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公开(公告)号：US4918930A
公开(公告)日：1990-04-24
申请号：US243707
申请日：1988-09-13
申请人： Peter W. Gaudet , Donald A. Olsen , Michael J. Eacobacci , John T. Harvell , Robert J. Lepofsky , David E. Roche , Steven A. Bender
发明人： Peter W. Gaudet , Donald A. Olsen , Michael J. Eacobacci , John T. Harvell , Robert J. Lepofsky , David E. Roche , Steven A. Bender
CPC分类号： F04D19/04 , F04B37/08 , F04D27/00 , Y10S417/901
摘要： A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.
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公开(公告)号：US5450316A
公开(公告)日：1995-09-12
申请号：US252886
申请日：1994-06-02
CPC分类号： F04D19/04 , F04B37/08 , F04D27/00 , Y10S417/901
摘要： A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.
摘要翻译： 低温真空泵在整体组件中包括与低温泵阵列的第一级和第二级相关联的温度传感器和加热器，粗抽阀和净化阀。 可拆卸地联接在组件中的电子模块响应所有传感器并控制低温泵的所有操作，包括其再生。 系统参数存储在模块中的非易失性存储器中。 在再生程序中包括压力表的自动调零，粗糙泵送时阵列的加热，以及压力比测试的变化，以确定粗抽泵中的失速。 电子模块还在断电后重新启动系统，将压力表的使用限制在安全条件下，在低温泵运行时允许打开阀门之前提供警告并存储传感器校准信息。 通过泵上的控制盘的控制可能受到密码要求的限制。 还提供密码覆盖。
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公开(公告)号：US5157928A
公开(公告)日：1992-10-27
申请号：US704664
申请日：1991-05-20
申请人： Peter W. Gaudet , Donald A. Olsen , Michael J. Eacobacci , John T. Harvell , Robert J. Lepofsky , David E. Roche , Steven A. Bender
发明人： Peter W. Gaudet , Donald A. Olsen , Michael J. Eacobacci , John T. Harvell , Robert J. Lepofsky , David E. Roche , Steven A. Bender
CPC分类号： F04D19/04 , F04B37/08 , F04D27/00 , Y10S417/901
摘要： A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.
摘要翻译： 低温真空泵在整体组件中包括与低温泵阵列的第一级和第二级相关联的温度传感器和加热器，粗抽阀和净化阀。 可拆卸地联接在组件中的电子模块响应所有传感器并控制低温泵的所有操作，包括其再生。 系统参数存储在模块中的非易失性存储器中。 在再生程序中包括压力表的自动调零，粗糙泵送时阵列的加热，以及压力比测试的变化，以确定粗抽泵中的失速。 电子模块还在断电后重新启动系统，将压力表的使用限制在安全条件下，在低温泵运行时允许打开阀门之前提供警告并存储传感器校准信息。 通过泵上的控制盘的控制可能受到密码要求的限制。 还提供密码覆盖。
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