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    System and method for improving data acquisition capability in spectroscopic rotatable element, rotating element, modulation element, and other ellipsometer and polarimeter and the like systems
    1.
    发明授权
    System and method for improving data acquisition capability in spectroscopic rotatable element, rotating element, modulation element, and other ellipsometer and polarimeter and the like systems 失效

    公开(公告)号：US5956145A

    公开(公告)日：1999-09-21

    申请号：US17423

    申请日：1998-02-02

    申请人： Steven E. Green ,  Craig M. Herzinger ,  Blaine D. Johs ,  John A. Woollam ,  Stephen P. Ducharme

    发明人： Steven E. Green ,  Craig M. Herzinger ,  Blaine D. Johs ,  John A. Woollam ,  Stephen P. Ducharme

    IPC分类号： G01J3/28 ,  G01J4/00 ,  G01N21/21

    CPC分类号： G01N21/211 ,  G01J4/00 ,  G01J2003/2866

    摘要： Disclosed is a system and method for controlling polarization state determining parameters of a polarized beam of light in an ellipsometer or polarimeter and the like system, (eg. a modulation element ellipsometer system), so that they are in ranges wherein the sensitivity, (of a sample system characterizing PSI and DELTA value monitoring detector used to measure changes in said polarization state resulting from interaction with a "composite sample system," comprised of a sample system per se. and a beam polarization state determining variable retarder, to noise and measurement errors etc. therein), is reduced. The present invention allows determining sample system per se. characterizing PSI and DELTA values, from Composite Sample System characterizing PSI and DELTA values, by compensating for the presence of present invention components, (VR1) and/or VR2), added to an ellipsometer or polarimeter and the like system. The present invention also improves the ability of an ellipsometer or polarimeter and the like system fitted with present invention components (VR1) and/or (VR2) to provide usably accurate and precise sample system characterizing PSI and DELTA determining data values, wherein a sample system per se. investigating polarized beam of light is oriented at other than a Principal or Brewster Angle of Incidence thereto, the use of which Angle of Incidence would otherwise be difficult, if not impossible. Practice of the present invention also allows determination of the "Handedness" of a polarized beam of light, and of sample system Jones or Mueller Matrix component values. As well, the present invention provides means for making system components (VR1) and/or (VR2) added to an ellipsometer or polarimeter and the like system, essentially end user transparent when desired, without removal thereof from said ellipsometer or polarimeter system.

    Small modulation ellipsometry
    4.
    发明授权
    Small modulation ellipsometry 失效
    小调制椭偏仪

    公开(公告)号：US5416588A

    公开(公告)日：1995-05-16

    申请号：US284284

    申请日：1994-08-02

    申请人： Stephen P. Ducharme ,  Hassanayn M. El Hajj ,  Blaine D. Johs ,  John A. Woollam

    发明人： Stephen P. Ducharme ,  Hassanayn M. El Hajj ,  Blaine D. Johs ,  John A. Woollam

    IPC分类号： G01N21/21

    CPC分类号： G01N21/211

    摘要： In an ellipsometer, a phase-modulated, polarized light beam is applied to a sample, electrical signals are obtained representing the orthogonal planes of polarization of the light after it has interacted with the sample and the constants of the sample are calculated from the two resulting electrical signals. The phase modulation is sufficiently small so that the calibration errors are negligible. For this purpose, the phase modulator phase modulates the light within a range of no more than ten degrees modulations peak to peak. The two electrical signals are expanded by Fourier analysis and the coefficients thereof utilized to calculate psi and delta.

    摘要翻译： 在椭偏仪中，将相位调制的偏振光束施加到样本，获得的电信号表示在与样本相互作用后光的​​偏振的正交平面，并且由所得到的两者计算样本的常数 电信号。 相位调制足够小，使得校准误差可以忽略不计。 为此，相位调制器相位调制光在不超过十度调制峰到峰的范围内。 两个电信号通过傅里叶分析扩展，其系数用于计算psi和delta。