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公开(公告)号：US06203406B1
公开(公告)日：2001-03-20
申请号：US09309931
申请日：1999-05-11
IPC分类号： B24B100
CPC分类号： B24C3/22 , B08B7/0092 , B24C1/003 , H05K3/26
摘要： A scheme for removing foreign material from the surface of a substrate by directing a high velocity aerosol of at least partially frozen particles against the foreign material to be removed. Different schemes are described for accelerating the frozen particles to very high velocities sufficient for particle removal, removal of organic layers (e.g., hard baked photoresist or ion implanted photoresist) and removal of metallic layers. In one embodiment, liquid droplets are entrained in a high velocity gas flow and the resulting gas/liquid mixture is passed through an expansion nozzle to produce a high velocity aerosol of frozen particles. In another embodiment, frozen aerosol particles are entrained in, e.g., a sonic or supersonic gas jet before impacting a surface to be cleaned. The cleaning aerosols may be applied to substrates inside a vacuum chamber or directly from a hand-held device. Also, various scanning systems are described for achieving substantially uniform exposure of the substrate to the cleaning aerosol.
摘要翻译： 通过将至少部分冻结的颗粒的高速气溶胶引导到待除去的异物上来从基材的表面除去异物的方案。 描述了用于将冷冻颗粒加速至非常高的速度以用于颗粒去除，去除有机层（例如硬烘烤的光致抗蚀剂或离子注入的光致抗蚀剂）和去除金属层的不同方案。 在一个实施例中，液滴被夹带在高速气流中，并且使得到的气体/液体混合物通过膨胀喷嘴以产生冷冻颗粒的高速气溶胶。 在另一个实施方案中，在冲击待清洁表面之前，将冷冻的气溶胶颗粒夹带在例如声波或超音速气体射流中。 清洁气溶胶可以施加到真空室内的基底或直接从手持装置施加。 此外，描述了各种扫描系统，以实现基板对清洁气溶胶的基本上均匀的曝光。
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公开(公告)号：US5931721A
公开(公告)日：1999-08-03
申请号：US335329
申请日：1994-11-07
CPC分类号： B24C3/22 , B08B7/0092 , B24C1/003 , H05K3/26
摘要： A scheme for removing foreign material from the surface of a substrate by directing a high velocity aerosol of at least partially frozen particles against the foreign material to be removed. Different schemes are described for accelerating the frozen particles to very high velocities sufficient for particle removal, removal of organic layers (e.g., hard baked photoresist or ion implanted photoresist) and removal of metallic layers. In one embodiment, liquid droplets are entrained in a high velocity gas flow and the resulting gas/liquid mixture is passed through an expansion nozzle to produce a high velocity aerosol of frozen particles. In another embodiment, frozen aerosol particles are entrained in, e.g., a sonic or supersonic gas jet before impacting a surface to be cleaned. The cleaning aerosols may be applied to substrates inside a vacuum chamber or directly from a hand-held device. Also, various scanning systems are described for achieving substantially uniform exposure of the substrate to the cleaning aerosol.
摘要翻译： 通过将至少部分冻结的颗粒的高速气溶胶引导到待除去的异物上来从基材的表面除去异物的方案。 描述了用于将冷冻颗粒加速至非常高的速度以用于颗粒去除，去除有机层（例如硬烘烤的光致抗蚀剂或离子注入的光致抗蚀剂）和去除金属层的不同方案。 在一个实施例中，液滴被夹带在高速气流中，并且使得到的气体/液体混合物通过膨胀喷嘴以产生冷冻颗粒的高速气溶胶。 在另一个实施方案中，在冲击待清洁表面之前，将冷冻的气溶胶颗粒夹带在例如声波或超音速气体射流中。 清洁气溶胶可以施加到真空室内的基底或直接从手持装置施加。 此外，描述了各种扫描系统，以实现基板对清洁气溶胶的基本上均匀的曝光。
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