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公开(公告)号：US06730256B1
公开(公告)日：2004-05-04
申请号：US09923164
申请日：2001-08-06
IPC分类号： B29C3508
CPC分类号： G03F7/70416 , B29C64/40 , B29C71/0009 , B29C2035/0838 , B29C2791/005 , B29K2105/0073 , B29K2995/0073 , B29K2995/0092 , B33Y10/00 , G03F7/0037
摘要： Methods for the preparation of multilayered resists include exposure of the a first layer to radiation followed by exposure to an oxidizing agent. The oxidizing agent alters the surface characteristics of the first resist layer such that it is rendered more hydrophilic than the original resist layer. A second layer of resist is then applied to the oxidized surface of the first resist layer and exposed to radiation. This process can be repeated for thousands of coating layers, thereby permitting stereolithographic patterning of parts and construction of micromachines. A final treatment with a dissolution solution will dissolve unwanted resist material. Dependent upon the type of resist material used in the multilayered resist, the dissolution solution can remove the radiation exposed areas, e.g., a positive resist, or remove unexposed areas, e.g., a negative resist.
摘要翻译： 制备多层抗蚀剂的方法包括将第一层暴露于辐射，然后暴露于氧化剂。 氧化剂改变第一抗蚀剂层的表面特性，使其比原始抗蚀剂层变得更亲水。 然后将第二层抗蚀剂施加到第一抗蚀剂层的氧化表面并暴露于辐射。 该过程可以重复数千个涂层，从而允许部件的立体光刻图案和微机械的构造。 用溶解溶液的最终处理将溶解不需要的抗蚀剂材料。 取决于在多层抗蚀剂中使用的抗蚀剂材料的类型，溶解溶液可以去除辐射暴露区域，例如正性抗蚀剂，或去除未曝光的区域，例如负性抗蚀剂。
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公开(公告)号：US20120186352A1
公开(公告)日：2012-07-26
申请号：US13010333
申请日：2011-01-20
IPC分类号： G01H9/00
CPC分类号： G01N21/1702 , G01N33/22 , G01N33/227
摘要： A kit for detecting the presence of an explosive includes a pulsed focused energy source located at a target distance away from a substrate, the energy having a magnitude sufficient to release the internal energy of an explosive if present on the substrate and thereby generate an acoustic wave. The kit also includes a detector adapted to detect the acoustic wave at a detection distance away from the substrate.
摘要翻译： 用于检测爆炸物存在的试剂盒包括位于远离基底的目标距离的脉冲聚焦能量源，该能量具有足以释放爆炸物的内部能量的量值，如果存在于基底上，从而产生声波 。 该试剂盒还包括一个检测器，适用于检测距离基底的检测距离处的声波。
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公开(公告)号：US08935960B2
公开(公告)日：2015-01-20
申请号：US13010333
申请日：2011-01-20
CPC分类号： G01N21/1702 , G01N33/22 , G01N33/227
摘要： A kit for detecting the presence of an explosive includes a pulsed focused energy source located at a target distance away from a substrate, the energy having a magnitude sufficient to release the internal energy of an explosive if present on the substrate and thereby generate an acoustic wave. The kit also includes a detector adapted to detect the acoustic wave at a detection distance away from the substrate.
摘要翻译： 用于检测爆炸物存在的试剂盒包括位于远离基底的目标距离的脉冲聚焦能量源，该能量具有足以释放爆炸物的内部能量的量值，如果存在于基底上，从而产生声波 。 该试剂盒还包括一个检测器，适用于检测距离基底的检测距离处的声波。
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公开(公告)号：US06777170B1
公开(公告)日：2004-08-17
申请号：US09922974
申请日：2001-08-06
IPC分类号： G03F700
CPC分类号： G03F7/00 , B29C64/40 , B29K2995/0073 , G03F7/0037 , G03F7/70416
摘要： Methods for the preparation of multilayered resists are described. A first layer of photoresist is deposited onto a substrate. First portions of the first layer are exposed to a first dose of radiant energy. A second layer of photoresist is deposited at atop the first layer and second portions of the second layer are exposed to a second varied dose of radiant energy. The dose is modulated over different portions of a layer to preferentially enhance development within the interior of the structure to reduce total development times.
摘要翻译： 描述制备多层抗蚀剂的方法。 第一层光致抗蚀剂沉积在基底上。 第一层的第一部分暴露于第一剂量的辐射能。 第二层光致抗蚀剂沉积在第一层的顶部，第二层的第二部分暴露于第二变化量的辐射能。 剂量在层的不同部分进行调节，以优先增强结构内部的发育，以减少总开发时间。
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公开(公告)号：US06833234B1
公开(公告)日：2004-12-21
申请号：US09922973
申请日：2001-08-06
IPC分类号： G03F700
CPC分类号： G03F7/00 , B29C64/40 , B29K2995/0073 , G03F7/0037
摘要： Methods for the preparation of multilayered resists are described. To efficiently pattern large contiguous areas rapidly, a procedure has been developed using spot-size modulation of the focused laser beam to more efficiently pattern interior portions. Critical portions at the perimeter are patterned at high resolutions. The spot-size is progressively increased towards the interior allowing a controlled transition to coarser spot-sizes without impacting the exposure dose in critical portions. Patterning times are significantly reduced since in effect shells are patterned. An algorithm is defined to subdivide a layer into different zones, determine the appropriate focused spot-sizes used for each zone, and define the laser scan trace within a zone to enable efficient patterning of broad areas in positive tone resists.
摘要翻译： 描述制备多层抗蚀剂的方法。 为了有效地模拟大的连续区域，已经开发了使用聚焦激光束的聚焦尺寸调制以更有效地模制内部部分的程序。 周边的临界部分以高分辨率图案化。 斑点尺寸逐渐增加到内部，允许可控过渡到较粗的斑点尺寸，而不影响临界部分中的曝光剂量。 图案化时间显着减少，因为实际上壳被图案化。 定义一种算法来将图层细分为不同的区域，确定用于每个区域的合适的聚焦点尺寸，并在区域内定义激光扫描轨迹，以实现正色调抗蚀剂中广泛区域的有效图案化。
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