公开(公告)号：US08159118B2

公开(公告)日：2012-04-17

申请号：US11266032

申请日：2005-11-02

Applicant: Viktor A. Tymashov ,  Oleg L. Zhdanov ,  Sergiy I. Ryabenko ,  Andriy A. Tsepkalov ,  Steven M. Burns

Inventor： Viktor A. Tymashov ,  Oleg L. Zhdanov ,  Sergiy I. Ryabenko ,  Andriy A. Tsepkalov ,  Steven M. Burns

IPC: H01J37/00 ,  H05H1/00

CPC classification number: H01J37/3053 ,  H01J3/02 ,  H01J3/027 ,  H01J37/065 ,  H01J2237/06308 ,  H01J2237/14 ,  H01J2237/15 ,  H01J2237/3132

Abstract: An electron gun includes the following: a primary thermionic electron source, a secondary thermionic electron source and a focusing electrode disposed within a first housing that includes one or more reference members adjustably attached to a housing support connected to a first platform; an anode and one or more focusing coils disposed within a second housing comprising one or more insulating members adjustably connected to the first platform; and one or more deflection coils disposed within a third housing connected to the second housing and located opposite said first housing.

Abstract translation: 电子枪包括以下：初级热离子电子源，二次热离子电子源和聚焦电极，其设置在第一壳体内，该第一壳体包括一个或多个可调节地连接到连接到第一平台的壳体支撑件的参考构件; 阳极和设置在第二壳体内的一个或多个聚焦线圈，包括可调节地连接到第一平台的一个或多个绝缘构件; 以及设置在连接到第二壳体并且与第一壳体相对定位的第三壳体内的一个或多个偏转线圈。

公开(公告)号：US20100263590A1

公开(公告)日：2010-10-21

申请号：US12628567

申请日：2009-12-01

Applicant: Volodymyr V. Kirushko ,  James W. Neal ,  Sergiy I. Ryabenko

Inventor： Volodymyr V. Kirushko ,  James W. Neal ,  Sergiy I. Ryabenko

IPC: H05B37/02 ,  B05C11/00

CPC classification number: H01J37/3053 ,  H01J37/304

Abstract: Systems and methods are described that monitor electron beam current and voltage. The systems and methods react to fault conditions such as arcing experienced during evaporation and deposition processes to shutdown and protect associated power supply equipment. The systems and methods may provide online beam current control to provide stable operation of e-beam guns during heating and melting modes of operation.

Abstract translation: 描述了监测电子束电流和电压的系统和方法。 系统和方法对故障条件做出反应，例如在蒸发和沉积过程中经历的电弧，以关闭和保护相关的电源设备。 系统和方法可以提供在线射束电流控制，以在加热和熔化操作模式期间提供电子束枪的稳定操作。