公开(公告)号：US20080204741A1

公开(公告)日：2008-08-28

申请号：US12072014

申请日：2008-02-22

申请人： Keith Mitchell Hill ,  Randy LaRue McClure ,  Richard Sean Priestley

发明人： Keith Mitchell Hill ,  Randy LaRue McClure ,  Richard Sean Priestley

IPC分类号： G01N21/00

CPC分类号： G01N21/958 ,  G01B11/2441 ,  G01N2021/9513

摘要： Disclosed is a method for the detection and quantification of defects in transparent substrates and, more particularly, in glass sheets. The method comprises providing a transparent planar substrate having a top surface and a bottom surface. The surface topography of at least a portion of the top surface of the provide transparent planar substrate is measured to obtain a three dimensional top surface profile having a sub-nanometer level of precision. From the three dimensional surface profile measurement, the existence of one or more surface variations in the three dimensional surface profile having an amplitude greater than a predetermined tolerance can be identified and/or quantified.

摘要翻译： 公开了一种用于检测和定量透明基板中的缺陷的方法，特别是在玻璃板中。 该方法包括提供具有顶表面和底表面的透明平面基底。 测量提供透明平面基板的顶表面的至少一部分的表面形貌，以获得具有亚纳米级精度的三维顶表面轮廓。 从三维表面轮廓测量可以确定和/或量化具有大于预定公差的幅度的三维表面轮廓中的一个或多个表面变化的存在。

公开(公告)号：US20110096978A1

公开(公告)日：2011-04-28

申请号：US12607346

申请日：2009-10-28

申请人： Richard Sean Priestley ,  Eric Alfred Soehnlein

发明人： Richard Sean Priestley ,  Eric Alfred Soehnlein

IPC分类号： G06K9/00

CPC分类号： G01N21/958 ,  G01N21/896 ,  G01N2021/9513

摘要： An apparatus (2) and method, for measuring process-induced features in a transparent sheet (10). The apparatus includes a light source (100), an imaging device (80), and a support structure (30) disposed between the light source and the imaging device. The support structure is configured and arranged to support the transparent sheet so that measurement error induced by the support structure is viewed by the imaging device as extending along or parallel to a first axis (46, 54) that is oblique to a second axis (22, 24) along or parallel to which the process-induced features in the transparent sheet extend when viewed by the imaging device.

摘要翻译： 一种用于测量透明片材（10）中的加工诱发特征的装置（2）和方法。 该装置包括光源（100），成像装置（80）和设置在光源和成像装置之间的支撑结构（30）。 支撑结构被构造和布置成支撑透明片，使得由成像装置观察到由支撑结构引起的测量误差沿着或平行于与第二轴线（22）倾斜的第一轴线（46,54）延伸 ，24），当由成像装置观察时，透明片中的工艺诱发特征延伸或平行。