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公开(公告)号：US20230390891A1
公开(公告)日：2023-12-07
申请号：US17952059
申请日：2022-09-23
发明人： Thomas H. Osterheld , Benjamin Cherian , Jun Qian , Haoquan Fang , Nicholas A. Wiswell , Sohrab Pourmand , Jeonghoon Oh , Brian J. Brown
CPC分类号： B24B49/003 , B24B49/186
摘要： A chemical mechanical polishing apparatus includes a platen to support a polishing pad, a conditioner head to hold a conditioner disk in contact with the polishing pad, a motor to generate relative motion between the polishing pad and the conditioner disk so as to condition the polishing pad, an in-situ acoustic monitoring system having an acoustic sensor to receive acoustic signals from the conditioner disk, and a controller configured to analyze a signal from the acoustic sensor and determine a characteristic of the conditioner disk or conditioner head based on the signal.
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2.发明申请公开(公告)号：US20160256978A1
公开(公告)日：2016-09-08
申请号：US14639859
申请日：2015-03-05
IPC分类号： B24B37/013 , B24B49/00
CPC分类号： B24B37/013 , B24B49/003
摘要： A chemical mechanical polishing apparatus includes a platen to support a polishing pad, and an in-situ acoustic emission monitoring system including an acoustic emission sensor supported by the platen, a waveguide configured to extending through at least a portion of the polishing pad, and a processor to receive a signal from the acoustic emission sensor. The in-situ acoustic emission monitoring system is configured to detect acoustic events caused by deformation of the substrate and transmitted through the waveguide, and the processor is configured to determine a polishing endpoint based on the signal.
摘要翻译： 化学机械抛光装置包括用于支撑抛光垫的压板，以及包括由压板支撑的声发射传感器的原位声发射监测系统，配置成延伸穿过抛光垫的至少一部分的波导，以及 处理器以从声发射传感器接收信号。 原位声发射监测系统被配置为检测由基板的变形引起的并通过波导传播的声学事件，并且处理器被配置为基于该信号来确定抛光端点。
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公开(公告)号：US09227298B2
公开(公告)日：2016-01-05
申请号：US14169957
申请日：2014-01-31
CPC分类号： B24B49/003 , B24B3/36 , B24B49/18 , G01H1/00
摘要： The present invention provides a sound level meter that may be removably coupled to a saw blade sharpening apparatus to aid in safe, reliable, reproducible and effective saw blade sharpening. The sound level meter is adapted to be removably attached to the saw blade sharpening apparatus and to provide accurate and reliable indication of interference between the saw blade and the saw blade sharpening stones. The sound level meter is capable of detecting interference even in the often noisy operating environment.
摘要翻译： 本发明提供一种声级计，其可拆卸地联接到锯片磨刀装置，以帮助安全，可靠，可再现和有效的锯片磨刀。 声级计适于可拆卸地附接到锯片磨刀装置，并提供对锯片和锯片磨石之间的干涉的精确和可靠的指示。 即使在经常嘈杂的操作环境中，声级计也能检测到干扰。
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公开(公告)号：US20150217426A1
公开(公告)日：2015-08-06
申请号：US14169957
申请日：2014-01-31
CPC分类号： B24B49/003 , B24B3/36 , B24B49/18 , G01H1/00
摘要： The present invention provides a sound level meter that may be removably coupled to a saw blade sharpening apparatus to aid in safe, reliable, reproducible and effective saw blade sharpening. The sound level meter is adapted to be removably attached to the saw blade sharpening apparatus and to provide accurate and reliable indication of interference between the saw blade and the saw blade sharpening stones. The sound level meter is capable of detecting interference even in the often noisy operating environment.
