公开(公告)号：US5315373A

公开(公告)日：1994-05-24

申请号：US904730

申请日：1992-06-26

申请人： Keishi Kubo ,  Yoshihiro Ikemoto ,  Tatsuo Itou

发明人： Keishi Kubo ,  Yoshihiro Ikemoto ,  Tatsuo Itou

IPC分类号： G01B9/02 ,  G01B11/02 ,  G01B11/30 ,  G01B21/30 ,  G01C3/06 ,  G01N21/88 ,  G01N37/00 ,  G01Q20/02 ,  G01Q60/24 ,  G01Q70/02 ,  G01B7/34

CPC分类号： G01Q20/02 ,  B82Y35/00 ,  G01B11/026 ,  G01B11/303

摘要： A method for detecting a minute displacement of a probe includes an emission from a light source of two light beams having different polarizing directions. The light beams are subsequently diverged by a first lens so as to pass through a beam splitter towards a separating prism. The light beams having passed through the prism are separated into first and second measuring beams which are subsequently focused by a second lens on first and second, spaced reflecting surfaces. The first and second measuring beams are then reflected by the first and second reflecting surfaces, respectively, so as to enter respective photodetectors after having passed through the separating prism, the beam splitter and a polarizing beam splitter for passing therethrough the first and second measuring beams or reflecting them depending on the polarizing direction of the incoming light. The first and second photodetectors outputs respective signals indicative of the associated positions of foci which are then processed by a signal processing circuit to provide an indication of the minute displacement of the probe.

摘要翻译： 用于检测探头的微小位移的方法包括来自具有不同偏振方向的两个光束的光源的发射。 光束随后被第一透镜发散，以便穿过分束器朝向分离棱镜。 已经穿过棱镜的光束被分离成第一和第二测量光束，其随后由第二透镜聚焦在第一和第二间隔的反射表面上。 然后第一和第二测量光束分别被第一和第二反射表面反射，以便在穿过分离棱镜，分束器和偏振分束器之后进入相应的光电检测器，用于穿过第一和第二测量光束 或者根据入射光的偏振方向反射它们。 第一和第二光电检测器输出指示相关联的焦点位置的相应信号，然后由信号处理电路对其进行处理，以提供探针的微小位移的指示。

公开(公告)号：US5164791A

公开(公告)日：1992-11-17

申请号：US664623

申请日：1991-03-04

申请人： Keishi Kubo ,  Tatsuo Itou

发明人： Keishi Kubo ,  Tatsuo Itou

IPC分类号： G01B9/02 ,  G01B11/00 ,  G01D5/38 ,  G01Q10/00 ,  G01Q20/02 ,  G01Q60/24

CPC分类号： G01D5/38 ,  B82Y35/00 ,  G01Q20/02

摘要： A displacement detector device has a source of laser beam; a diffraction grating for separating the laser beam into a plurality of beam components; a filter for shielding the beam components other than the two beam components of .+-. primary order produced by the diffraction grating; a wavelength plate operable to vary the polarized state of one of the two beam components of .+-. primary order; a lens element for focusing the two beam components of .+-. primary order on a displacement plane and a reference plane, respectively; and a photosensor. The two beam components of .+-. primary order focused on the reference and displacement planes, respectively, are subsequently reflected therefrom and are then collimated by the lens element after having again entered the lens element in substantially overlapped relationship. The two beam components emerging from the lens element are again diffracted by the diffraction grating, and the photosensor detects an interfering component of the beam components of primary order.

摘要翻译： 位移检测器装置具有激光束源; 用于将激光束分离成多个光束分量的衍射光栅; 用于屏蔽由衍射光栅产生的+/-一级的两个光束分量以外的光束分量的滤光器; 波长板，其可操作以改变+/-一阶的两个光束分量之一的偏振状态; 一个透镜元件，分别用于将+/-一级的两个光束分量聚焦在位移平面和参考平面上; 和光电传感器。 分别聚焦在参考位移平面上的+/-一级的两个光束分量随后从其反射，然后在基本上重叠的关系再次进入透镜元件之后被透镜元件准直。 从透镜元件出射的两个光束分量再次被衍射光栅衍射，并且光电传感器检测一阶光束分量的干扰分量。