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公开(公告)号：US07413411B2
公开(公告)日：2008-08-19
申请号：US11115774
申请日：2005-04-27
申请人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
发明人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04 , Y10S417/901
摘要： A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动电动机，净化阀，粗抽阀和电子控制模块的真空泵。 公开了一种低温真空泵和涡轮分子真空泵。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 在涡轮分子泵系统中，通过检测泵驱动器上的当前负载或通过检测前级管路压力来检测净化气体通过净化阀的适当引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US06755028B2
公开(公告)日：2004-06-29
申请号：US10225485
申请日：2002-08-20
IPC分类号： B01D800
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04 , Y10S417/901
摘要： In a cryogenic vacuum pump, after determining that a power fail recovery mode is on, and that the temperature is below a setpoint, the cryopump is automatically cooled. If the power fail recovery mode is on, and the temperature is above the setpoint, a regeneration cycle is started automatically. If the power fail recovery mode is off, the cryopump may be maintained in an off state. When a command to turn on a pressure sensing thermocouple (TC) gauge is received, the TC gauge is turned on only if there is not a sufficient amount of gas to ignite. When a command to turn on a roughing valve is received, an additional command must be received before the roughing valve is turned on. When a temperature-sensing diode is faulty, temperature control is automatically turned off. During a regeneration cycle, a purge test is performed. If the purge test passes, heaters are turned on. If the purge test fails, the heaters are turned on only if the temperature reaches a threshold within a predetermined period. Otherwise, the regeneration is aborted.
摘要翻译： 在低温真空泵中，在确定电源故障恢复模式打开并且温度低于设定值之后，低温泵自动冷却。 如果电源故障恢复模式打开，温度高于设定值，则会自动启动再生循环。 如果电源故障恢复模式关闭，则低温泵可能保持在关闭状态。 当接收到打开压力感应热电偶（TC）规格的命令时，只有在没有足够量的气体点燃时，才会打开TC表。 当接收到打开粗加工阀的命令时，在粗加油阀打开之前必须接收附加命令。 当温度感应二极管故障时，温度控制自动关闭。 在再生循环中，进行清洗试验。 如果吹扫测试通过，加热器将打开。 如果吹扫测试失败，则只有在预定时间内温度达到阈值时，加热器才会打开。 否则，再生中止。
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公开(公告)号：US06461113B1
公开(公告)日：2002-10-08
申请号：US09454358
申请日：1999-12-03
申请人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
发明人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
IPC分类号： F04B4900
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04
摘要： A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动电动机，净化阀，粗抽阀和电子控制模块的真空泵。 公开了一种低温真空泵和涡轮分子真空泵。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 在涡轮分子泵系统中，通过检测泵驱动器上的当前负载或通过检测前级管路压力来检测净化气体通过净化阀的适当引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US06318093B2
公开(公告)日：2001-11-20
申请号：US09826692
申请日：2001-04-05
申请人： Peter W. Gaudet , Donald A. Olsen
发明人： Peter W. Gaudet , Donald A. Olsen
IPC分类号： B01D800
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04 , Y10S417/901
摘要： A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.
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公开(公告)号：US5443368A
公开(公告)日：1995-08-22
申请号：US92692
申请日：1993-07-16
申请人： Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte' , Peter W. Gaudet , Martin Stein , Steven C. Rosner , Robert J. Lepofsky
发明人： Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte' , Peter W. Gaudet , Martin Stein , Steven C. Rosner , Robert J. Lepofsky
摘要： A vacuum system comprises, as an integral assembly, a turbomolecular pump with drive motor, a vent valve, a purge valve, a roughing valve, a heater and an electronic control module. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. Proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动马达的涡轮分子泵，排气阀，净化阀，粗加工阀，加热器和电子控制模块。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 通过检测泵驱动器上的当前负载或通过检测前级压力来检测净化气体通过清洗阀的正确引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US06902378B2
公开(公告)日：2005-06-07
申请号：US10095126
申请日：2002-03-08
申请人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
发明人： Peter W. Gaudet , Robert J. Lepofsky , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matté , Martin Stein , Steven C. Rosner
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04 , Y10S417/901
摘要： A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动电动机，净化阀，粗抽阀和电子控制模块的真空泵。 公开了一种低温真空泵和涡轮分子真空泵。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 在涡轮分子泵系统中，通过检测泵驱动器上的当前负载或通过检测前级管路压力来检测净化气体通过净化阀的适当引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US06022195A
公开(公告)日：2000-02-08
申请号：US517091
申请日：1995-08-21
申请人： Peter W. Gaudet , Michael J. Eacobacci , Robert J. Lepofsky , David E. Roche , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte , Martin Stein , Steven C. Rosner
发明人： Peter W. Gaudet , Michael J. Eacobacci , Robert J. Lepofsky , David E. Roche , Alan L. Weeks , Gerald J. Fortier , Stephen R. Matte , Martin Stein , Steven C. Rosner
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04
摘要： A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling the motor and valves and is user programmable for establishing specific control sequences. The integral electronic control module is removable from the assembly and is connected to the other devices through a common connector assembly. In the turbomolecular pump system proper introduction of a purge gas through the purge valve is detected by detecting the current load on the pump drive or by detecting foreline pressure. To test the purge gas status, the purge valve may be closed and then opened as drive current or pressure is monitored. After power failure, the controller will continue normal drive of the turbomolecular pump so long as the speed of the pump has remained above a threshold value. Otherwise the vent valve will have been opened, and a start-up sequence must be initiated. During shutdown, power to the pump drive motor is discontinued and the vent valve is opened before the roughing valve is closed.
