公开(公告)号：US06394025B1

公开(公告)日：2002-05-28

申请号：US09027774

申请日：1998-02-23

申请人： Toshiyuki Sakemi ,  Masaru Tanaka ,  Shunji Wada ,  Etsuo Ogino

发明人： Toshiyuki Sakemi ,  Masaru Tanaka ,  Shunji Wada ,  Etsuo Ogino

IPC分类号： C23C1600

CPC分类号： H01J37/32422 ,  H01J37/3266

摘要： A correction mechanism including a magnetic body (51) is placed at a position between a vacuum chamber (21) and a steering coil (23) and where line of magnetic force generated from the steering coil is present, to correct torsion and/or bias of a plasma beam.

摘要翻译： 包括磁体（51）的校正机构被放置在真空室（21）和转向线圈（23）之间的位置处，并且存在从转向线圈产生的磁力线，以校正扭转和/或偏压 的等离子体束。

公开(公告)号：US06787989B2

公开(公告)日：2004-09-07

申请号：US09820385

申请日：2001-03-29

申请人： Shunji Wada ,  Yukihiro Kato

发明人： Shunji Wada ,  Yukihiro Kato

IPC分类号： H05B3300

CPC分类号： H01L51/0021 ,  Y10T428/163

摘要： A substrate with a transparent condcutive film is provided, which has a high work function and an excellent surface smoothness as well as a reduced specific resistance to thereby ensure a reduced power consumption and enhanced display quality. An ITO film 2 is formed on a glass substrate 1 by an ion plating method by using an ITO sintered compact with an SnO2 content of 4 to 6 wt %. The ITO film 2 obtained as above has a surface having a work function of 4.9 to 5.5 eV, a surface roughness of 1 to 10 nm, and a specific resistance of 1.6×10−4 &OHgr;·cm or less. An organic EL device using the substrate is provided, in which an organic multilayer film (hole transport layer 5, light-emitting layer 7, and electron transport layer 6) is laminated on the surface of the ITO film 2, and further a metal thin film layer 4 is laminated on the surface of the organic multilayer film.

摘要翻译： 提供具有透明的保护膜的基板，其具有高功函数和优异的表面平滑度以及降低的电阻率，从而确保降低的功耗和增强的显示质量。 通过使用SnO 2含量为4〜6重量％的ITO烧结体，通过离子镀法在玻璃基板1上形成ITO膜2。 如上获得的ITO膜2具有功函数为4.9〜5.5eV，表面粗糙度为1〜10nm，电阻率为1.6×10 -4Ω·cm以下的表面。 提供了一种使用该基板的有机EL器件，其中在ITO膜2的表面上层叠有机多层膜（空穴传输层5，发光层7和电子传输层6），并且还具有金属薄膜 膜层4层叠在有机多层膜的表面上。