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公开(公告)号：US08418080B2
公开(公告)日：2013-04-09
申请号：US13274984
申请日：2011-10-17
申请人： Michael G. Sheldon , Franc Camara , Todd Ouzts , Chris Guzak , Rajesh Ganesan
发明人： Michael G. Sheldon , Franc Camara , Todd Ouzts , Chris Guzak , Rajesh Ganesan
IPC分类号： G06F3/00
CPC分类号： G06F1/329 , G06F1/3231 , G06F3/0482 , Y02D10/173 , Y02D10/24
摘要： A computer system and method are presented that enhance a user experience when viewing images displayed on the computer. The system includes a user interface for the computer that displays a number of thumbnail images that are small representations of image files existing on the computer. The thumbnail images are arranged in alignment with one another, such as at the bottom of a viewing window. An enlarged preview image is positioned adjacent the thumbnail images. The enlarged preview image corresponds to a selected thumbnail image and is a larger representation of an image file corresponding with the selected thumbnail image. A control is displayed in the window that enables the user to iterate through the thumbnail images in at least one direction. As the user iterates through the thumbnail images, the enlarged preview image changes correspondingly.
摘要翻译： 提出了一种计算机系统和方法，其在观看显示在计算机上的图像时增强用户体验。 该系统包括用于显示作为计算机上存在的图像文件的小表示的多个缩略图的计算机的用户界面。 缩略图被布置成彼此对准，诸如在观看窗口的底部。 放大的预览图像位于缩略图旁。 放大的预览图像对应于所选择的缩略图图像，并且是与所选缩略图图像相对应的图像文件的较大表示。 在窗口中显示控件，使得用户可以在至少一个方向上迭代缩略图。 当用户迭代缩略图像时，放大的预览图像相应地改变。
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公开(公告)号：US20120036438A1
公开(公告)日：2012-02-09
申请号：US13274984
申请日：2011-10-17
申请人： MICHAEL G. SHELDON , FRANC CAMARA , TODD OUZTS , CHRIS GUZAK , RAJESH GANESAN
发明人： MICHAEL G. SHELDON , FRANC CAMARA , TODD OUZTS , CHRIS GUZAK , RAJESH GANESAN
IPC分类号： G06F3/01
CPC分类号： G06F1/329 , G06F1/3231 , G06F3/0482 , Y02D10/173 , Y02D10/24
摘要： A computer system and method are presented that enhance a user experience when viewing images displayed on the computer. The system includes a user interface for the computer that displays a number of thumbnail images that are small representations of image files existing on the computer. The thumbnail images are arranged in alignment with one another, such as at the bottom of a viewing window. An enlarged preview image is positioned adjacent the thumbnail images. The enlarged preview image corresponds to a selected thumbnail image and is a larger representation of an image file corresponding with the selected thumbnail image. A control is displayed in the window that enables the user to iterate through the thumbnail images in at least one direction. As the user iterates through the thumbnail images, the enlarged preview image changes correspondingly.
摘要翻译： 提出了一种计算机系统和方法，其在观看显示在计算机上的图像时增强用户体验。 该系统包括用于显示作为计算机上存在的图像文件的小表示的多个缩略图的计算机的用户界面。 缩略图被布置成彼此对准，诸如在观看窗口的底部。 放大的预览图像位于缩略图旁。 放大的预览图像对应于所选择的缩略图图像，并且是与所选缩略图图像相对应的图像文件的较大表示。 在窗口中显示控件，使得用户可以在至少一个方向上迭代缩略图。 当用户迭代缩略图像时，放大的预览图像相应地改变。
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公开(公告)号：US07549129B2
公开(公告)日：2009-06-16
申请号：US10185327
申请日：2002-06-28
申请人： Michael G. Sheldon , Franc Camara , Todd Ouzts , Chris Guzak , Rajesh Ganesan
发明人： Michael G. Sheldon , Franc Camara , Todd Ouzts , Chris Guzak , Rajesh Ganesan
IPC分类号： G06F3/00
CPC分类号： G06F1/329 , G06F1/3231 , G06F3/0482 , Y02D10/173 , Y02D10/24
摘要： A computer system and method are presented that enhance a user experience when viewing images displayed on the computer. The system includes a user interface for the computer that displays a number of thumbnail images that are representations of image files existing on the computer. The thumbnail images are arranged in alignment with one another, such as at the bottom of a viewing window. An enlarged preview image is positioned adjacent the thumbnail image. The preview image corresponds to a selected one of the thumbnail images. A control is displayed in the window that enables the user to iterate through the thumbnail images in at least one direction. As the user iterates through the thumbnail images, the enlarged preview image changes correspondingly.
