Method for increasing breaking down voltage of lateral diffused metal oxide semiconductor transistor
    1.
    发明授权
    Method for increasing breaking down voltage of lateral diffused metal oxide semiconductor transistor 有权
    增加横向扩散金属氧化物半导体晶体管分解电压的方法

    公开(公告)号:US07821082B1

    公开(公告)日:2010-10-26

    申请号:US12431571

    申请日:2009-04-28

    IPC分类号: H01L29/66

    摘要: A lateral diffused metal oxide semiconductor transistor is disclosed. A p-type bulk is disposed on a substrate. An n-type well region is disposed in the p-type bulk. A plurality of field oxide layers are disposed on the p-type bulk and the n-type well region. A gate structure is disposed on a portion of the p-type bulk and one of the plurality of field oxide layers. At least one deep trench isolation structure is disposed in the p-type bulk and adjacent to the n-type well region.

    摘要翻译: 公开了横向扩散的金属氧化物半导体晶体管。 p型块体设置在基板上。 n型阱区设置在p型体中。 在p型体和n型阱区上设置多个场氧化物层。 栅极结构设置在p型体的一部分和多个场氧化物层中的一个上。 至少一个深沟槽隔离结构设置在p型体中并与n型阱区相邻。