公开(公告)号：US06368676B1

公开(公告)日：2002-04-09

申请号：US09618543

申请日：2000-07-18

Applicant: Marcel P. J. Gaudreau ,  Michael Kempkes ,  Timothy Hawkey

Inventor： Marcel P. J. Gaudreau ,  Michael Kempkes ,  Timothy Hawkey

IPC: C23C1406

CPC classification number: C23C16/26 ,  A63B49/02 ,  A63B53/00 ,  A63B53/04 ,  A63B2209/00 ,  C23C14/0605 ,  C23C14/48

Abstract: A method of coating an article wherein the method includes placing a large number N of non-industrial stock pieces in a vacuum chamber where N is a function of the cost of each stock piece, generating a plasma about the stock pieces, and supplying a current to the stock pieces at a level tailored to sufficiently coat each of the plurality of stock pieces with ion from the plasma and wherein the current level depends on the number N of stock pieces.

Abstract translation: 一种涂布物品的方法，其中所述方法包括将大量非工业原料放置在真空室中，其中N是每个原料的成本的函数，产生关于原料的等离子体，并且提供电流 在定制的级别上对原料进行切割以使来自等离子体的离子充分地涂覆多个原料的每个，并且其中当前的等级取决于原料的数量N.

公开(公告)号：US5353656A

公开(公告)日：1994-10-11

申请号：US931836

申请日：1992-08-18

Applicant: Timothy Hawkey ,  Richard Torti ,  Bruce Johnson

Inventor： Timothy Hawkey ,  Richard Torti ,  Bruce Johnson

IPC: G01C19/24

CPC classification number: G01C19/24 ,  Y10T74/1232 ,  Y10T74/1275 ,  Y10T74/1282

Abstract: An integrated electrostatically-controlled micromechanical gyroscope with a rotor encompassed within a rotor cavity and electrostatically spun within the cavity. The gyroscope includes a plurality of axial electrostatic rotor actuators above and below the rotor for controlling the axial and tilt position of the rotor within the cavity, and a plurality of radial electrostatic actuators spaced circumferentially around the rotor for controlling the radial and tilt position of the rotor within the cavity. The position of the rotor within the cavity is then resolved to determine the external forces acting on the rotor.

Abstract translation: 一个集成的静电控制微机械陀螺仪，转子包含在转子腔内并在腔内静电纺丝。 陀螺仪包括在转子上方和下方的多个轴向静电转子致动器，用于控制转子在空腔内的轴向和倾斜位置，以及围绕转子周向隔开的多个径向静电致动器，用于控制转子的径向和倾斜位置 转子内腔。 然后解决转子在腔内的位置，以确定作用在转子上的外力。