公开(公告)号：US06267075B1

公开(公告)日：2001-07-31

申请号：US09350322

申请日：1999-07-09

申请人： William A. Moffat ,  Royston James Reynolds

发明人： William A. Moffat ,  Royston James Reynolds

IPC分类号： C23C16509

CPC分类号： B08B7/0035 ,  H01L21/67028

摘要： A plasma cleaning apparatus for cleaning lead frames or other items comprised of a chamber adapted for containing a plasma, a magazine positioned in the chamber for holding the lead frames, a first active electrode positioned in the chamber on one side of the magazine and a second active electrode positioned in the chamber on the other side of the magazine. A first grounded electrode is positioned between the first active electrode and the magazine and a second grounded electrode is positioned between the second active electrode and the magazine. The magazine is held at the same voltage as the first and second active electrodes and a plasma is generated which extends from the first active electrode to the second active electrode.

摘要翻译： 一种用于清洁引线框架或其他物品的等离子体清洁装置，其包括适于容纳等离子体的腔室，定位在腔室中用于保持引线框架的盒子，位于盒体一侧的腔室中的第一有效电极， 有源电极位于盒的另一侧的腔室中。 第一接地电极定位在第一有源电极和盒之间，并且第二接地电极位于第二有源电极和盒之间。 保持盒与第一和第二有源电极相同的电压，并且产生从第一有源电极延伸到第二有源电极的等离子体。