摘要翻译： 本发明提供一种声级计，其可拆卸地联接到锯片磨刀装置，以帮助安全，可靠，可再现和有效的锯片磨刀。 声级计适于可拆卸地附接到锯片磨刀装置，并提供对锯片和锯片磨石之间的干涉的精确和可靠的指示。 即使在经常嘈杂的操作环境中，声级计也能检测到干扰。
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5.发明申请GRINDING ABNORMALITY MONITORING METHOD AND GRINDING ABNORMALITY MONITORING DEVICE 有权研磨异常监测方法和研磨异常监测装置公开(公告)号：US20140033830A1
公开(公告)日：2014-02-06
申请号：US13884777
申请日：2011-12-22
申请人： Tomoyuki Kasuga , Atsushi Saito , Takayuki Yoshimi , Masao Ikeda
发明人： Tomoyuki Kasuga , Atsushi Saito , Takayuki Yoshimi , Masao Ikeda
CPC分类号： G01L5/0076 , B24B5/04 , B24B19/06 , B24B49/003 , B24B49/105 , B24B49/14 , B24B49/16 , G01L5/12
摘要： A grinding abnormality monitoring method and device for grinding a plurality of works of the same type are proposed which can improve the accuracy of judgment whether an abnormality is generated or not by properly setting a threshold value. According to the method or the device, by setting at least one of upper and lower limit values of a trial grinding load detected at the trial grinding of at least one of the works, an occurrence of grinding abnormality is judged when an actual grinding load detected at the actual grinding of work exceeds at least one of the upper and lower limit values thereof which varies depending on the time elapsed from the start of the actual grinding or a position of work relative to a grinding wheel.
摘要翻译： 提出了一种用于研磨相同类型的多个作业的研磨异常监测方法和装置，其可以通过适当地设定阈值来提高判断是否产生异常的判断精度。 根据该方法或装置，通过设定在至少一个工件的试磨中检测到的试验研磨载荷的上限值和下限值中的至少一个，当检测到实际研磨载荷时，判断出磨削异常的发生 在实际的工件磨削中，超过其上下限值中的至少一个，这些上限值和下限值根据实际磨削开始时所经过的时间或相对于砂轮的工作位置而变化。
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公开(公告)号：US20100097894A1
公开(公告)日：2010-04-22
申请号：US11997802
申请日：2006-08-01
申请人： Osamu Kubota , Takayuki Yui , Hideo Hurukawa , Haruhiko Ueno
发明人： Osamu Kubota , Takayuki Yui , Hideo Hurukawa , Haruhiko Ueno
CPC分类号： B24B53/00 , B24B49/003
摘要： To enable detection and transmission of an ultrasonic signal with a high S/N ratio without any need for a component requiring high machining precision or high precision in mounting a component.In a dresser head 41, an ultrasonic sensor 21 detecting an ultrasonic wave is provided, and further provided are: a signal converting/transmitting circuit 23 converting a detected signal of the ultrasonic sensor 21 to a digital signal and subjecting the digital signal to radio modulation; and a signal transmission antenna 26 to which the signal resulting from the radio modulation by the signal converting/transmitting circuit 23 is applied. Further, near the dresser head 41, a signal reception antenna 34 receiving a signal emitted by the signal transmission antenna 26 and a signal reception head 35 demodulating the reception signal obtained by the signal reception antenna 26 are provided, and the demodulated signal is output as a digital signal or an analog signal in a predetermined signal format via a control part 31.
摘要翻译： 为了能够检测和传输具有高S / N比的超声波信号，而不需要需要高加工精度的部件或安装部件的高精度。 在修整器头41中，提供了检测超声波的超声波传感器21，并且还设置有：将超声波传感器21的检测信号转换为数字信号的信号转换/发送电路23，并对数字信号进行无线调制 ; 以及信号发送天线26，由信号转换/发送电路23的无线电调制产生的信号被应用到信号发送天线26。 此外，在修整器头41附近，设置接收由信号发送天线26发出的信号的信号接收天线34和解调由信号接收天线26获得的接收信号的信号接收头35，并将解调信号输出为 经由控制部31以预定信号格式的数字信号或模拟信号。
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7.发明申请Method for optimizing cancer therapy by monitoring maturation of tumor associated vasculature by selenium 失效通过监测硒的肿瘤相关脉管系统成熟来优化癌症治疗的方法公开(公告)号：US20080019919A1
公开(公告)日：2008-01-24
申请号：US11728075
申请日：2007-03-23
申请人： Youcef Rustum , Arup Bhattacharya , Karoly Toth , Harry Slocum , Rami Azrak , Sreenivasulu Chintala , Mukund Seshadri , Richard Mazurchuk
发明人： Youcef Rustum , Arup Bhattacharya , Karoly Toth , Harry Slocum , Rami Azrak , Sreenivasulu Chintala , Mukund Seshadri , Richard Mazurchuk
IPC分类号： A61K49/06 , A61K31/282 , A61K31/4375 , A61K31/513 , A61P35/00 , A61K31/66 , A61K33/24 , A61K49/00
CPC分类号： A61K49/06 , A61K31/282 , A61K31/4375 , A61K31/513 , A61K31/66 , A61K33/24 , A61K45/06 , B24B49/003 , A61K2300/00
摘要： This invention provides a method for a method for optimizing the regimen for the administration of chemotherapeutic agents. The method comprises administration of a selenium compound to an individual, monitoring the modulation of tumor vessel maturation (TVM) to identify an optimal time for administration of a chemotherapeutic agent. This invention also provides a method to determine whether or not a tumor is likely to be a responder to chemotherapy. The method comprises administration of a selenium compound to an individual and determining whether or not an increase in TVM is observed. An increased TVM following administration of selenium is an indication that the tumor will likely respond the chemotherapy.
