公开(公告)号：US06923192B2

公开(公告)日：2005-08-02

申请号：US10171429

申请日：2002-06-12

申请人： Chad M. Hosack ,  Paul Patel ,  Raoul Standt

发明人： Chad M. Hosack ,  Paul Patel ,  Raoul Standt

IPC分类号： B08B3/02 ,  B08B3/12 ,  H01L21/00 ,  H01L21/304 ,  B08B7/04

CPC分类号： H01L21/67051 ,  H01L21/67034 ,  Y10S134/902

摘要： A substrate processing system has a first substrate cleaner and a second substrate cleaner. The first substrate cleaner comprises a forward portion and a rear portion. The forward portion includes a rotatable substrate support. The rear portion is vertically thicker than the forward portion. The rear portion includes a device for rotating the support. The second substrate cleaner includes the elements included in the first substrate cleaner. The second substrate cleaner is stacked above the first substrate cleaner with the forward portions being vertically aligned and the rear portions being vertically aligned. A space is formed between the forward portions to permit access to the forward portion of the first substrate cleaner and to permit ample gas flow into the area between the forward portions of the first and the second substrate cleaners.

摘要翻译： 衬底处理系统具有第一衬底清洁器和第二衬底清洁器。 第一衬底清洁器包括前部和后部。 前部包括可旋转的基板支撑件。 后部比前部部分垂直厚。 后部包括用于旋转支撑件的装置。 第二基板清洁器包括包括在第一基板清洁器中的元件。 第二基板清洁器堆叠在第一基板清洁器的上方，其中前部垂直对齐并且后部垂直对准。 在前部之间形成空间，以允许进入第一基板清洁器的前部并且允许充足的气体流入第一和第二基板清洁器的前部之间的区域。

公开(公告)号：US07274531B2

公开(公告)日：2007-09-25

申请号：US10641627

申请日：2003-08-15

申请人： Peter Dickey ,  Raoul Standt ,  Kurt Buckland

发明人： Peter Dickey ,  Raoul Standt ,  Kurt Buckland

IPC分类号： G11B5/68 ,  G11B17/22

CPC分类号： G11B15/6835

摘要： In one exemplary embodiment an automated storage library is provided. The automated storage library may include a media drive, an array of storage bins for holding storage devices, and a robotic transfer mechanism for transporting storage devices between the media drive and the storage bins. The storage library includes a housing for supporting the media drive, the robotic transfer mechanism, and the storage bins, and a structure within the housing that is associated with one or more storage bins, wherein the structure is extendable at least partially from the housing.

摘要翻译： 在一个示例性实施例中，提供自动存储库。 自动存储库可以包括媒体驱动器，用于保存存储设备的存储箱阵列，以及用于在介质驱动器和存储箱之间传送存储设备的机器人传送机构。 存储库包括用于支撑介质驱动器的壳体，机器人传送机构和存储箱，以及壳体内与一个或多个存储箱相关联的结构，其中该结构至少部分地可从外壳延伸。

公开(公告)号：US20050036231A1

公开(公告)日：2005-02-17

申请号：US10641969

申请日：2003-08-15

申请人： Peter Dickey ,  Raoul Standt

发明人： Peter Dickey ,  Raoul Standt

IPC分类号： B25J15/02 ,  G11B15/68 ,  G11B17/26

CPC分类号： B25J15/0206 ,  G11B15/68

摘要： A mechanical gripper mechanism for transporting and handling storage devices is provided. In one example, the gripper mechanism includes a pair of opposing gripper fingers rotatably mounted to the picker frame, each having a distal end adapted to engage opposite minor side surfaces of a storage device. The opposing gripper fingers are further interconnected by corresponding geared surfaces such that the gripper fingers rotate together. In one example, the proximal ends of the gripper fingers include geared surfaces that are directly coupled to rotate the gripper fingers together.

摘要翻译： 提供了用于运输和处理存储装置的机械夹持机构。 在一个示例中，夹持器机构包括可旋转地安装到拾取器框架的一对相对的夹持器手指，每个具有适于接合存储装置的相对的次侧表面的远端。 相对的夹持器手指通过相应的齿轮表面进一步互连，使得夹持器手指一起旋转。 在一个示例中，夹持器手指的近端包括直接联接以将夹持器手指旋转在一起的齿轮表面。

公开(公告)号：US07387485B2

公开(公告)日：2008-06-17

申请号：US10675376

申请日：2003-09-29

申请人： Peter Dickey ,  Raoul Standt ,  John Edward Maroney

发明人： Peter Dickey ,  Raoul Standt ,  John Edward Maroney

IPC分类号： B65G1/137

CPC分类号： G11B15/6835 ,  G11B17/225

摘要： Storage library systems and methods of operating and assembling library systems are provided. The storage library system may include a stationary support member having a first axis and a cartridge transport assembly. The cartridge transport assembly includes a cartridge retrieving mechanism configured to retrieve a removable media cartridge, said cartridge transport assembly being coupled to the support member, wherein the cartridge retrieving mechanism is positionable in four degrees of freedom. The method of operating a tape library may include transmitting instruction signals to a robotics controller disposed on a cartridge transport assembly, translating the cartridge transport assembly along a stationary support member, and positioning the cartridge retrieving mechanism in four degrees of freedom relative to the stationary support member.