摘要翻译： 真空系统包括作为整体组件的具有驱动电动机，净化阀，粗抽阀和电子控制模块的真空泵。 公开了一种低温真空泵和涡轮分子真空泵。 控制模块具有用于控制电动机和阀的编程处理器，并且是用户编程的，用于建立特定的控制顺序。 集成电子控制模块可从组件移除，并通过公共连接器组件连接到其他设备。 在涡轮分子泵系统中，通过检测泵驱动器上的当前负载或通过检测前级管路压力来检测净化气体通过净化阀的适当引入。 为了测试吹扫气体状态，可以关闭吹扫阀，然后在监视驱动电流或压力时打开。 停电后，只要泵的速度保持在阈值以上，控制器将继续正常驱动涡轮分子泵。 否则排气阀将被打开，启动顺序必须启动。 在停机期间，停止对泵驱动电机供电，并在排气阀关闭前打开排气阀。
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公开(公告)号：US5265431A
公开(公告)日：1993-11-30
申请号：US936564
申请日：1992-08-27
申请人： Peter W. Gaudet , Paul E. Amundsen
发明人： Peter W. Gaudet , Paul E. Amundsen
CPC分类号： F04B37/08 , F25B2309/002
摘要： A network of cryopumps, each having an electronic regeneration controller, is coupled to a common rough pump. Each regeneration controller operates independently except that each is inhibited from opening its roughing valve to the common rough pump. Each regeneration controller only proceeds to open the roughing valve after it has received a token from a network interface terminal. The network interface terminal may control multiple groups of cryopumps coupled to respective common rough pumps. The regeneration controllers are removable modules connected to the cryopumps. A PROM is provided for each cryopump to the side of the connector opposite to the module. The PROM stores data specific to the cryopump and retains the data for the cryopump with replacement of the controller module.
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公开(公告)号：US4918930A
公开(公告)日：1990-04-24
申请号：US243707
申请日：1988-09-13
申请人： Peter W. Gaudet , Donald A. Olsen , Michael J. Eacobacci , John T. Harvell , Robert J. Lepofsky , David E. Roche , Steven A. Bender
发明人： Peter W. Gaudet , Donald A. Olsen , Michael J. Eacobacci , John T. Harvell , Robert J. Lepofsky , David E. Roche , Steven A. Bender
CPC分类号： F04D19/04 , F04B37/08 , F04D27/00 , Y10S417/901
摘要： A cryogenic vacuum pump includes, in an integral assembly, temperature sensors and heaters associated with the first and second stages of the cryopumping array, a roughing valve and a purge valve. An electronic module removably coupled in the assembly responds to all sensors and controls all operations of the cryopump including regeneration thereof. System parameters are stored in a nonvolatile memory in the module. Included in the regeneration procedures are an auto-zero of the pressure gauge, heating of the array throughout rough pumping, and a change in pressure rate test to determine stall in rough pumping. The electronic module also restarts the system after power failure, limits use of a pressure gauge to safe conditions, provides warnings before allowing opening of the valves while the cryopump is operating and stores sensor calibration information. Control through a control pad on the pump may be limited by a password requirement. Password override is also provided.
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公开(公告)号：US07155919B2
公开(公告)日：2007-01-02
申请号：US10750547
申请日：2003-12-31
申请人： Peter W. Gaudet , Carol Olsen, legal representative , Michael J. Eacobacci , Olive Harvell, legal representative
IPC分类号： B01D8/00
CPC分类号： F04D27/00 , F04B37/08 , F04B49/065 , F04D19/04 , Y10S417/901
摘要： An electronic controller maintains the operating temperature of a cryopump by controlling a heater coupled to the cryopump. The heater is coupled to a cryopumping surface of the cryopump. The controller can control the operation of the heater in response to feedback from temperature sensors coupled to the cryopump. The controller can cause the heater to shut-off if a temperature sensor reads out of its normal temperature range.
摘要翻译： 电子控制器通过控制耦合到低温泵的加热器来维持低温泵的工作温度。 加热器耦合到低温泵的低温泵送表面。 响应于耦合到低温泵的温度传感器的反馈，控制器可以控制加热器的操作。 如果温度传感器读出其正常温度范围，控制器可能导致加热器关闭。
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