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公开(公告)号:USD284771S
公开(公告)日:1986-07-22
申请号:US603588
申请日:1984-04-25
申请人: Kenji Tamada , Tadashi Yanagi
设计人: Kenji Tamada , Tadashi Yanagi
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公开(公告)号:USD297714S
公开(公告)日:1988-09-20
申请号:US734466
申请日:1985-05-15
申请人: Kenji Tamada , Tadashi Yanagi
设计人: Kenji Tamada , Tadashi Yanagi
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公开(公告)号:US4890294A
公开(公告)日:1989-12-26
申请号:US147726
申请日:1988-01-25
申请人: Junichi Nishimae , Kenji Yoshizawa , Masakazu Taki , Yoshihiro Ueda , Tadashi Yanagi , Akihiko Iwata
发明人: Junichi Nishimae , Kenji Yoshizawa , Masakazu Taki , Yoshihiro Ueda , Tadashi Yanagi , Akihiko Iwata
IPC分类号: H01J37/32 , H01S3/03 , H01S3/0975 , H05H1/46
CPC分类号: H01J37/32192 , H01J37/32339 , H01S3/0315 , H01S3/0975 , H05H1/46
摘要: The invention relates to a plasma apparatus where plasma is generated utilizing microwave discharge and laser excitation is performed and plasma processing is performed. More specifically, in a plasma apparatus where a microwave from a microwave oscillator is transmitted through a microwave transmission path to a microwave circuit, and plasma is generated by a microwave discharge within the microwave circuit, a plasma generating medium for generating the plasma is filled in a space formed between a conductor wall constituting a part of the microwave circuit and a dielectric installed opposite to the conductor wall, and the microwave circuit forms microwave mode having an electric field component orthogonal to the boundary between the dielectric and the plasma.
摘要翻译: 本发明涉及一种使用微波放电产生等离子体并进行激光激发并进行等离子体处理的等离子体装置。 更具体地,在微波振荡器的微波通过微波传输路径传输到微波电路的等离子体装置中,并且通过微波电路内的微波放电产生等离子体,用于产生等离子体的等离子体产生介质被填充 在构成微波电路的一部分的导体壁与与导体壁相对设置的电介质之间形成的空间,微波电路形成具有与电介质和等离子体之间的边界正交的电场分量的微波模式。
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