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    Configuration for determining a concentration of contaminating particles in a loading and unloading chamber of an appliance for processing at least one disk-like object
    1.
    发明授权
    Configuration for determining a concentration of contaminating particles in a loading and unloading chamber of an appliance for processing at least one disk-like object 失效
    用于确定用于处理至少一个盘状物体的器具的装载和卸载室中的污染颗粒浓度的配置

    公开(公告)号：US06928892B2

    公开(公告)日：2005-08-16

    申请号：US10233901

    申请日：2002-09-03

    申请人： Olaf Storbeck ,  Ralph Trunk ,  Lothar Pfitzner ,  Claus Schneider

    发明人： Olaf Storbeck ,  Ralph Trunk ,  Lothar Pfitzner ,  Claus Schneider

    IPC分类号： G01N15/06

    CPC分类号： G01N15/06

    摘要： A configuration for measuring the concentration of contaminating particles at high time resolution in the mini environments of loading and unloading chambers of processing appliances in semiconductor fabrication includes a probe, a movement unit for the probe, a particle detector, vacuum pump and a control unit. Reaching critical layer thicknesses of disk carriers or boats in ovens, and maladjustments of handling systems for wafers, masks, flat panel displays and other disc-like objects can be detected in terms of the cause and quantified immediately. The movement unit moves the probe to a desired position in the loading and unloading chamber as a reaction to the positioning of the handling system. A method of operating the configuration is also provided.

    摘要翻译： 用于在半导体制造中的加工装置的装卸室的微型环境中以高时间分辨率测量污染粒子的浓度的结构包括探针，用于探针的移动单元，粒子检测器，真空泵和控制单元。 达到在烤箱中的盘式载体或船的关键层厚度，以及对于晶片，掩模，平板显示器和其它盘状物体的处理系统的调整可以根据原因被检测并立即量化。 移动单元将探针移动到装载和卸载室中的期望位置，作为对处理系统的定位的反应。 还提供了一种操作该配置的方法。