摘要翻译： 提出了一种计算机系统和方法，其在观看显示在计算机上的图像时增强用户体验。 该系统包括用于显示计算机上存在的图像文件的表示的若干缩略图的计算机的用户界面。 缩略图被布置成彼此对准，诸如在观看窗口的底部。 放大的预览图像位于缩略图附近。 预览图像对应于所选择的一个缩略图。 在窗口中显示控件，使得用户可以在至少一个方向上迭代缩略图。 当用户迭代缩略图像时，放大的预览图像相应地改变。
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4.发明申请System for Multiresolution Analysis Assisted Reinforcement Learning Approach to Run-By-Run Control 有权多分辨率分析辅助加固学习方法的运行控制系统公开(公告)号：US20070260346A1
公开(公告)日：2007-11-08
申请号：US11464107
申请日：2006-08-11
IPC分类号： G06F19/00
CPC分类号： G05B13/048 , G05B11/42
摘要： A new multiresolution analysis (wavelet) assisted reinforcement learning (RL) based control strategy that can effectively deal with both multiscale disturbances in processes and the lack of process models. The application of wavelet aided RL based controller represents a paradigm shift in the control of large scale stochastic dynamic systems of which the control problem is a subset. The control strategy is termed a WRL-RbR controller. The WRL-RbR controller is tested on a multiple-input-multiple-output (MIMO) Chemical Mechanical Planarization (CMP) process of wafer fabrication for which process model is available. Results show that the RL controller outperforms EWMA based controllers for low autocorrelation. The new controller also performs quite well for strongly autocorrelated processes for which the EWMA controllers are known to fail. Convergence analysis of the new breed of WRL-RbR controller is presented. Further enhancement of the controller to deal with model free processes and for inputs coming from spatially distributed environments are also addressed.
摘要翻译： 一种新的多分辨率分析（小波）辅助强化学习（RL）控制策略，可以有效地处理过程中的多尺度扰动和缺乏过程模型。 基于小波辅助RL的控制器的应用代表了控制问题是一个子集的大规模随机动态系统的控制范式转移。 控制策略称为WRL-RbR控制器。 WRL-RbR控制器在晶圆制造的多输入多输出（MIMO）化学机械平面化（CMP））工艺中进行测试，该工艺模型可用。 结果表明，RL控制器优于基于EWMA的控制器，用于低自相关。 新的控制器对于已知EWMA控制器故障的强自相关过程也表现相当好。 介绍了新一代WRL-RbR控制器的收敛分析。 还讨论了进一步增强控制器来处理无模式的进程和来自空间分布式环境的输入。
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5.发明申请公开(公告)号：US20070061088A1
公开(公告)日：2007-03-15
申请号：US11554716
申请日：2006-10-31
申请人： Rajesh Ganesan , Tapas Das , Arun Sikder , Ashok Kumar
发明人： Rajesh Ganesan , Tapas Das , Arun Sikder , Ashok Kumar
IPC分类号： G01N31/00
CPC分类号： G01N29/4427 , B24B37/005 , B24B49/003 , G01N29/043 , G01N29/14 , G01N29/42 , G01N29/4445 , G01N29/46 , G01N2291/0231 , G01N2291/2697
摘要： The present invention presents a novel application of a wavelet-based multiscale method in a nanomachining process chemical mechanical planarization (CMP) of wafer fabrication. The invention involves identification of delamination defects of low-k dielectric layers by analyzing the nonstationary acoustic emission (AE) signal collected during copper damascene (Cu-low k) CMP processes. An offline strategy and a moving window-based strategy for online implementation of the wavelet monitoring approach are developed.
