公开(公告)号：US20060291060A1

公开(公告)日：2006-12-28

申请号：US10569207

申请日：2004-08-26

申请人： Takeshi Shirai ,  Takao Kokublin ,  Hitoshi Ishizawa ,  Atsunobi Murakami

发明人： Takeshi Shirai ,  Takao Kokublin ,  Hitoshi Ishizawa ,  Atsunobi Murakami

IPC分类号： G02B1/10

CPC分类号： G03F7/70341 ,  G02B1/105 ,  G02B1/14 ,  G03F7/70875 ,  G03F7/70958 ,  G03F7/70983

摘要： An optical element is used for an exposure apparatus which is configured to illuminate a mask with an exposure light beam for transferring a pattern on the mask onto a substrate through a projection optical system and to interpose a given liquid in a space between a surface of the substrate and the projection optical system. The optical element includes a first anti-dissolution member provided on a surface of a transmissive optical element on the substrate's side of the projection optical system.