公开(公告)号：US4981408A

公开(公告)日：1991-01-01

申请号：US452449

申请日：1989-12-18

申请人： John L. Hughes ,  Thomas E. Shula ,  Carlos E. Rodriguez

发明人： John L. Hughes ,  Thomas E. Shula ,  Carlos E. Rodriguez

IPC分类号： B65G49/00 ,  B23Q7/00 ,  B65G37/02 ,  H01L21/00 ,  H01L21/677

CPC分类号： H01L21/67161 ,  B23Q7/003 ,  B65G37/02 ,  H01L21/6719 ,  H01L21/67201 ,  H01L21/67781 ,  H01L21/67796

摘要： A dual track substrate handling and processing system includes an entrance load lock station, an exit load lock station and a plurality of substrate processing stations, all positioned above a transfer vacuum chamber. The load lock station and each processing station are configured to hold two vertically oriented workpieces. A transport system conveys workpieces two at a time from parallel input cassettes to the entrance load lock station. The transport system includes a transport assembly that simultaneously advances two workpieces from each station to the next station; thus workpieces are processed two at a time in the same environment in each processing station and system throughput is correspondingly increased.

摘要翻译： 双轨基板处理和处理系统包括入口加载锁定站，出口加载锁定站和多个基板处理站，全部位于传送真空室之上。 负载锁定站和每个处理站被配置为保持两个垂直定向的工件。 运输系统一次将两件工件从平行输入盒传送到入口装载锁定台。 运输系统包括一个运输组件，同时将两个工件从每个车站提升到下一个车站; 因此在每个处理站中在相同的环境中一次处理两个工件，并且相应地增加系统吞吐量。