摘要翻译： 提供了存储库系统和操作和组装库系统的方法。 存储库系统可以包括具有第一轴线和盒输送组件的固定支撑构件。 药筒输送组件包括被配置为取回可移动介质盒的盒取回机构，所述盒传送组件联接到支撑构件，其中盒检索机构可以四自由度定位。 操作磁带库的方法可以包括将指令信号发送到设置在磁带盒传输组件上的机器人控制器，沿着固定支撑构件平移盒传送组件，以及将盒检索机构相对于固定支架定位四个自由度 会员。

公开(公告)号：US07212375B2

公开(公告)日：2007-05-01

申请号：US10641969

申请日：2003-08-15

申请人： Peter Dickey ,  Raoul Standt

发明人： Peter Dickey ,  Raoul Standt

IPC分类号： G11B15/68

CPC分类号： B25J15/0206 ,  G11B15/68

摘要： A mechanical gripper mechanism for transporting and handling storage devices is provided. In one example, the gripper mechanism includes a pair of opposing gripper fingers rotatably mounted to the picker frame, each having a distal end adapted to engage opposite minor side surfaces of a storage device. The opposing gripper fingers are further interconnected by corresponding geared surfaces such that the gripper fingers rotate together. In one example, the proximal ends of the gripper fingers include geared surfaces that are directly coupled to rotate the gripper fingers together.

摘要翻译： 提供了用于运输和处理存储装置的机械夹持机构。 在一个示例中，夹持器机构包括可旋转地安装到拾取器框架的一对相对的夹持器手指，每个具有适于接合存储装置的相对的次侧表面的远端。 相对的夹持器手指通过相应的齿轮表面进一步互连，使得夹持器手指一起旋转。 在一个示例中，夹持器手指的近端包括直接联接以将夹持器手指旋转在一起的齿轮表面。

公开(公告)号：US07193810B2

公开(公告)日：2007-03-20

申请号：US10642032

申请日：2003-08-15

申请人： Peter Dickey ,  Raoul Standt

发明人： Peter Dickey ,  Raoul Standt

IPC分类号： G11B16/675

CPC分类号： G11B15/68 ,  B25J13/088 ,  B25J15/0206

摘要： A mechanical gripper mechanism for transporting and handling storage devices including a sensor to determine the position of opposing gripper fingers is provided. The gripper mechanism includes a pair of opposing gripper fingers rotatably mounted to a picker frame, each having a distal end adapted to engage a storage device. The gripper mechanism further includes at least one optically detectable indicator associated with the position and movement of the gripper fingers, and an optical sensor positioned to detect at least one of the optically detectable indicators. In one example, the at least one optically detectable indicators are disposed in a curve coupled to a gear associated with rotating the gripper fingers.

摘要翻译： 提供一种用于运输和处理包括用于确定相对的夹持器手指的位置的传感器的存储装置的机械夹持机构。 夹持机构包括可旋转地安装到拾取器框架的一对相对的夹持器手指，每个具有适于接合存储装置的远端。 夹持器机构还包括与夹爪指的位置和运动相关联的至少一个可光学检测的指示器，以及定位成检测光学可检测指示器中的至少一个的光学传感器。 在一个示例中，至少一个可光学检测的指示器设置在与旋转夹持器手指相关联的齿轮上的曲线中。

公开(公告)号：US06928751B2

公开(公告)日：2005-08-16

申请号：US10171430

申请日：2002-06-12

申请人： Chad M. Hosack ,  Jeffrey M. Lauerhaas ,  Mario E. Bran ,  Raoul Standt ,  Paul Patel ,  Yi Wu ,  Geert Doumen ,  Paul Mertens

发明人： Chad M. Hosack ,  Jeffrey M. Lauerhaas ,  Mario E. Bran ,  Raoul Standt ,  Paul Patel ,  Yi Wu ,  Geert Doumen ,  Paul Mertens

IPC分类号： B08B3/02 ,  B08B3/12 ,  H01L21/00 ,  H01L21/304 ,  F26B17/00

CPC分类号： H01L21/67051 ,  H01L21/67034 ,  Y10S134/902

摘要： An apparatus includes a rotatable chuck for supporting a substrate and a splash guard. The splash guard surrounds the chuck and surrounds a substrate mounted on the chuck. The splash guard has a portion that deflects fluid being flung off the substrate by centrifugal action in a manner so as to not splash back onto the substrate. The splash guard is moveable between a process position in which the upper annular edge of the splash guard extends above the chuck and a substrate on the chuck, and a load/unload position in which the splash guard is tilted so that one side of the upper annular edge is below an upper edge of the chuck. The movement of the splash guard facilitates loading and unloading of a substrate.

