公开(公告)号：US07541604B2

公开(公告)日：2009-06-02

申请号：US11560118

申请日：2006-11-15

申请人： Sven Goetze ,  Harald Ebel ,  Juergen Kleinschmidt ,  Imtiaz Ahmad

发明人： Sven Goetze ,  Harald Ebel ,  Juergen Kleinschmidt ,  Imtiaz Ahmad

IPC分类号： H01J17/26 ,  H01J35/00

CPC分类号： H01J17/28 ,  H01J7/26 ,  H05G2/003

摘要： The invention is directed to an arrangement for the generation of short-wavelength radiation based on a hot plasma generated by gas discharge and to a method for the production of coolant-carrying electrode housings. It is the object of the invention to find a novel possibility for gas discharge based short-wavelength radiation sources with high average radiation output in quasi-continuous discharge operation by which efficient cooling principles can be implemented using inexpensive and simple means in order to prevent a temporary melting of the electrode surfaces and, therefore, to ensure a long lifetime of the electrodes. According to the invention, this object is met in that special cooling channels for circulating coolant are integrated in electrode collars of the electrode housings. The cooling channels are advanced radially up to within a few millimeters of the highly thermally stressed surface regions and are connected by necked-down channel portions which are arranged coaxial to the axis of symmetry and which are provided with channel structures for increasing the inner surface and for increasing the flow rate of the coolant.

摘要翻译： 本发明涉及一种用于产生基于由气体放电产生的热等离子体的短波长辐射的装置以及用于制造承载冷却剂的电极壳体的方法。 本发明的目的是在准连续放电操作中找到具有高平均辐射输出的基于气体放电的短波长辐射源的新颖可能性，通过该方法可以使用廉价和简单的方法来实现有效的冷却原理，以便防止 暂时熔化电极表面，因此确保电极寿命长。 根据本发明，由于用于循环冷却剂的特殊冷却通道集成在电极壳体的电极环中，所以满足了该目的。 冷却通道从高度受热应力的表面区域径向推进到几毫米以内，并且通过与对称轴线同轴设置的颈缩通道部分连接，并且设置有用于增加内表面的通道结构， 以增加冷却剂的流量。

公开(公告)号：US20070114946A1

公开(公告)日：2007-05-24

申请号：US11560118

申请日：2006-11-15

申请人： SVEN GOETZE ,  Harald Ebel ,  Juergen Kleinschmidt ,  Imtiaz Ahmad

发明人： SVEN GOETZE ,  Harald Ebel ,  Juergen Kleinschmidt ,  Imtiaz Ahmad

IPC分类号： H01J7/24

CPC分类号： H01J17/28 ,  H01J7/26 ,  H05G2/003

摘要： The invention is directed to an arrangement for the generation of short-wavelength radiation based on a hot plasma generated by gas discharge and to a method for the production of coolant-carrying electrode housings. It is the object of the invention to find a novel possibility for gas discharge based short-wavelength radiation sources with high average radiation output in quasi-continuous discharge operation by which efficient cooling principles can be implemented using inexpensive and simple means in order to prevent a temporary melting of the electrode surfaces and, therefore, to ensure a long lifetime of the electrodes. According to the invention, this object is met in that special cooling channels for circulating coolant are integrated in electrode collars of the electrode housings. The cooling channels are advanced radially up to within a few millimeters of the highly thermally stressed surface regions and are connected by necked-down channel portions which are arranged coaxial to the axis of symmetry and which are provided with channel structures for increasing the inner surface and for increasing the flow rate of the coolant.

摘要翻译： 本发明涉及一种用于产生基于由气体放电产生的热等离子体的短波长辐射的装置以及用于制造承载冷却剂的电极壳体的方法。 本发明的目的是在准连续放电操作中找到具有高平均辐射输出的基于气体放电的短波长辐射源的新颖可能性，通过该方法可以使用廉价和简单的方法来实现有效的冷却原理，以便防止 暂时熔化电极表面，因此确保电极寿命长。 根据本发明，由于用于循环冷却剂的特殊冷却通道集成在电极壳体的电极环中，所以满足了该目的。 冷却通道从高度受热应力的表面区域径向推进到几毫米以内，并且通过与对称轴线同轴设置的颈缩通道部分连接，并且设置有用于增加内表面的通道结构， 以增加冷却剂的流量。

公开(公告)号：US06815900B2

公开(公告)日：2004-11-09

申请号：US10741882

申请日：2003-12-19

申请人： Imtiaz Ahmad ,  Juergen Kleinschmidt ,  Guido Schriever ,  Uwe Stamm ,  Sven Goetze

发明人： Imtiaz Ahmad ,  Juergen Kleinschmidt ,  Guido Schriever ,  Uwe Stamm ,  Sven Goetze

IPC分类号： H05H100

CPC分类号： H05G2/003

摘要： The invention is directed to a radiation source for generating extreme ultraviolet (EUV) radiation based on a hot, dense plasma generated by gas discharge. The object of the invention, to find a novel possibility for the realization of an EUV radiation source which achieves a high average radiation output in the EUV region and sufficiently long life and long-term stability, is met according to the invention in that a first electrode housing and a second electrode housing which are electrically separated from one another so as to be resistant to breakdown form parts of a vacuum chamber for a gas discharge for plasma generation, and the second electrode housing has an electrode collar which is enclosed concentrically by the first electrode housing so that the gas discharge is oriented substantially only parallel to the axis of symmetry of the electrode housings, and the electrode collar is stepped radially relative to the concentric insulator layer in such a way that at least one end region of the electrode collar is at a distance from the concentric insulator layer such that a concentric gap is formed. A substantially longer operating duration is achieved by the optimized electrode geometry in conjunction with material selection and effective heat dissipation.

摘要翻译： 本发明涉及一种用于基于由气体放电产生的热的致密等离子体产生极紫外（EUV）辐射的辐射源。 本发明的目的是为了发现实现EUV辐射源的新型可能性，其实现了EUV区域中的高平均辐射输出并且具有足够长的寿命和长期稳定性，根据本发明，满足第一 电极壳体和第二电极壳体，其彼此电分离，以便抵抗用于等离子体产生的气体放电的真空室的部件的分解，并且第二电极壳体具有电极套环，该电极套筒同心地包围 第一电极壳体，使得气体放电基本上仅平行于电极壳体的对称轴线定向，并且电极套环相对于同心绝缘体层级径向地延伸，使得电极套环的至少一个端部区域 距离同心绝缘体层一定距离，从而形成同心间隙。 通过优化的电极几何结构与材料选择和有效散热来实现更长的操作持续时间。