摘要翻译： 本发明提出了在晶片制造的纳米加工过程化学机械平面化（CMP）中基于小波的多尺度方法的新颖应用。 本发明涉及通过分析在铜镶嵌（Cu-low k）CMP工艺中收集的非平稳声发射（AE）信号来识别低k电介质层的分层缺陷。 开发了用于在线实现小波监测方法的离线策略和基于窗口的移动策略。
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6.发明申请System and Method for Online End Point Detection for use in Chemical Mechanical Planarization 有权用于化学机械平面化的在线端点检测系统和方法公开(公告)号：US20060100821A1
公开(公告)日：2006-05-11
申请号：US11164048
申请日：2005-11-08
申请人： Tapas Das , Rajesh Ganesan , Arun Sikder , Ashok Kumar
发明人： Tapas Das , Rajesh Ganesan , Arun Sikder , Ashok Kumar
IPC分类号： G06F15/00
CPC分类号： B24B37/013
摘要： The present invention is an online methodology for end point detection for use in a chemical mechanical planarization process which is both robust and inexpensive while overcoming some of the drawbacks of the existing end point detection approaches currently known in the art. The present invention provides a system and method for identifying a significant event in a chemical mechanical planarization process including the steps of decomposing coefficient of friction data acquired from a chemical mechanical planarization process using wavelet-based multiresolution analysis, and applying a sequential probability ratio test for variance on the decomposed data to identify a significant event in the chemical mechanical planarization process.
摘要翻译： 本发明是一种在化学机械平面化方法中使用的端点检测的在线方法，其在克服本领域当前已知的端点检测方法的一些缺点的同时鲁棒且廉价。 本发明提供一种用于识别化学机械平面化处理中的重要事件的系统和方法，包括以下步骤：使用基于小波的多分辨率分析从化学机械平面化处理获得的摩擦系数数据分解，并对 在分解数据上的方差来识别化学机械平面化过程中的重大事件。
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7.发明授权System for multiresolution analysis assisted reinforcement learning approach to run-by-run control 有权多分辨率分析系统辅助强化学习方法进行运行控制公开(公告)号：US07672739B2
公开(公告)日：2010-03-02
申请号：US11464107
申请日：2006-08-11
IPC分类号： G05B13/02
CPC分类号： G05B13/048 , G05B11/42
摘要： A new multiresolution analysis (wavelet) assisted reinforcement learning (RL) based control strategy that can effectively deal with both multiscale disturbances in processes and the lack of process models. The application of wavelet aided RL based controller represents a paradigm shift in the control of large scale stochastic dynamic systems of which the control problem is a subset. The control strategy is termed a WRL-RbR controller. The WRL-RbR controller is tested on a multiple-input-multiple-output (MIMO) Chemical Mechanical Planarization (CMP) process of wafer fabrication for which process model is available. Results show that the RL controller outperforms EWMA based controllers for low autocorrelation. The new controller also performs quite well for strongly autocorrelated processes for which the EWMA controllers are known to fail. Convergence analysis of the new breed of WRL-RbR controller is presented. Further enhancement of the controller to deal with model free processes and for inputs coming from spatially distributed environments are also addressed.
摘要翻译： 一种新的多分辨率分析（小波）辅助强化学习（RL）控制策略，可以有效地处理过程中的多尺度扰动和缺乏过程模型。 基于小波辅助RL的控制器的应用代表了控制问题是一个子集的大规模随机动态系统的控制范式转移。 控制策略称为WRL-RbR控制器。 WRL-RbR控制器在晶圆制造的多输入多输出（MIMO）化学机械平面化（CMP））工艺中进行测试，该工艺模型可用。 结果表明，RL控制器优于基于EWMA的控制器，用于低自相关。 新的控制器对于已知EWMA控制器故障的强自相关过程也表现相当好。 介绍了新一代WRL-RbR控制器的收敛分析。 还讨论了进一步增强控制器来处理无模式的进程和来自空间分布式环境的输入。
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8.发明授权System and method for online end point detection for use in chemical mechanical planarization 有权用于化学机械平面化的在线端点检测系统和方法公开(公告)号：US07406396B2
公开(公告)日：2008-07-29
申请号：US11164048
申请日：2005-11-08
申请人： Tapas K Das , Rajesh Ganesan , Arun K Sikder , Ashok Kumar
发明人： Tapas K Das , Rajesh Ganesan , Arun K Sikder , Ashok Kumar
CPC分类号： B24B37/013
摘要： The present invention is an online methodology for end point detection for use in a chemical mechanical planarization process which is both robust and inexpensive while overcoming some of the drawbacks of the existing end point detection approaches currently known in the art. The present invention provides a system and method for identifying a significant event in a chemical mechanical planarization process including the steps of decomposing coefficient of friction data acquired from a chemical mechanical planarization process using wavelet-based multiresolution analysis, and applying a sequential probability ratio test for variance on the decomposed data to identify a significant event in the chemical mechanical planarization process.
