BONDING METHOD OF SEMICONDUCTOR CHIP AND BONDING APPARATUS OF SEMICONDUCTOR CHIP
    2.
    发明申请
    BONDING METHOD OF SEMICONDUCTOR CHIP AND BONDING APPARATUS OF SEMICONDUCTOR CHIP 有权
    半导体芯片的接合方法和半导体芯片的接合装置

    公开(公告)号:US20160126218A1

    公开(公告)日:2016-05-05

    申请号:US14710070

    申请日:2015-05-12

    发明人: Yoichiro KURITA

    IPC分类号: H01L23/00 H01L21/78

    摘要: According to one embodiment, there is provided a bonding method of a semiconductor chip. The bonding method includes arranging an activated front surface of a semiconductor chip and an activated front surface of a substrate so as to face each other with a back surface of the semiconductor chip attached to a sheet. The bonding method includes pushing the back surface of the semiconductor chip through the sheet to closely attach the activated front surface of the semiconductor chip and the activated front surface of the substrate. The bonding method includes stripping the sheet from the back surface of the semiconductor chip while maintaining a state in which the activated front surface of the semiconductor chip is closely attached to the activated front surface of the substrate.

    摘要翻译: 根据一个实施例,提供了半导体芯片的接合方法。 接合方法包括将半导体芯片的激活前表面和基板的激活前表面布置成使得与附接到片材的半导体芯片的背面彼此面对。 接合方法包括通过片材推动半导体芯片的后表面以紧密地附着半导体芯片的激活的前表面和激活的基板的前表面。 接合方法包括从半导体芯片的背面剥离片材,同时保持半导体芯片的活化前表面紧密附着于基板的活化前表面的状态。