摘要翻译： 本发明提供了一种优化用于施用化学治疗剂的方案的方法。 该方法包括向个体施用硒化合物，监测肿瘤血管成熟的调节（TVM）以鉴定给予化疗剂的最佳时间。 本发明还提供了确定肿瘤是否可能是化学疗法的反应者的方法。 该方法包括向个体施用硒化合物，并确定是否观察到TVM的增加。 施用硒后增加的TVM表明肿瘤可能对化疗有反应。
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公开(公告)号：US07163435B2
公开(公告)日：2007-01-16
申请号：US11047117
申请日：2005-01-31
申请人： Khoon Peng Lim , Kok Eng Lee
发明人： Khoon Peng Lim , Kok Eng Lee
CPC分类号： B24B53/017 , B24B49/003
摘要： CMP pad conditioning processes have been monitored and controlled by detecting the vibrational spectrum of a sensor mounted on the conditioner support arm. An accelerometer is used as the detector so that vibrational velocity (which correlates with pad wear) can be measured, rather than displacement or acceleration. After the vibrational spectrum has been transformed to its frequency domain equivalent, it is monitored for the presence of abnormal peaks in order to control the conditioning process.
摘要翻译： 已经通过检测安装在调节器支撑臂上的传感器的振动谱来监测和控制CMP垫调节过程。 使用加速度计作为检测器，从而可以测量振动速度（与焊盘磨损相关），而不是位移或加速度。 在将振动谱转换为其频域等效物之后，监测异常峰的存在以控制调节过程。
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公开(公告)号：US20060172662A1
公开(公告)日：2006-08-03
申请号：US11047117
申请日：2005-01-31
CPC分类号： B24B53/017 , B24B49/003
摘要： CMP pad conditioning processes have been monitored and controlled by detecting the vibrational spectrum of a sensor mounted on the conditioner support arm. An accelerometer is used as the detector so that vibrational velocity (which correlates with pad wear) can be measured, rather than displacement or acceleration. After the vibrational spectrum has been transformed to its frequency domain equivalent, it is monitored for the presence of abnormal peaks in order to control the conditioning process.
摘要翻译： 已经通过检测安装在调节器支撑臂上的传感器的振动谱来监测和控制CMP垫调节过程。 使用加速度计作为检测器，从而可以测量振动速度（与焊盘磨损相关），而不是位移或加速度。 在将振动谱转换为其频域等效物之后，监测异常峰的存在以控制调节过程。
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10.发明授权公开(公告)号：US07016799B2
公开(公告)日：2006-03-21
申请号：US10482128
申请日：2002-07-05
申请人： Valerio Dondi
发明人： Valerio Dondi
IPC分类号： G01C25/00
CPC分类号： B24B49/003 , B23Q17/0966 , B24B49/16
摘要： An apparatus and a method are provided for checking a machining process of a machine tool, for example a grinding machine, to obtain information about the quantity of a material removed and the wear condition of a grinding-wheel. The apparatus comprises an acoustic sensor adapted to detect acoustic signals generated by contact between the grinding-wheel and the piece being machined, and a force-detecting sensor adapted to detect the force applied between the grinding-wheel and the piece during the machining. The method comprises processing signals provided by both sensors, defining time intervals on the basis of the signals of the acoustic sensor, and monitoring the signals of the force-detecting sensor in the time intervals.
摘要翻译： 提供了一种用于检查机床（例如研磨机）的加工过程的装置和方法，以获得关于去除的材料的量和磨轮的磨损状况的信息。 该装置包括一个声传感器，适用于检测通过研磨轮与被加工件之间的接触而产生的声信号，以及一个力检测传感器，适用于在机加工过程中检测施加在砂轮与片之间的力。 该方法包括处理由两个传感器提供的信号，基于声传感器的信号定义时间间隔，并且在时间间隔内监测力检测传感器的信号。
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