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公开(公告)号：US20050150552A1
公开(公告)日：2005-07-14
申请号：US11025438
申请日：2004-12-29
申请人： Randy Forshey
发明人： Randy Forshey
CPC分类号： G05D7/005 , Y10T137/7759
摘要： A flow control device may include an inlet for passing fluid into the device, an outlet for passing fluid from the device, a pneumatic pressure controlling portion, a fluid flow control valve actuated by pneumatic pressure supplied via the pneumatic pressure controlling portion, a flow meter configured to measure flow rate of the fluid, and a controller configured to control the pneumatic pressure controlling portion at least according to the flow rate measured by the flow meter. Actuation of the fluid flow control valve may cause adjustment of the flow rate.
摘要翻译： 流量控制装置可以包括用于使流体进入装置的入口，用于使来自装置的流体的出口，气动压力控制部分，通过气动压力控制部分提供的气动压力致动的流体流量控制阀，流量计 被配置为测量流体的流量;以及控制器，其被配置为至少根据由流量计测量的流量来控制气动压力控制部分。 流体流量控制阀的致动可能导致流量的调节。
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公开(公告)号：US06675987B2
公开(公告)日：2004-01-13
申请号：US09968566
申请日：2001-09-29
申请人： David Soberunie , Randy Forshey
发明人： David Soberunie , Randy Forshey
IPC分类号： B67D508
CPC分类号： B67D7/0238 , B01F15/0266 , B01F15/028 , B01F15/0445 , B01F2215/0036 , B01F2215/0096 , B67D7/0272 , B67D7/0283 , B67D7/74 , C30B25/14
摘要： The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relate to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.
摘要翻译： 本发明涉及用于输送液体化学品的化学物质输送系统和方法。 在一个实施例中，本发明涉及具有用于输送在半导体工业中使用的化学品的多储存器称重传感器组件的系统。 在一个实施例中，本发明提供一种多储存器称重传感器组件，其包括控制器，缓冲储存器，主储存器，联接到组件和控制器的一个或多个称重传感器，可操作以称重 储存器，多个供应管线，每个供应管线具有阀并将供应容器中的一个连接到主储存器;以及气体和真空源，用于当由控制器要求并且用于重新填充时从组件中抽出液体 从供应容器组装。
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公开(公告)号：US06340098B2
公开(公告)日：2002-01-22
申请号：US09870227
申请日：2001-05-30
申请人： David Soberanis , Randy Forshey
发明人： David Soberanis , Randy Forshey
IPC分类号： B67D508
CPC分类号： B67D7/0238 , B01F15/0266 , B01F15/028 , B01F15/0445 , B01F2215/0036 , B01F2215/0096 , B67D7/0272 , B67D7/0283 , B67D7/74 , C30B25/14
摘要： The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.
摘要翻译： 本发明涉及用于输送液体化学品的化学物质输送系统和方法。 在一个实施例中，本发明涉及具有用于输送半导体工业中使用的化学品的多储存器称重传感器组件的系统。 在一个实施例中，本发明提供一种多储存器称重传感器组件，其包括控制器，缓冲储存器，主储存器，联接到组件和控制器的一个或多个称重传感器，可操作以称重 储存器，多个供应管线，每个供应管线具有阀并将供应容器中的一个连接到主储存器;以及气体和真空源，用于当由控制器要求并且用于重新填充时从组件中抽出液体 从供应容器组装。
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公开(公告)号：US20050044951A1
公开(公告)日：2005-03-03
申请号：US10650170
申请日：2003-08-27
申请人： Randy Forshey , Peter Pozniak
发明人： Randy Forshey , Peter Pozniak
摘要： The invention relates to systems and methods of measuring low liquid flow rates. The system provides a controller, flow system components, and one or more load cells coupled to a collection vessel. The collection vessel includes a weir that serves as a passage to allow liquid to rise within the weir until the liquid overflows the weir. After the liquid supplied passes a hydraulic stabilization period the controller captures a load cell signal and opens a timing window. At the end of the timing window the controller captures another load cell signal. A controller calculates the mass of the collected liquid over the collection period and the flow rate such as mass rate and/or the volumetric rate. The duration of the timing window depends on the measurement desired. Since the liquid wells up and overflows the weir, the system can make precise measurements of low flow rates. In another feature, feedback control mechanisms are implemented in the batch constant flow method or steady state constant flow method. In both methods, the instantaneous measured flow rate is compared with an input command derived from flow rate calibration, sending an error correction feedback signal to the controlled valves to actuate the flow rate of liquid supply and the drain and the gas pressure, until zero error or an acceptable error margin is reached or the desired flow rate is established.
摘要翻译： 本发明涉及测量低液体流速的系统和方法。 该系统提供控制器，流量系统部件以及耦合到收集容器的一个或多个称重传感器。 收集容器包括一个堰，其作为允许液体在堰内升高的通道，直到液体溢出堰。 在液体供应通过液压稳定期后，控制器捕获称重传感器信号并打开定时窗口。 在定时窗口结束时，控制器捕获另一个称重传感器信号。 控制器在收集期间计算收集液体的质量和流速，例如质量比和/或体积比。 定时窗口的持续时间取决于所需的测量。 由于液体涌出并溢流堰，系统可以精确测量低流量。 在另一个特征中，反馈控制机制以批量恒流法或稳态恒流法实现。 在两种方法中，将瞬时测量流量与从流量校准得到的输入命令进行比较，向受控阀发送误差校正反馈信号，以驱动液体供应和排出流量以及气体压力直到零误差 或达到可接受的误差容限或建立所需流量。
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公开(公告)号：US6098843A
公开(公告)日：2000-08-08
申请号：US224607
申请日：1998-12-31
申请人： David Soberanis , Randy Forshey
发明人： David Soberanis , Randy Forshey
CPC分类号： B67D7/0238 , B67D7/0272 , B67D7/0283 , B67D7/74 , C30B25/14
摘要： The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.
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公开(公告)号：US07007822B2
公开(公告)日：2006-03-07
申请号：US10436349
申请日：2003-05-12
申请人： Randy Forshey , Kenneth A. Johnson
发明人： Randy Forshey , Kenneth A. Johnson
IPC分类号： B67D5/08
CPC分类号： B67D7/0272 , B01F15/0266 , B01F15/028 , B01F15/0445 , B01F2215/0036 , B01F2215/0096 , B67D7/0238 , B67D7/0283 , B67D7/08 , B67D7/74 , C30B25/14
摘要： The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.
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公开(公告)号：US06269975B1
公开(公告)日：2001-08-07
申请号：US09568926
申请日：2000-05-11
申请人： David Soberanis , Randy Forshey
发明人： David Soberanis , Randy Forshey
IPC分类号： B67D508
摘要： The present invention relates to chemical delivery systems and methods for delivery of liquid chemicals. In one embodiment, the present invention relates to systems having multi-reservoir load cell assemblies for delivering chemicals used in the semiconductor industry. In one embodiment, the present invention provides a multi-reservoir load cell assembly, including a controller, a buffer reservoir, a main reservoir, one or more load cells, coupled to the assembly and to the controller, operable to weigh the liquid in the reservoir(s), a plurality of supply lines, each supply line having a valve and connecting one of the supply containers to the main reservoir, and a gas and vacuum sources for withdrawing the liquid from the assembly when demanded by the controller and for refilling the assembly from the supply containers.
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