摘要翻译： 本发明是一种在化学机械平面化方法中使用的端点检测的在线方法，其在克服本领域当前已知的端点检测方法的一些缺点的同时鲁棒且廉价。 本发明提供一种用于识别化学机械平面化处理中的重要事件的系统和方法，包括以下步骤：使用基于小波的多分辨率分析从化学机械平面化处理获得的摩擦系数数据分解，并对 在分解数据上的方差来识别化学机械平面化过程中的重大事件。
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公开(公告)号：US08042062B2
公开(公告)日：2011-10-18
申请号：US12426081
申请日：2009-04-17
申请人： Michael G. Sheldon , Franc Camara , Todd Ouzts , Chris Guzak , Rajesh Ganesan
发明人： Michael G. Sheldon , Franc Camara , Todd Ouzts , Chris Guzak , Rajesh Ganesan
IPC分类号： G06F3/048
CPC分类号： G06F1/329 , G06F1/3231 , G06F3/0482 , Y02D10/173 , Y02D10/24
摘要： A computer system and method are presented that enhance a user experience when viewing images displayed on the computer. The system includes a user interface for the computer that displays a number of thumbnail images that are small representations of image files existing on the computer. The thumbnail images are arranged in alignment with one another, such as at the bottom of a viewing window. An enlarged preview image is positioned adjacent the thumbnail images. The enlarged preview image corresponds to a selected thumbnail image and is a larger representation of an image file corresponding with the selected thumbnail image. A control is displayed in the window that enables the user to iterate through the thumbnail images in at least one direction. As the user iterates through the thumbnail images, the enlarged preview image changes correspondingly.
摘要翻译： 提出了一种计算机系统和方法，其在观看显示在计算机上的图像时增强用户体验。 该系统包括用于显示作为计算机上存在的图像文件的小表示的多个缩略图的计算机的用户界面。 缩略图被布置成彼此对准，诸如在观看窗口的底部。 放大的预览图像位于缩略图旁。 放大的预览图像对应于所选择的缩略图图像，并且是与所选缩略图图像相对应的图像文件的较大表示。 在窗口中显示控件，使得用户可以在至少一个方向上迭代缩略图。 当用户迭代缩略图像时，放大的预览图像相应地改变。
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公开(公告)号：US20100185426A1
公开(公告)日：2010-07-22
申请号：US12688131
申请日：2010-01-15
CPC分类号： G08G5/065
摘要： A taxi-out time predictor includes an airport simulation processing module, a state vector creation processing module, an actual taxi-out value input processing module and a learning processing module. The airport simulation processing module models airport taxi-out dynamics for a predetermined time period. The actual taxi-out value input processing module collects actual taxi-out measurements from departure aircrafts. The learning processing module includes a reinforcement learning estimation processing module, an update utility processing module and a reward processing module. The reinforcement learning estimation processing module generates a predicted taxi-out time value using the variables in the state vector and an output utility value. The aircraft taxi-out time predictor operates iteratively to predict the taxi-out time.
摘要翻译： 出租时间预测器包括机场模拟处理模块，状态向量创建处理模块，实际滑行值输入处理模块和学习处理模块。 机场模拟处理模块在预定时间段内模拟机场出租车动力学。 实际的出租车数值输入处理模块从出发飞机收集实际的出租车测量。 学习处理模块包括强化学习估计处理模块，更新实用程序处理模块和奖励处理模块。 加强学习估计处理模块使用状态矢量中的变量和输出效用值来生成预测出租时间值。 飞机出租时间预测器反复运行以预测出租车时间。
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