公开(公告)号：US20100053891A1

公开(公告)日：2010-03-04

申请号：US12198267

申请日：2008-08-26

申请人： Mehmet Arik ,  Stanto Earl Weaver

发明人： Mehmet Arik ,  Stanto Earl Weaver

IPC分类号： H05K7/20 ,  H02N2/00 ,  H01L21/00

CPC分类号： B81B7/0093 ,  B81B2201/036 ,  B81B2201/058 ,  B81B2203/0127 ,  B81C1/00158 ,  F04B45/047 ,  H01L23/467 ,  H01L41/0973 ,  H01L2924/0002 ,  H01L2924/00

摘要： A micro-electromechanical (MEM) synthetic jet actuator includes a semiconductor substrate having a cavity extending therethrough, such that a first opening is formed in a first surface of the semiconductor substrate and such that a second opening is formed in a second surface of the semiconductor substrate. A first flexible membrane is formed on at least a portion of the front surface of the semiconductor substrate and extends over the first opening. The first flexible membrane also includes an orifice formed therein aligned with the first opening. The MEM synthetic jet actuator also includes a second flexible membrane that is formed on at least a portion of the second surface of the semiconductor substrate and that extends over the second opening, and a pair of actuator elements coupled to the flexible membranes and aligned with the cavity to selectively cause displacement of the first and second flexible membranes.

摘要翻译： 微机电（MEM）合成射流致动器包括具有延伸穿过其中的空腔的半导体衬底，使得第一开口形成在半导体衬底的第一表面中，并且第二开口形成在半导体的第二表面中 基质。 第一柔性膜形成在半导体衬底的前表面的至少一部分上并在第一开口上延伸。 第一柔性膜还包括与第一开口对准的孔口。 MEM合成射流致动器还包括第二柔性膜，其形成在半导体衬底的第二表面的至少一部分上并且在第二开口上延伸，以及一对致动器元件，其耦合到柔性膜并与 以选择性地引起第一和第二柔性膜的位移。