Method and apparatus for measuring the thickness of a film using low
coherence reflectometry
    1.
    发明授权
    Method and apparatus for measuring the thickness of a film using low coherence reflectometry 失效
    使用低相干反射测量薄膜厚度的方法和装置

    公开(公告)号:US5642196A

    公开(公告)日:1997-06-24

    申请号:US520199

    申请日:1995-08-28

    CPC分类号: G01B11/06

    摘要: An apparatus and method for measuring the thickness of a film having top and bottom surfaces. The apparatus includes a first coupler for generating a first probe light signal and a second probe light signal from a low coherence light source. The first probe light signal is directed toward the top surface of the film and the light leaving the top surface of the film is collected. Similarly, the second probe light signal is directed toward the bottom surface of the film and the light leaving the bottom surface of the film is also collected. Top and bottom partially reflecting reference surfaces are provided for generating reflections. The top reference surface reflects part of the light leaving the top surface back toward the top surface, and the bottom reference surface reflects light leaving the bottom surface of the film back toward the bottom surface of the film. The collected light is combined to form a collected light signal which is input to a receiver that determines the time delay between light reflected from the top surface of the film and the top reference surface and between the bottom surface of the film and the bottom reference surface. In the preferred embodiment of the present invention, the receiver is constructed from an optical autocorrelator or an optical spectrum analyzer that includes circuitry for providing the Fourier transform of the frequency domain spectrum measured from the collected light signal.

    摘要翻译: 一种用于测量具有顶表面和底表面的膜的厚度的装置和方法。 该装置包括用于产生第一探针光信号的第一耦合器和来自低相干光源的第二探测光信号。 第一探针光信号指向膜的顶表面,并且收集离开膜的顶表面的光。 类似地,第二探针光信号指向膜的底表面,并且还收集离开膜的底表面的光。 提供顶部和底部部分反射的参考表面用于产生反射。 顶部参考表面反射离开顶部表面的光的一部分朝向顶部表面,并且底部参考表面将离开膜的底部表面的光反射回到膜的底部表面。 收集的光被组合以形成收集的光信号,其被输入到接收器,该接收器确定从膜的顶表面反射的光与顶部参考表面之间以及在膜的底表面和底部参考表面之间的时间延迟 。 在本发明的优选实施例中,接收机由光学自相关器或光谱分析仪构成,光谱分析仪包括用于提供从收集的光信号测量的频域频谱的傅里叶变换的电路。

    Multiplexing and calibration techniques for optical signal measuring
instruments
    2.
    发明授权
    Multiplexing and calibration techniques for optical signal measuring instruments 失效
    光信号测量仪器的复用和校准技术

    公开(公告)号:US4558217A

    公开(公告)日:1985-12-10

    申请号:US468189

    申请日:1983-02-25

    申请人: Ronald V. Alves

    发明人: Ronald V. Alves

    IPC分类号: G01K11/32 G01K15/00 G01J5/10

    CPC分类号: G01K11/3213 G01K15/00

    摘要: An optical temperature measuring instrument for detecting illuminescense of phosphor temperature sensing elements, wherein a two or more point temperature calibration system allows compensating for different temperature sensor characteristics, and a single optical system is utilized for simultaneously reading the temperatures of a plurality of temperature sensors in a multiplexing arrangement.

    摘要翻译: 一种用于检测荧光体温度感测元件的发光体的光学温度测量仪器,其中两个或多个点温度校准系统允许补偿不同的温度传感器特性,并且单个光学系统用于同时读取多个温度传感器的温度 复用布置。

    Optical system for an instrument to detect the temperature of an optical
fiber phosphor probe
    3.
    发明授权
    Optical system for an instrument to detect the temperature of an optical fiber phosphor probe 失效
    用于检测光纤荧光探针温度的仪器的光学系统

    公开(公告)号:US4459044A

    公开(公告)日:1984-07-10

    申请号:US232626

    申请日:1981-02-09

    申请人: Ronald V. Alves

    发明人: Ronald V. Alves

    CPC分类号: G01K11/3213 G01K15/00

    摘要: An optical system for exciting a temperature dependent phosphor with radiation and detecting independently emissions therefrom in optically isolable first and second wavelength ranges that gives an indication of the temperature of the phosphor. The optical system is carried by a heat-insulating housing disposed between a heat generating light source and the heat sensitive detectors. Dichroic mirrors are utilized to separate the two wavelength ranges emitted by the phosphor and to allow the sharing of a common optical path by three different radiation wavelength ranges without an undue loss of radiation intensity in any of the wavelength ranges. The light source may be of a helically shaped filament that is tilted with respect to an imaging optical axis so that the side of the helix is imaged with a minimum amount of the space between the turns showing, thereby maximizing the optical energy imaged from the light source. A temperature sensitive phosphor sensor is utilized with the instrument for internal calibration. The internal reference phosphor sensor also has its temperature measured by another standard technique for comparison. The internal calibration can also be used to calibrate a phosphor sensor on the end of a optical fiber by placing that end in a calibration bath maintained within the instrument.

    摘要翻译: 一种用于通过辐射激发温度依赖性荧光体的光学系统,并且在光学可隔离的第一和第二波长范围内独立地检测发射,从而给出荧光体温度的指示。 光学系统由设置在发热光源和热敏检测器之间的绝热壳体承载。 分色镜用于分离由磷光体发射的两个波长范围,并允许通过三个不同的辐射波长范围共享公共光路,而不会在任何波长范围内产生不适当的辐射强度损失。 光源可以是相对于成像光轴倾斜的螺旋形灯丝,使得螺旋线的一侧以最小量的匝之间的空间成像,从而使从光照射的光能最大化 资源。 使用温度敏感的荧光体传感器与仪器进行内部校准。 内部参考磷光体传感器也通过另一种标准技术测量其温度进行比较。 内部校准也可用于通过将该端放置在仪器内保持的校准液中来校准光纤端部的荧光体传感器。