摘要翻译： 一种装置包括用于支撑衬底和防溅罩的可旋转卡盘。 防溅罩围绕卡盘并围绕安装在卡盘上的基板。 防溅罩具有通过离心作用将流体从基板上偏离的部分，以便不会溅回到基板上。 防溅罩可以在其中防溅罩的上部环形边缘在卡盘上方延伸到卡盘上的基板和加载/卸载位置之间移动，在该位置，防溅罩倾斜使得防护罩的上侧 环形边缘在卡盘的上边缘下方。 防溅罩的运动有助于衬底的装载和卸载。

公开(公告)号：US20050069400A1

公开(公告)日：2005-03-31

申请号：US10675376

申请日：2003-09-29

申请人： Peter Dickey ,  Raoul Standt ,  John Maroney

发明人： Peter Dickey ,  Raoul Standt ,  John Maroney

IPC分类号： G11B15/68 ,  G11B17/22 ,  B65G1/00

CPC分类号： G11B15/6835 ,  G11B17/225

摘要： Storage library systems and methods of operating and assembling library systems are provided. The storage library system may include a stationary support member having a first axis and a cartridge transport assembly. The cartridge transport assembly includes a cartridge retrieving mechanism configured to retrieve a removable media cartridge, said cartridge transport assembly being coupled to the support member, wherein the cartridge retrieving mechanism is positionable in four degrees of freedom. The method of operating a tape library may include transmitting instruction signals to a robotics controller disposed on a cartridge transport assembly, translating the cartridge transport assembly along a stationary support member, and positioning the cartridge retrieving mechanism in four degrees of freedom relative to the stationary support member.

摘要翻译： 提供了存储库系统和操作和组装库系统的方法。 存储库系统可以包括具有第一轴线和盒输送组件的固定支撑构件。 药筒输送组件包括被配置为取回可移动介质盒的盒取回机构，所述盒传送组件联接到支撑构件，其中盒检索机构可以四自由度定位。 操作磁带库的方法可以包括将指令信号发送到设置在磁带盒传输组件上的机器人控制器，沿着固定支撑构件平移盒传送组件，以及将盒检索机构相对于固定支架定位四个自由度 会员。

公开(公告)号：US20050036408A1

公开(公告)日：2005-02-17

申请号：US10642038

申请日：2003-08-15

申请人： Peter Dickey ,  Raoul Standt

发明人： Peter Dickey ,  Raoul Standt

IPC分类号： G11B7/085 ,  G11B15/68 ,  G11B17/22

CPC分类号： G11B15/6835 ,  G11B17/225

摘要： In one exemplary embodiment a mechanical gripper mechanism for transporting storage devices and having a cartridge detector is provided. The gripper includes a pair of opposing gripper fingers, where each gripper finger includes a proximal end pivotally mounted to the picker frame, and a distal end adapted to engage minor side surfaces of a storage device. Further, the gripper mechanism includes a cartridge detector extending away from the picker frame and at least partially depressible between the pair of opposing gripper fingers. The distal end of the cartridge detector has a larger cross-sectional area than the proximal end of the cartridge detector.

摘要翻译： 在一个示例性实施例中，提供了一种用于运送存储装置并具有盒检测器的机械夹持器机构。 夹持器包括一对相对的夹持器手指，其中每个夹持器手指包括可枢转地安装到拾取器框架的近端，以及适于接合存储装置的次侧表面的远端。 此外，夹持器机构包括从拾取器框架延伸并且在该对相对的夹持器手指之间至少部分地可压缩的盒检测器。 墨盒检测器的远端具有比墨盒检测器的近端更大的横截面面积。

公开(公告)号：US20050036407A1

公开(公告)日：2005-02-17

申请号：US10642032

申请日：2003-08-15

申请人： Peter Dickey ,  Raoul Standt

发明人： Peter Dickey ,  Raoul Standt

IPC分类号： B25J13/08 ,  B25J15/02 ,  G11B15/68 ,  G11B7/085

CPC分类号： G11B15/68 ,  B25J13/088 ,  B25J15/0206

摘要： A mechanical gripper mechanism for transporting and handling storage devices including a sensor to determine the position of opposing gripper fingers is provided. The gripper mechanism includes a pair of opposing gripper fingers rotatably mounted to a picker frame, each having a distal end adapted to engage a storage device. The gripper mechanism further includes at least one optically detectable indicator associated with the position and movement of the gripper fingers, and an optical sensor positioned to detect at least one of the optically detectable indicators. In one example, the at least one optically detectable indicators are disposed in a curve coupled to a gear associated with rotating the gripper fingers.

摘要翻译： 提供一种用于运输和处理包括用于确定相对的夹持器手指的位置的传感器的存储装置的机械夹持机构。 夹持机构包括可旋转地安装到拾取器框架的一对相对的夹持器手指，每个具有适于接合存储装置的远端。 夹持器机构还包括与夹爪指的位置和运动相关联的至少一个可光学检测的指示器，以及定位成检测光学可检测指示器中的至少一个的光学传感器。 在一个示例中，至少一个可光学检测的指示器设置在与旋转夹持器手指相关联的齿轮上的曲线中。