Capacitively coupled RF diamond-like-carbon reactor
    1.
    发明授权
    Capacitively coupled RF diamond-like-carbon reactor 失效
    电容耦合RF金刚石样碳反应堆

    公开(公告)号:US6037016A

    公开(公告)日:2000-03-14

    申请号:US77513

    申请日:1998-05-29

    摘要: A process of coating a non-conductive fiber with diamond-like carbon, including passing a non-conductive fiber between a pair of parallel metal grids within a reaction chamber, introducing a hydrocarbon gas into the reaction chamber, forming a plasma within the reaction chamber for a sufficient period of time whereby diamond-like carbon is formed upon the non-conductive fiber, is provided together with a reactor chamber for deposition of diamond-like carbon upon a non-conductive fiber, including a vacuum chamber, a cathode assembly including a pair of electrically isolated opposingly parallel metal grids spaced apart at a distance of less than about 1 centimeter, an anode, a means of introducing a hydrocarbon gas into said vacuum chamber, and a means of generating a plasma within said vacuum chamber.

    摘要翻译: PCT No.PCT / US96 / 18438 Sec。 371日期:1998年5月29日 102(e)日期1998年5月29日PCT 1996年11月18日PCT公布。 公开号WO97 / 20981 日期:1997年6月12日一种用类金刚石碳涂覆非导电纤维的方法,包括使非导电纤维在反应室内的一对平行金属网之间通过,将烃气体引入反应室,形成 在反应室内等离子体足够长的时间,其中在非导电纤维上形成类金刚石碳,与反应室一起设置,用于将金刚石状碳沉积在非导电纤维上,该非导电纤维包括真空室 一个阴极组件,其包括一对间隔开的距离小于约1厘米的电隔离的相对平行的金属栅极,阳极,将烃气体引入所述真空室中的装置,以及在所述真空室内产生等离子体的装置 真空室。