck assembly which consists of at least three chuck assembly elements. A first element supports the test device, while an underlying second element acts as a guard to reduce leakage currents. These elements are electrically insulated from each other and from their underlying supporting structure, which is the third element. Ready-to-use, selectively detachable electrical connector assemblies provide for signal and guard connections to the first and second chuck assembly elements, respectively, as well as providing Kelvin connections thereto. The capacitance between the respective chuck assembly elements is extremely low due to the provision of air space as the primary electrical insulator. Unique electrical connectors for individually-positionable probes provide both guarding and Kelvin connection capability together with separate EMI shielding movable in unison with each probe individually.

摘要翻译： 探测台配备有集成的防护系统，便于使用站进行低电流测量，以及集成开尔文连接，以消除线路电阻引起的电压损耗。 该站具有由至少三个卡盘组件元件组成的卡盘组件。 第一个元件支持测试设备，而底层的第二个元件用作防护装置，以减少漏电流。 这些元件彼此电绝缘，并且与其下面的支撑结构电绝缘，其是第三元件。 准备使用的，可选择性地拆卸的电连接器组件分别提供到第一和第二卡盘组件元件的信号和保护连接以及提供与开尔文的连接。 由于提供空气作为主电绝缘体，相应的卡盘组件元件之间的电容极低。 用于单独定位探头的独特电气连接器提供保护和开尔文连接能力，以及单独的EMI屏蔽，可以单独与每个探头一致移动。