公开(公告)号：US4392054A

公开(公告)日：1983-07-05

申请号：US254523

申请日：1981-04-15

申请人： Takeshi Sato ,  Shunichi Suzaki

发明人： Takeshi Sato ,  Shunichi Suzaki

IPC分类号： H01J37/153 ,  H01J37/21 ,  G21K1/08

CPC分类号： H01J37/153

摘要： In a scanning electron microscope, astigmatism in an electron lens system is compensated for by an XY type stigmator equipped with two quadrupole lenses and their manually controlled direct current supplies. During the operation of astigmatism compensation, the supplemental current components are added stepwise to the output currents of said direct current supplies in synchronism with beam scanning in the microscope, so that the scanning image displayed in the microscope is divided into areas where astigmatism compensation is different. The operator of the microscope may accord the most sharp divided area with the center area of the scanning image by adjusting said direct current supplies, so that the output values of the direct current supplies become oprimum for astigmatism compensation.

摘要翻译： 在扫描电子显微镜中，电子透镜系统中的散光由配备有两个四极透镜的XY型标示器及其手动控制的直流电源补偿。 在散光补偿操作期间，补充电流分量与显微镜中的光束扫描同步地与所述直流电源的输出电流逐步相加，使得显微镜中显示的扫描图像被划分为散光补偿不同的区域 。 通过调整所述直流电源，显微镜的操作者可以将扫描图像的中心区域与最清晰的分割区域相一致，使得直流电源的输出值成为散光补偿的最佳值。