公开(公告)号：US20100231928A1

公开(公告)日：2010-09-16

申请号：US12704946

申请日：2010-02-12

申请人： Yasuaki TANAKA ,  Satoru Sanada

发明人： Yasuaki TANAKA ,  Satoru Sanada

IPC分类号： G01B11/14 ,  G03B27/58

CPC分类号： H01L21/67092 ,  H01L21/68 ,  H01L21/681 ,  H01L23/544 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2223/54493 ,  H01L2924/0002 ,  H01L2924/00

摘要： The throughput of the alignment in an alignment apparatus is improved. There is provided an alignment apparatus for aligning a substrate having an alignment mark, including a first aligner that aligns the substrate to a first reference position, a second aligner that aligns a substrate holder to a second reference position before the substrate holder holds the substrate, and a position detector that detects a position of the alignment mark of the substrate after the substrate holder holds the substrate.

摘要翻译： 提高了对准装置中的对准的生产量。 提供了一种对准装置，用于对准具有对准标记的基板，该基板包括将基板对准第一基准位置的第一对准器，在基板保持器保持基板之前将基板保持器对准第二基准位置的第二对准器， 以及位置检测器，其在所述基板保持器保持所述基板之后检测所述基板的对准标记的位置。

公开(公告)号：US20110288674A1

公开(公告)日：2011-11-24

申请号：US13112719

申请日：2011-05-20

申请人： Isao Sugaya ,  Satoru Sanada ,  Hidehiro Maeda ,  Masahiro Yoshihashi ,  Mikio Ushijima

发明人： Isao Sugaya ,  Satoru Sanada ,  Hidehiro Maeda ,  Masahiro Yoshihashi ,  Mikio Ushijima

IPC分类号： G06F17/00 ,  B23Q7/00 ,  B23Q3/00

CPC分类号： H01L21/67092 ,  H01L21/67276 ,  H01L21/67294 ,  Y10T29/49998

摘要： Management of the holding member that holds the semiconductor substrate is efficiently implemented. Provided is a holding member management apparatus that manages a substrate holding member that holds a semiconductor substrate in a manufacturing apparatus that manufactures a stacked semiconductor apparatus by joining a plurality of semiconductor substrates; comprising a history storing part that stores the usage history of the substrate holding member in association with identification information that specifies the substrate holding member and a holding member specifying part that specifies and outputs identification information of the substrate holding member whose usage is to be suspended based on the usage history stored in the history storing part.

摘要翻译： 有效地实施保持半导体基板的保持构件的管理。 提供一种保持构件管理装置，其通过接合多个半导体衬底来管理在制造半导体装置的制造装置中保持半导体衬底的衬底保持构件; 包括历史存储部分，其与用于指定基板保持部件的识别信息相关联地存储基板保持部件的使用历史;以及保持部件指定部，其指定并输出其使用被暂停的基板保持部件的识别信息 关于存储在历史存储部分中的使用历史。

公开(公告)号：US5761160A

公开(公告)日：1998-06-02

申请号：US606818

申请日：1996-02-26

申请人： Satoru Sanada

发明人： Satoru Sanada

IPC分类号： G11B7/00 ,  G11B7/005 ,  G11B7/007 ,  G11B7/14 ,  G11B20/12 ,  G11B27/00 ,  G11B27/30 ,  G11B17/22

CPC分类号： G11B20/1217 ,  G11B27/002 ,  G11B27/3027 ,  G11B7/14 ,  G11B2020/10916

摘要： An optical disk playback and recording device has a control unit which alternately allocates sequential logical addresses between single or multiple continuous sectors on each side of a two-sided optical disk with disk regions divided into tracks having sectors. The device also has first and second playback and recording heads, one disposed on each side of the disk, playing back data from or recording data to sectors identified by the logical addresses of data for playback or recording. Such a device achieves increased data transmission speeds by allowing access to data occupying alternately located sectors on each side of the optical disk by both the first and second heads. The control unit also controls access to such an optical disk. Where the optical disk playback and recording device has a higher playback and recording frequency for tracks located toward the periphery of the disk, the device can achieve both uniform and increased data transmission speeds. The device has a control unit alternately allocating sequential logical addresses to a varying number of continuous sectors between sectors in tracks located toward the center of one side of the disk and sectors in tracks located toward the periphery of the other side of the disk. The control unit also controls access to such an optical disk.

