摘要:
An apparatus and method for measuring the thickness of a film having top and bottom surfaces. The apparatus includes a first coupler for generating a first probe light signal and a second probe light signal from a low coherence light source. The first probe light signal is directed toward the top surface of the film and the light leaving the top surface of the film is collected. Similarly, the second probe light signal is directed toward the bottom surface of the film and the light leaving the bottom surface of the film is also collected. Top and bottom partially reflecting reference surfaces are provided for generating reflections. The top reference surface reflects part of the light leaving the top surface back toward the top surface, and the bottom reference surface reflects light leaving the bottom surface of the film back toward the bottom surface of the film. The collected light is combined to form a collected light signal which is input to a receiver that determines the time delay between light reflected from the top surface of the film and the top reference surface and between the bottom surface of the film and the bottom reference surface. In the preferred embodiment of the present invention, the receiver is constructed from an optical autocorrelator or an optical spectrum analyzer that includes circuitry for providing the Fourier transform of the frequency domain spectrum measured from the collected light signal.
摘要:
An optical temperature measuring instrument for detecting illuminescense of phosphor temperature sensing elements, wherein a two or more point temperature calibration system allows compensating for different temperature sensor characteristics, and a single optical system is utilized for simultaneously reading the temperatures of a plurality of temperature sensors in a multiplexing arrangement.
摘要:
An optical system for exciting a temperature dependent phosphor with radiation and detecting independently emissions therefrom in optically isolable first and second wavelength ranges that gives an indication of the temperature of the phosphor. The optical system is carried by a heat-insulating housing disposed between a heat generating light source and the heat sensitive detectors. Dichroic mirrors are utilized to separate the two wavelength ranges emitted by the phosphor and to allow the sharing of a common optical path by three different radiation wavelength ranges without an undue loss of radiation intensity in any of the wavelength ranges. The light source may be of a helically shaped filament that is tilted with respect to an imaging optical axis so that the side of the helix is imaged with a minimum amount of the space between the turns showing, thereby maximizing the optical energy imaged from the light source. A temperature sensitive phosphor sensor is utilized with the instrument for internal calibration. The internal reference phosphor sensor also has its temperature measured by another standard technique for comparison. The internal calibration can also be used to calibrate a phosphor sensor on the end of a optical fiber by placing that end in a calibration bath maintained within the instrument.
摘要:
A discharge tube for a gaseous laser is terminated with windows made of crystalline quartz which do not fluoresce in the presence of high energy, visible and ultraviolet light radiation.