公开(公告)号：US06636655B2

公开(公告)日：2003-10-21

申请号：US09939060

申请日：2001-08-24

申请人： Terry D. Zhu ,  Mark Walters

发明人： Terry D. Zhu ,  Mark Walters

IPC分类号： G02B626

CPC分类号： G02B6/3518 ,  G02B6/3514 ,  G02B6/3556 ,  G02B6/3582

摘要： MEMS optical switches can include a substrate having first and second opposing faces and at least one side therebetween. An input is obliquely angled towards the face and optically couples optical radiation towards the face. A movable reflector is on the face and moves from a first position to a second position that is parallel to the first position to reflect the optical radiation from the input to provide reflected optical radiation. A output is obliquely angled away from the face and optically couples the reflected optical radiation away from the face.

公开(公告)号：US06504968B1

公开(公告)日：2003-01-07

申请号：US09650990

申请日：2000-08-30

申请人： Terry D. Zhu ,  John S. McKillop ,  Mark D. Walters

发明人： Terry D. Zhu ,  John S. McKillop ,  Mark D. Walters

IPC分类号： G02B635

CPC分类号： G02B6/3584 ,  G02B6/3514 ,  G02B6/3546 ,  G02B6/355 ,  G02B6/357 ,  G02B6/358 ,  G02B6/3596 ,  G02B26/0833 ,  G02B26/085

摘要： Embodiments of the present invention can provide a substrate and a moveable reflector, on the substrate, having first and second opposing surfaces, wherein the moveable reflector moves to first and second positions on the substrate. A latch is located on the substrate adjacent to the first surface of the moveable reflector opposite the second surface and coupled to the moveable reflector, wherein the latch holds the moveable reflector in the first and second positions. An actuator is located on the substrate adjacent to the first surface of the moveable reflector opposite the second surface and is coupled to the latch, wherein the actuator moves the moveable reflector to the first and second positions. Also disclosed are moveable reflectors having a first reflecting position along an input beam path that reflects optical radiation from the input beam path along a first reflected beam path and a second reflecting position along the input beam path spaced-apart from the first reflecting position that reflects optical radiation from the input beam path along a second reflected beam path parallel to the first reflected beam path. Related methods are also disclosed.