Method of fabricating thermally stable MTJ cell and apparatus
    1.
    发明授权
    Method of fabricating thermally stable MTJ cell and apparatus 有权
    制造热稳定MTJ电池及其装置的方法

    公开(公告)号:US06544801B1

    公开(公告)日:2003-04-08

    申请号:US09642350

    申请日:2000-08-21

    IPC分类号: H01L2100

    CPC分类号: H01L43/12 B82Y10/00

    摘要: An MTJ cell including an insulator layer of material between magnetic material layers with the insulator layer of material having a greater attraction for a third material than the magnetic material layers. The third material is introduced to one or both so that when the cell is heated the third material is redistributed from the magnetic material layer to the insulator layer. Upon redistribution the insulator layer becomes an insulator layer material. Also, a first diffusion barrier layer is positioned between a first metal electrode and one of the magnetic material layers and/or a second diffusion barrier layer is positioned between a second metal electrode and the other magnetic material layer to prevent diffusion of the metal in the electrodes into the magnetic material layers.

    摘要翻译: MTJ单元包括在磁性材料层之间的材料的绝缘体层,材料的绝缘体层对于第三材料具有比磁性材料层更大的吸引力。 将第三材料引入一个或两个,使得当电池被加热时,第三材料从磁性材料层重新分布到绝缘体层。 在再分配时,绝缘体层变成绝缘体层材料。 此外,第一扩散阻挡层位于第一金属电极和一个磁性材料层之间,和/或第二扩散阻挡层位于第二金属电极和另一个磁性材料层之间,以防止金属在 电极进入磁性材料层。