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公开(公告)号:US07279358B2
公开(公告)日:2007-10-09
申请号:US10511986
申请日:2003-04-22
申请人: Akira Yamauchi , Katsumi Terada , Satoru Naraba , Takashi Hare
发明人: Akira Yamauchi , Katsumi Terada , Satoru Naraba , Takashi Hare
IPC分类号: H01L21/00
CPC分类号: H01L24/81 , H01L21/67092 , H01L24/75 , H01L2224/0554 , H01L2224/05568 , H01L2224/05573 , H01L2224/056 , H01L2224/16 , H01L2224/75 , H01L2224/75743 , H01L2224/81203 , H01L2224/81801 , H01L2924/00014 , H01L2924/01004 , H01L2924/01006 , H01L2924/01033 , H01L2924/0105 , H01L2924/01057 , H01L2924/01078 , H01L2924/014 , H01L2924/07802 , H01L2924/07811 , H01L2924/14 , H01L2924/00 , H01L2224/05599 , H01L2224/0555 , H01L2224/0556
摘要: A mounting method includes the steps of, after positioning objects being bonded relative to each other, moving a movable wall positioned there around until coming into contact with one object holding means to form a local chamber having a local enclosed space, enclosing both objects in the chamber, reducing the pressure in the chamber, moving the object holding means in a direction for reducing the volume of the chamber and moving the movable wall following the movement of the object holding means, and bonding both objects to each other by pressing. Since the bonding part and the vicinity of the bonding part can be locally and efficiently enclosed from the surroundings, and the local chamber can vary the shape of the enclosed space with the bonding operation while maintaining the enclosed state even at the time of bonding.
摘要翻译: 安装方法包括以下步骤:在定位被相对于彼此粘合的物体之后,移动位于其周围的可动壁直到与一个物体保持装置接触以形成具有局部封闭空间的局部室, 室,减小了室中的压力,使物体保持装置沿着减小室的体积的方向移动,并且随着物体保持装置的移动而移动可移动壁,并且通过按压将两个物体彼此粘合。 由于接合部分和接合部分附近可以局部地且有效地从周围环绕,所以局部室也可以在接合时保持封闭状态的同时通过接合操作改变封闭空间的形状。
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公开(公告)号:US20060016555A1
公开(公告)日:2006-01-26
申请号:US10511986
申请日:2003-04-22
申请人: Akira Yamauchi , Katsumi Terada , Satoru Naraba , Takashi Hare
发明人: Akira Yamauchi , Katsumi Terada , Satoru Naraba , Takashi Hare
CPC分类号: H01L24/81 , H01L21/67092 , H01L24/75 , H01L2224/0554 , H01L2224/05568 , H01L2224/05573 , H01L2224/056 , H01L2224/16 , H01L2224/75 , H01L2224/75743 , H01L2224/81203 , H01L2224/81801 , H01L2924/00014 , H01L2924/01004 , H01L2924/01006 , H01L2924/01033 , H01L2924/0105 , H01L2924/01057 , H01L2924/01078 , H01L2924/014 , H01L2924/07802 , H01L2924/07811 , H01L2924/14 , H01L2924/00 , H01L2224/05599 , H01L2224/0555 , H01L2224/0556
摘要: A mounting method and a mounting device, the mounting method comprising the steps of, after positioning objects being bonded relative to each other, moving a movable wall positioned therearound until coming into contact with one object holding means to form a local chamber having a local enclosed space, enclosing both objects in the chamber, reducing the pressure in the chamber, moving the object holding means in a direction for reducing the volume of the chamber and moving the movable wall following the movement of the object holding means, and bonding both objects to each other by pressing, whereby, since the part to be bonded and its vicinity can be locally and efficiently enclosed separably from surroundings, and the local chamber capable of properly varying the shape of the enclosed space can be formed interlockingly with the bonding operation while maintaining the enclosed state even at the time of bonding, a specified mounting can be easily performed by a small device.
摘要翻译: 一种安装方法和安装装置,所述安装方法包括以下步骤:在定位相对于彼此接合的物体之后,移动位于其周围的可移动壁,直到与一个物体保持装置接触以形成具有局部封闭 空间,将两个物体封闭在腔室中,减小腔室中的压力,使物体保持装置沿着减小腔室的体积的方向移动,并且随着物体保持装置的移动移动可移动壁,并且将两个物体粘合到 通过按压,由于可以将局部且有效地围绕周围环境部分地进行局部且有效地密封的部分,并且可以适当地改变封闭空间的形状的局部室与粘合操作互锁地形成,同时保持 封闭状态即使在接合时,也可以通过小型装置容易地进行规定的安装。
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