公开(公告)号：US08060244B2

公开(公告)日：2011-11-15

申请号：US11889923

申请日：2007-08-17

申请人： Takashi Aiuchi ,  Akihito Suzuki ,  Hirotsugu Kamamoto ,  Shuichi Yonemura ,  Takashi Imafu ,  Kazuhisa Sakamoto

发明人： Takashi Aiuchi ,  Akihito Suzuki ,  Hirotsugu Kamamoto ,  Shuichi Yonemura ,  Takashi Imafu ,  Kazuhisa Sakamoto

IPC分类号： G06F7/00

CPC分类号： H01L21/67276

摘要： An object of the present invention is to perform replacement of parts of a substrate processing apparatus more rapidly than that by the prior art. The present invention is a substrate processing apparatus constituted of a plurality of component parts for performing predetermined processing for a substrate, identification marks being attached to the respective component parts, the apparatus including: a storage unit for storing part information on each of the component parts necessary when placing an order for a component part, in correspondence with the identification mark; an input unit for inputting an identification mark of a component part to be ordered; and a display unit for displaying the part information in the storage unit corresponding to the inputted identification mark.

摘要翻译： 本发明的目的是比现有技术更快地更换基板处理装置的部件。 本发明是一种由多个用于对基板进行预定处理的部件构成的基板处理装置，识别标记附着在各个部件上，该装置包括：存储单元，用于存储关于每个部件的部件信息 在与识别标记对应的情况下，对组件部分进行订购时必要; 用于输入要订购的部件的识别标记的输入单元; 以及显示单元，用于在与输入的识别标记相对应的存储单元中显示零件信息。

公开(公告)号：US20070293970A1

公开(公告)日：2007-12-20

申请号：US11889923

申请日：2007-08-17

申请人： Takashi Aiuchi ,  Akihito Suzuki ,  Hirotsugu Kamamoto ,  Shuichi Yonemura ,  Takashi Imafu ,  Kazuhisa Sakamoto

发明人： Takashi Aiuchi ,  Akihito Suzuki ,  Hirotsugu Kamamoto ,  Shuichi Yonemura ,  Takashi Imafu ,  Kazuhisa Sakamoto

IPC分类号： G06F17/00

CPC分类号： H01L21/67276

摘要： An object of the present invention is to perform replacement of parts of a substrate processing apparatus more rapidly than that by the prior art. The present invention is a substrate processing apparatus constituted of a plurality of component parts for performing predetermined processing for a substrate, identification marks being attached to the respective component parts, the apparatus including: a storage unit for storing part information on each of the component parts necessary when placing an order for a component part, in correspondence with the identification mark; an input unit for inputting an identification mark of a component part to be ordered; and a display unit for displaying the part information in the storage unit corresponding to the inputted identification mark.

摘要翻译： 本发明的目的是比现有技术更快地更换基板处理装置的部件。 本发明是一种由多个用于对基板进行预定处理的部件构成的基板处理装置，识别标记附着在各个部件上，该装置包括：存储单元，用于存储关于每个部件的部件信息 在与识别标记对应的情况下，对组件部分进行订购时必要; 用于输入要订购的部件的识别标记的输入单元; 以及显示单元，用于在与输入的识别标记相对应的存储单元中显示零件信息。