公开(公告)号：US08793898B2

公开(公告)日：2014-08-05

申请号：US12600550

申请日：2008-05-22

Applicant: Young-Ju Jeong ,  Bok-Kyu Lee ,  Sun-Kyu Hwang ,  Jeong-Yong Bae ,  Soo-Bin Yong

Inventor： Young-Ju Jeong ,  Bok-Kyu Lee ,  Sun-Kyu Hwang ,  Jeong-Yong Bae ,  Soo-Bin Yong

IPC: F26B3/00

CPC classification number: F26B21/14 ,  F26B3/00 ,  H01L21/02057 ,  H01L21/67034 ,  H01L21/67051

Abstract: A method for drying substrates using isopropyl alcohol (IPA) includes: a pre-stage in which heated fluid is injected to a bottom surface of a substrate to raise a temperature of the substrate simultaneously to injection of an organic solvent to a top surface of the substrate and injection of a dry gas to the top surface thereof to improve a vaporization power of the organic solvent; and a final stage in which the injection of the heated fluid is stopped and the organic solvent and the dry gas are injected to the top surface of the substrate.

Abstract translation: 使用异丙醇（IPA）干燥基材的方法包括：将加热的流体注入基材的底表面的前期，同时提高基材的温度，以将有机溶剂注入到 将干燥气体的基材和其上表面注入，以提高有机溶剂的蒸发能力; 并且终止加热流体的注入并将有机溶剂和干燥气体注入到基板的顶表面的最后阶段。

公开(公告)号：US20130074359A1

公开(公告)日：2013-03-28

申请号：US13586250

申请日：2012-11-02

Applicant: Young-Ju JEONG ,  Bok-Kyu LEE ,  Sun-Kyu HWANG ,  Jeong-Yong BAE ,  Soo-Bin YONG

Inventor： Young-Ju JEONG ,  Bok-Kyu LEE ,  Sun-Kyu HWANG ,  Jeong-Yong BAE ,  Soo-Bin YONG

IPC: F26B3/00

CPC classification number: F26B21/14 ,  F26B3/00 ,  H01L21/02057 ,  H01L21/67034 ,  H01L21/67051

Abstract: A method for drying substrates using isopropyl alcohol (IPA) includes: a pre-stage in which heated fluid is injected to a bottom surface of a substrate to raise a temperature of the substrate simultaneously to injection of an organic solvent to a top surface of the substrate and injection of a dry gas to the top surface thereof to improve a vaporization power of the organic solvent; and a final stage in which the injection of the heated fluid is stopped and the organic solvent and the dry gas are injected to the top surface of the substrate.

Abstract translation: 使用异丙醇（IPA）干燥基材的方法包括：将加热的流体注入基材的底表面的前期，同时提高基材的温度，以将有机溶剂注入到 将干燥气体的基材和其上表面注入，以提高有机溶剂的蒸发能力; 并且终止加热流体的注入并将有机溶剂和干燥气体注入到基板的顶表面的最后阶段。

公开(公告)号：US20100146813A1

公开(公告)日：2010-06-17

申请号：US12600550

申请日：2008-05-22

Applicant: Young-Ju Jeong ,  Bok-Kyu Lee ,  Sun-Kyu Hwang ,  Jeong-Yong Bae ,  Soo-Bin Yong

Inventor： Young-Ju Jeong ,  Bok-Kyu Lee ,  Sun-Kyu Hwang ,  Jeong-Yong Bae ,  Soo-Bin Yong

IPC: F26B3/32 ,  F26B19/00

CPC classification number: F26B21/14 ,  F26B3/00 ,  H01L21/02057 ,  H01L21/67034 ,  H01L21/67051

Abstract: A method for drying substrates using isopropyl alcohol (IPA) includes: a pre-stage in which heated fluid is injected to a bottom surface of a substrate to raise a temperature of the substrate simultaneously to injection of an organic solvent to a top surface of the substrate and injection of a dry gas to the top surface thereof to improve a vaporization power of the organic solvent; and a final stage in which the injection of the heated fluid is stopped and the organic solvent and the dry gas are injected to the top surface of the substrate.

Abstract translation: 使用异丙醇（IPA）干燥基材的方法包括：将加热的流体注入基材的底表面的前期，同时提高基材的温度，以将有机溶剂注入到 将干燥气体的基材和其上表面注入，以提高有机溶剂的蒸发能力; 并且终止加热流体的注入并将有机溶剂和干燥气体注入到基板的顶表面的最后阶段。