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    System and method for improving data acquisition capability in spectroscopic rotatable element, rotating element, modulation element, and other ellipsometer and polarimeter and the like systems
    1.
    发明授权
    System and method for improving data acquisition capability in spectroscopic rotatable element, rotating element, modulation element, and other ellipsometer and polarimeter and the like systems 失效

    公开(公告)号：US5956145A

    公开(公告)日：1999-09-21

    申请号：US17423

    申请日：1998-02-02

    申请人： Steven E. Green ,  Craig M. Herzinger ,  Blaine D. Johs ,  John A. Woollam ,  Stephen P. Ducharme

    发明人： Steven E. Green ,  Craig M. Herzinger ,  Blaine D. Johs ,  John A. Woollam ,  Stephen P. Ducharme

    IPC分类号： G01J3/28 ,  G01J4/00 ,  G01N21/21

    CPC分类号： G01N21/211 ,  G01J4/00 ,  G01J2003/2866

    摘要： Disclosed is a system and method for controlling polarization state determining parameters of a polarized beam of light in an ellipsometer or polarimeter and the like system, (eg. a modulation element ellipsometer system), so that they are in ranges wherein the sensitivity, (of a sample system characterizing PSI and DELTA value monitoring detector used to measure changes in said polarization state resulting from interaction with a "composite sample system," comprised of a sample system per se. and a beam polarization state determining variable retarder, to noise and measurement errors etc. therein), is reduced. The present invention allows determining sample system per se. characterizing PSI and DELTA values, from Composite Sample System characterizing PSI and DELTA values, by compensating for the presence of present invention components, (VR1) and/or VR2), added to an ellipsometer or polarimeter and the like system. The present invention also improves the ability of an ellipsometer or polarimeter and the like system fitted with present invention components (VR1) and/or (VR2) to provide usably accurate and precise sample system characterizing PSI and DELTA determining data values, wherein a sample system per se. investigating polarized beam of light is oriented at other than a Principal or Brewster Angle of Incidence thereto, the use of which Angle of Incidence would otherwise be difficult, if not impossible. Practice of the present invention also allows determination of the "Handedness" of a polarized beam of light, and of sample system Jones or Mueller Matrix component values. As well, the present invention provides means for making system components (VR1) and/or (VR2) added to an ellipsometer or polarimeter and the like system, essentially end user transparent when desired, without removal thereof from said ellipsometer or polarimeter system.

    System and method for improving data acquisition capability in spectroscopic ellipsometers
    3.
    发明授权
    System and method for improving data acquisition capability in spectroscopic ellipsometers 失效
    用于提高光谱椭偏仪数据采集能力的系统和方法

    公开(公告)号：US5757494A

    公开(公告)日：1998-05-26

    申请号：US422346

    申请日：1995-04-14

    申请人： Steven E. Green ,  Craig M. Herzinger ,  Blaine D. Johs ,  John A. Woollam

    发明人： Steven E. Green ,  Craig M. Herzinger ,  Blaine D. Johs ,  John A. Woollam

    IPC分类号： C23C14/54 ,  G01J3/447 ,  G01J4/00 ,  G01N21/21 ,  G01N23/20

    CPC分类号： C23C14/54 ,  G01J3/447 ,  G01J4/00 ,  G01N21/211 ,  G01N23/20058

    摘要： The present invention is applicable generally to Spectroscopic Rotatable and Rotating Element Ellipsometers which utilize a relatively large range of wavelengths. Disclosed is a system and method for controlling the polarization state of a polarized beam of light so that it is in a range where the sensitivity of a Polarization State Detector used to measure changes in said polarized beam of light resulting from interaction with a Sample System, to noise and measurement errors etc., is reduced. Exemplified is a system, and method of use, for simultaneously setting both measured ellipsometric ALPHA, and ellipsometric BETA parameter values, (or equivalents), within ranges, in which ranges the sensitivity of transfer functions, and mathematical regressions which utilize said ellipsometric ALPHA and ellipsometric BETA values in the calculation of sample system characterizing PSI and DELTA constant values, to noise and errors in measurement etc., is found to be negligible. The present invention allows obtaining accurate and precise sample system PSI and DELTA Values from an Ellipsometer System in which a polarized beam of light is oriented at other than a Principal of Brewster Angle of Incidence to a sample system, allows determination of DELTA values in ranges otherwise not impossible, allows determination of the "Handedness" of a polarized beam of light, and provides means for determining all of Stokes Vector and Mueller Matrix component values. The present invention also provides means for making all system components added to a conventional ellipsometer system essentially end user transparent when desired, without removal thereof from said ellipsometer system.

    摘要翻译： 本发明一般适用于使用相对较大波长范围的光谱可旋转和旋转元件椭偏仪。 公开了一种用于控制偏振光束的偏振状态的系统和方法，使得其处于用于测量由与样品系统相互作用产生的所述偏振光束的变化的极化状态检测器的灵敏度， 降噪，测量误差等。 举例说明的是一种系统和使用方法，用于在范围内同时设置测量的椭圆偏振ALPHA和椭圆偏振BETA参数值（或等价物），其范围内的传递函数的灵敏度和使用所述椭圆偏振ALPHA的数学回归和 发现表征PSI和DELTA常数值的样本系统的计算中的椭偏测量值BETA值，测量噪声和误差等都是可忽略的。 本发明允许从椭圆偏振仪系统获得精确和精确的样本系统PSI和DELTA值，其中偏振光束定向在除了布鲁斯特发生角度的主体之外的样本系统，允许以其它方式确定范围的DELTA值 不是不可能的，允许确定偏振光束的“携带”，并且提供用于确定所有斯托克斯矢量和米勒矩阵分量值的装置。 本发明还提供了用于使得添加到常规椭偏仪系统的所有系统部件基本上使终端用户在需要时不透明的装置，而不从所述椭偏仪系统中移除。