公开(公告)号：US5170217A

公开(公告)日：1992-12-08

申请号：US875592

申请日：1992-04-28

申请人： Yoshifumi Nishimoto ,  Masaru Ohtsuka ,  Satoshi Haya

发明人： Yoshifumi Nishimoto ,  Masaru Ohtsuka ,  Satoshi Haya

IPC分类号： G01B9/02

CPC分类号： G01B9/02056 ,  G01B2290/35 ,  G01B2290/40 ,  G01B2290/70

摘要： An object measuring apparatus uses lightwave interference by coherent beams. A single light beam having two lightwave components with a phase difference that changes in time is divided so that one lightwave component is applied to the object and the other lightwave component is applied to a reference surface. The lightwave components for the object and the reference surface are interfered with each other and a change in the interference light is detected.

摘要翻译： 物体测量装置使用相干光束的光波干涉。 将具有时间变化的相位差的具有两个光波分量的单个光束分割，使得一个光波分量被施加到物体，另一个光波分量被施加到参考表面。 物体和参考面的光波分量彼此干涉，并检测干涉光的变化。