摘要翻译： 光盘播放和记录装置具有控制单元，该控制单元在双面光盘的每一侧上的单个或多个连续扇区之间交替地分配顺序逻辑地址，其中盘区被划分成具有扇区的轨道。 该设备还具有第一和第二播放和记录头，一个设置在盘的每一侧，从数据的逻辑地址识别的扇区回放数据或将数据记录到用于回放或记录的逻辑地址。 这种装置通过允许通过第一和第二磁头访问占据光盘两侧的交替定位的扇区的数据来实现增加的数据传输速度。 控制单元还控制对这种光盘的访问。 在光盘回放和记录装置对于朝向盘的周边的轨道具有更高的回放和记录频率的情况下，该装置可以实现均匀和增加的数据传输速度。 该装置具有控制单元，其交替地将顺序逻辑地址分配给位于盘的一侧的中心的轨道中的不同数量的连续扇区，以及位于盘的另一侧周边的轨道中的扇区。 控制单元还控制对这种光盘的访问。

公开(公告)号：US5010537A

公开(公告)日：1991-04-23

申请号：US222036

申请日：1988-07-21

申请人： Hiroya Ohkuma ,  Satoru Sanada

发明人： Hiroya Ohkuma ,  Satoru Sanada

IPC分类号： G11B7/085 ,  G11B7/09

CPC分类号： G11B7/09 ,  G11B7/085

摘要： In an optical disc device, a plurality of heads provided with actuator means for inclining the direction of application of a beam applied to the surface of a disc within a predetermined range are secured onto a slider movable in the radial direction of the disc, and provision is made of detecting means for detecting the positions or the tracking errors of the beams of the plurality of heads, and slider control means for position-controlling the slider on the basis of the detection signal of the detecting means so that the directions of application of the beam spots by the actuator means are in a predetermined relation.

摘要翻译： 在光盘装置中，设置有用于将施加到盘表面上的光束的施加方向倾斜到预定范围内的致动器装置的多个头部被固定在可沿盘的径向方向移动的滑块上， 由用于检测多个头部的光束的位置或跟踪误差的检测装置以及用于根据检测装置的检测信号对滑块进行位置控制的滑块控制装置，使得应用方向 通过致动器装置的束斑处于预定关系。

公开(公告)号：US5617394A

公开(公告)日：1997-04-01

申请号：US413894

申请日：1995-03-30

申请人： Satoru Sanada

发明人： Satoru Sanada

IPC分类号： G11B20/10 ,  G11B7/004 ,  G11B20/12 ,  G11B20/18 ,  G11B7/00

CPC分类号： G11B20/1258 ,  G11B20/1879 ,  G11B2020/10916 ,  G11B7/004

摘要： A data recording method adapted for recording data on an optical disk having multiple tracks addressed as sectors on its recording surface. The method includes, setting the number of sectors to be recorded on a track based the position of the track on the optical disk and recording data on the track based on the number of sectors to be recorded as set during the setting step. Also provided is an optical disk recording method adapted for recording data on an optical disk having spiral shaped multiple tracks addressed as sectors on its recording surface and the number of sectors per track of the multiple tracks depending on the radial position of the track relative to a center position of the optical disk. The method includes initializing at least one sector writing data onto the initialized sectors and verifying the written sectors. Also provided is an optical disk recording device that includes an optical disk drive device recording data in relation to an optical disk having multiple tracks addressed as sectors, a memory unit storing the data to be recorded on the optical disk, a recording control unit reading and outputting to the optical disk drive device, memory unit, and a setting circuit changing a specified amount of data depending on the radial position on the optical disk onto which the data is to be recorded. Finally, an optical disk recording device is provided which includes an optical disk drive device recording data in relation to an optical disk, a memory unit storing data to be recorded on the optical disk, a recording control circuit controlling the optical disk drive device, by initializing the specified number of sectors to be recorded on the optical disk, reading the data in an amount equivalent to the specified number of sectors among the sectors stored in the memory unit, writing that data onto the sectors that have been initialized and verifying the written sectors. Also, a setting circuit sets the specified number of sectors to be processed by a single recording operation.